Adaptive wafer modulator for placing a selected pattern on a semiconductor wafer

Claim 2

A lithography system for placing a selected pattern on a wafer comprising: a light source; a wafer positioned such that light from the light source impinges on a portion thereof; an image plate positioned between the light source and the wafer, the image plate having a selected pattern thereon; a lens positioned between the image plate and the wafer for focusing the selected pattern on the wafer surface; and a chuck supporting the wafer, the chuck including a wafer modulator operable to elastically bend the portion of the wafer surface on which the light is impinging so that the elastically bent portion generally conforms more closely to a calibrated focal pattern of an imaging system than to a presumed flat focal plane of the imaging system.

Claim 3

The lithography system according to claim 1 wherein the wafer modulator further comprises a plurality of adjustable pins mounted onto the chuck, the adjustable pins for supporting the wafer and elastically bending the wafer surface; a means for securely retaining the wafer in contact with the adjustable pins; and a means for varying the height of selected individual pins to bend the portion of the wafer surface supported by the selected pins.

Claim 4

The lithography system according to claim 1 further comprising control electronics connected to the chuck for controlling the wafer modulator; and a pattern alignment electronics connected to the control electronics, the pattern alignment electronics for outputting through the control electronics data representing the calibrated focal pattern of the imaging systems to the wafer modulator.

Claim 5

The lithography system of claim 1 further including at least one mirror positioned in the light.

Claim 6

The lithography system according to claim 1 wherein the wafer wafer modulator is operable to elastically bend a different portion of the wafer surface for light from the light source to impinge thereon such that the different portion generally conforms more closely to the calibrated focal pattern of the imaging system than to the presumed flat focal plane of the imaging system.

Claim 7

A lithography system for placing a selected pattern on a wafer comprising: a light source; a wafer positioned for light from the light source to impinge thereon; an image plate means positioned between the light source and the wafer for creating a selected pattern on the wafer; a focusing means positioned between the image plate and the wafer for focusing the selected pattern on a selected portion of the wafer surface; and a chuck means for retaining the wafer, the chuck including a wafer modulator means for elastically deforming the selected portion to a non-flat surface so that the elastically deformed portion conforms more closely to a calibrated focal pattern of an imaging system than to a presumed flat focal plane of the imaging system, while the selected portion is exposed to the selected pattern.

Claim 8

A lithography system for placing a selected pattern on a wafer comprising: a light source; a wafer positioned for light from the light source to impinge thereon; an image plate means positioned between the light source and the wafer for creating a selected pattern on the wafer; a focusing means positioned between the image plate and the wafer for focusing the selected pattern on a selected portion of the wafer surface; and a chuck means for retaining the wafer, the chuck including a wafer modulator means for elastically deforming the selected portion to a non-flat surface so that the elastically deformed portion conforms more closely to a calibrated focal pattern of an imaging system than to a presumed flat focal plane of the imaging system, while the selected portion is exposed to the selected pattern.

Claim 9

The lithography system according to claim 6 wherein the wafer modulator further comprises a plurality of adjustable pins mounted onto the chuck, the adjustable pins for supporting the wafer and elastically deforming the wafer surface; and a means for securely retaining the wafer on the adjustable pins.

Claim 10

The lithography system according to claim 6 further comprising control electronics connected to the chuck for controlling the wafer modulator; and a pattern alignment electronics connected to the control electronics, the pattern alignment electronics for outputting through the control electronics data representing the calibrated focal pattern of the imaging system to the wafer modulator.

Claim 11

The lithography system of claim 6 wherein the focusing means includes a mirror in the light path between the light source and the wafer for directing the light onto the wafer.

Claim 12

The lithography system of claim 6 wherein the focusing means includes a lens through which the light passes for directing the light onto the selected portion of the wafer.

Claim 13

The lithography system according to claim 5 wherein after the selected portion is exposed to the selected pattern, the wafer modulator means is operable to elastically deform a different portion other than the selected portion of the wafer surface for light from the light source to impinge thereon such that the different portion generally conforms more closely to the calibrated focal pattern of the imaging system than to the presumed flat focal plane of the imaging system.

