US5633073A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ceramic susceptor with embedded metal electrode and eutectic connection
Assignee: Applied Materials Inc
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Filing: 1995-07-14
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Granted: 1997-05-27
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Expires: 2015-07-14
Abstract
Abstract A ceramic susceptor with an embedded metal electrode. The metal electrode has multiple apertures, and the ceramic material is cross-linked through the apertures. An electrical connection to the electrode protects the electrode from the environment in the processing chamber. The ceramic may be aluminum nitride, and the metal electrode may be a mesh of molybdenum wires. To form the electrical connection, the susceptor may be heated until an eutectic forms between a conductive connector and the metal electrode. Alternately, a brazing material may be placed between the metal layer and a conductive connector.
Inventors
- 👤 David W. Cheung
- 👤 Mark A. Fodor
- 👤 Christopher Lane
- 👤 Harold H. Mortensen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 11:10
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45565; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4586; C23C16/50; C23C16/505; C23C16/509; C23C16/5096; C23C16/52; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0432; H10P72/70; H10P72/76; H10P72/7604; H10P72/7624; H10P72/7626; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
100 words
A method of forming a susceptor comprising: isostatically pressing a high melting point conductive metal layer having a plurality of apertures therein between two green ceramic plates until cross-linking between said two ceramic plates occurs through said apertures to form a ceramic member in which said metal layer is embedded; forming an opening from a surface of said ceramic member to said metal layer; securing a conductive connector in said opening; and heating said susceptor until an eutectic forms between said conductive connector and said metal layer to form an electrical connection between said metal layer and said conductive connector.
Claim 2
Independent Claim
100 words
A method of forming a susceptor comprising: isostatically pressing a high melting point conductive metal layer having a plurality of apertures therein between two green ceramic plates until cross-linking between said two ceramic plates occurs through said apertures to form a ceramic member in which said metal layer is embedded; forming an opening from a surface of said ceramic member to said metal layer; securing a conductive connector in said opening; and heating said susceptor until an eutectic forms between said conductive connector and said metal layer to form an electrical connection between said metal layer and said conductive connector.
Claim 3
Dependent Claim
92 words
A susceptor for supporting a substrate during a deposition process, comprising: a ceramic member; a high melting-point conductive metallic layer having a plurality of holes therein embedded in said ceramic member; an opening from a surface of said ceramic member to said metal layer; a conductive connector secured in said opening; and an eutectic layer disposed between said conductive connector and said metal layer to form an electrical connection between said metal layer and said conductive connector and to protect said metal layer from an environment in a chamber containing said susceptor.
Claim 4
Dependent Claim
92 words
A susceptor for supporting a substrate during a deposition process, comprising: a ceramic member; a high melting-point conductive metallic layer having a plurality of holes therein embedded in said ceramic member; an opening from a surface of said ceramic member to said metal layer; a conductive connector secured in said opening; and an eutectic layer disposed between said conductive connector and said metal layer to form an electrical connection between said metal layer and said conductive connector and to protect said metal layer from an environment in a chamber containing said susceptor.
Claim 5
Dependent Claim
10 words
The susceptor of claim 2 wherein said connector is nickel.
Claim 6
Dependent Claim
11 words
The susceptor of claim 3 wherein said metal layer is molybdenum.
Claim 7
Dependent Claim
13 words
The susceptor of claim 4 wherein said eutectic layer is a molybdenum-nickel alloy.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-26 | 2000-11-25 | 2001-05-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-26 | 2004-11-25 | 2005-05-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-26 | 2008-11-25 | 2009-05-27 | $7700.00 | Window Closed / Lapsed |