US5627435A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Hollow cathode array and method of cleaning sheet stock therewith
Assignee: Messer LLC
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Filing: 1996-02-15
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Granted: 1997-05-06
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Expires: 2016-02-15
Abstract
Abstract An array of hollow cathodes can be made by mounting a housing connected to a source of plasma precursor gas and to a source of power in a vacuum chamber, said housing having a plurality of uniformly spaced openings in a wall thereof into which a plasma can be generated. A substrate to be treated is mounted parallel to and spaced a preselected distance from said openings. In operation, a plurality of plasma torches is created extending from the openings which can plasma etch and remove coatings on said substrate.
Inventors
- 👤 Frank Jansen
- 👤 Steven K. Krommenhoek
- 👤 Abraham I. Belkind
- 👤 Zoltan Orban, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 13:55
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32431; H01J37/32532; H01J37/32596; H01J37/3266
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
82 words
A hollow cathode array comprising a vacuum chamber; a housing within said chamber having a plurality of uniformly spaced openings in a wall thereof, the size of the openings and the thickness of the housing wall chosen so that a plasma is generated within the housing and emitted from the housing through said openings; a means of supplying a plasma precursor gas to said housing; and a means of supplying sufficient power to said housing to generate a plasma within said housing.
Claim 2
Dependent Claim
82 words
A hollow cathode array comprising a vacuum chamber; a housing within said chamber having a plurality of uniformly spaced openings in a wall thereof, the size of the openings and the thickness of the housing wall chosen so that a plasma is generated within the housing and emitted from the housing through said openings; a means of supplying a plasma precursor gas to said housing; and a means of supplying sufficient power to said housing to generate a plasma within said housing.
Claim 3
Dependent Claim
33 words
A hollow cathode array according to claim 1 wherein a substrate to be treated with said plasma discharge is mounted in said vacuum chamber parallel to and a preselected distance from said openings.
Claim 4
Dependent Claim
18 words
A hollow cathode array according to claim 2 wherein a first magnet assembly is mounted beneath said substrate.
Claim 5
Dependent Claim
18 words
A hollow cathode array according to claim 2 wherein a first magnet assembly is mounted above said substrate.
Claim 6
Dependent Claim
27 words
A hollow cathode array according to claim 3 wherein a second magnet assembly is mounted above said housing, said first and second magnet assemblies having opposite polarities.
Claim 7
Dependent Claim
32 words
A hollow cathode array according to claim 1 wherein said power source is an AC power source with a frequency from about 50 cycles per second to about 50 Megacycles per second.
Claim 8
Dependent Claim
27 words
A hollow cathode array according to claim 1 wherein said power source is an AC power source with a frequency from about 60 to about 100 kilohertz.
Claim 9
Dependent Claim
17 words
A hollow cathode array according to claim 1 wherein said power source is a DC power source.
Claim 10
Dependent Claim
118 words
A hollow cathode array comprising a vacuum chamber; a housing having a plurality of uniformly spaced openings in a wall thereof, the size of the openings and the thickness of the housing wall chosen so that a plasma is generated within said housing and emitted from said housing through said openings; a means of supplying a plasma precursor gas to said housing; a means of supplying sufficient power to said housing to generate a plasma within said housing, wherein said power source is an AC power source with a frequency from about 50 cycles per second to about 50 Megacycles per second; and wherein two adjacent hollow cathodes are connected to a secondary coil of an isolation transformer.
Claim 11
Dependent Claim
118 words
A hollow cathode array comprising a vacuum chamber; a housing having a plurality of uniformly spaced openings in a wall thereof, the size of the openings and the thickness of the housing wall chosen so that a plasma is generated within said housing and emitted from said housing through said openings; a means of supplying a plasma precursor gas to said housing; a means of supplying sufficient power to said housing to generate a plasma within said housing, wherein said power source is an AC power source with a frequency from about 50 cycles per second to about 50 Megacycles per second; and wherein two adjacent hollow cathodes are connected to a secondary coil of an isolation transformer.
Claim 12
Dependent Claim
22 words
A hollow cathode array according to claim 9 wherein the mid-point of said secondary coil is connected to ground through an impedance.
Claim 13
Dependent Claim
19 words
A hollow cathode array according to claim 9 wherein the mid-point of said secondary coil is shorted to ground.
Claim 14
Dependent Claim
16 words
A hollow cathode array according to claim 1 wherein said housing has cooling means affixed thereto.
Claim 15
Dependent Claim
14 words
A hollow cathode array according to claim 2 wherein said substrate is electrically floating.
Claim 16
Dependent Claim
13 words
A hollow cathode array according to claim 2 wherein said substrate is grounded.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-05 | 2000-11-04 | 2001-05-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-05 | 2004-11-04 | 2005-05-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-05 | 2008-11-04 | 2009-05-06 | $7700.00 | Window Closed / Lapsed |