Claim 14

A lithography system for placing a selected pattern on a wafer comprising: a light source; a lens; an image plate holder adapted to position an image plate between the light source and the lens; and a chuck for retaining a wafer in a position such that light from the light source impinges thereon, the chuck including a wafer modulator adapted to bend that portion of the wafer on which the light impinges to a non-flat surface so that the bent portion of the wafer generally conforms more closely to a calibrated focal pattern of an imaging system than to a presumed flat focal plane of the imaging system.

Claim 15

A lithography system for placing a selected pattern on a wafer comprising: a light source; a lens; an image plate holder adapted to position an image plate between the light source and the lens; and a chuck for retaining a wafer in a position such that light from the light source impinges thereon, the chuck including a wafer modulator adapted to bend that portion of the wafer on which the light impinges to a non-flat surface so that the bent portion of the wafer generally conforms more closely to a calibrated focal pattern of an imaging system than to a presumed flat focal plane of the imaging system.

Claim 16

The lithography system according to claim 12 wherein the wafer modulator is operable to bend a different portion of the wafer for light from the light source to impinge thereon such that the different portion generally conforms more closely to the calibrated focal pattern of an imaging system than to the presumed flat focal plane of the imaging system.

Claim 19

The method according to claim 14 further including, prior to the placing of an image plate having a desired pattern, the steps of: placing an image plate having a calibration pattern between the light source and the selected lens; illuminating through the selected lens a plurality of calibration surfaces to expose each calibration surface to the calibration pattern of the image plate, each calibration surface being illuminated at a slightly different distance from the selected lens; and calibrating the focal pattern of the imaging system by sensing the locations of a plurality of focal points across the calibration surfaces.

Claim 20

The method according to claim 14 further including, prior to the placing of an image plate having a desired pattern, the steps of: placing an image plate having a calibration pattern between the light source and the selected lens; illuminating through the selected lens a calibration surface with the calibration pattern of the image plate; and using an active feedback system to calibrate the focal pattern of the imaging system by modulating the calibration surface to sense the locations of a plurality of focal points across the calibration surface.

Claim 21

The method according to claim 14, further comprising the step of exposing the portion of the wafer on which the light impinges to the desired pattern of the image plate; and for each portion of the wafer other than the exposed portion, repeating the following steps: positioning the each portion for light from the light source to impinge thereon; bending the each portion to a non-flat surface such that the each portion conforms more closely to the calibrated focal pattern of the imaging system than to the presumed flat focal plane of the imaging system; and exposing the each portion of the wafer on which the light impinges to the desired pattern of the image plate.

Claim 22

The method according to claim 17 wherein the step of positioning the each portion includes the step of adjusting a mirror of the imaging system for light from the light source to impinge on the each portion.

Claim 25

The method according to claim 19 further including, prior to the placing of an image plate having a desired pattern, the steps of: placing an image plate having a calibration pattern between the light source and the selected lens; illuminating through the selected lens a plurality of calibration surfaces to expose each calibration surface to the calibration pattern of the image plate, each calibration surface being illuminated at a slightly different distance from the selected lens; and calibrating a focal pattern of the imaging system by sensing the locations of a plurality of focal points across the calibration surfaces.

Claim 26

The method according to claim 19 further including, prior to the placing of an image plate having a desired pattern, the steps of: placing an image plate having a calibration pattern between the light source and the selected lens; illuminating through the selected lens a calibration surface with the calibration pattern of the image plate; and using an active feedback system to calibrate a focal pattern of the imaging system by modulating the calibration surface to sense the locations of a plurality of focal points across the calibration surface.

Claim 27

The method according to claim 19, further comprising the step of for each portion of the wafer surface other than the illuminated portion, repeating the following steps: positioning the each portion for light from the light source to impinge thereon; elastically deforming the each portion to a non-flat surface such that the each portion conforms more closely to the calibrated focal pattern of the imaging system than to the presumed flat focal plane of the imaging system; and exposing the each portion to the desired pattern of the image plate.

Claim 28

The method according to claim 22 wherein the step of positioning the each portion includes the step of adjusting a mirror of the imaging system for light from the light source to impinge on the each portion.