Patent US5633073A successfully refreshed from Google Patents.
US5633073A
Expired / Lapsed
US
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Ceramic susceptor with embedded metal electrode and eutectic connection
Assignee: Applied Materials Inc
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Filing: 1995-07-14
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Granted: 1997-05-27
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Expires: 2015-07-14
Abstract
Abstract A ceramic susceptor with an embedded metal electrode. The metal electrode has multiple apertures, and the ceramic material is cross-linked through the apertures. An electrical connection to the electrode protects the electrode from the environment in the processing chamber. The ceramic may be aluminum nitride, and the metal electrode may be a mesh of molybdenum wires. To form the electrical connection, the susceptor may be heated until an eutectic forms between a conductive connector and the metal electrode. Alternately, a brazing material may be placed between the metal layer and a conductive connector.
Inventors
- 👤 David W. Cheung
- 👤 Mark A. Fodor
- 👤 Christopher Lane
- 👤 Harold H. Mortensen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 17:16
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45565; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4586; C23C16/50; C23C16/505; C23C16/509; C23C16/5096; C23C16/52; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0432; H10P72/70; H10P72/76; H10P72/7604; H10P72/7624; H10P72/7626; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
100 words
A method of forming a susceptor comprising: isostatically pressing a high melting point conductive metal layer having a plurality of apertures therein between two green ceramic plates until cross-linking between said two ceramic plates occurs through said apertures to form a ceramic member in which said metal layer is embedded; forming an opening from a surface of said ceramic member to said metal layer; securing a conductive connector in said opening; and heating said susceptor until an eutectic forms between said conductive connector and said metal layer to form an electrical connection between said metal layer and said conductive connector.
Claim 2
Independent Claim
100 words
A method of forming a susceptor comprising: isostatically pressing a high melting point conductive metal layer having a plurality of apertures therein between two green ceramic plates until cross-linking between said two ceramic plates occurs through said apertures to form a ceramic member in which said metal layer is embedded; forming an opening from a surface of said ceramic member to said metal layer; securing a conductive connector in said opening; and heating said susceptor until an eutectic forms between said conductive connector and said metal layer to form an electrical connection between said metal layer and said conductive connector.
Claim 3
Dependent Claim
92 words
A susceptor for supporting a substrate during a deposition process, comprising: a ceramic member; a high melting-point conductive metallic layer having a plurality of holes therein embedded in said ceramic member; an opening from a surface of said ceramic member to said metal layer; a conductive connector secured in said opening; and an eutectic layer disposed between said conductive connector and said metal layer to form an electrical connection between said metal layer and said conductive connector and to protect said metal layer from an environment in a chamber containing said susceptor.
Claim 4
Dependent Claim
92 words
A susceptor for supporting a substrate during a deposition process, comprising: a ceramic member; a high melting-point conductive metallic layer having a plurality of holes therein embedded in said ceramic member; an opening from a surface of said ceramic member to said metal layer; a conductive connector secured in said opening; and an eutectic layer disposed between said conductive connector and said metal layer to form an electrical connection between said metal layer and said conductive connector and to protect said metal layer from an environment in a chamber containing said susceptor.
Claim 5
Dependent Claim
10 words
The susceptor of claim 2 wherein said connector is nickel.
Claim 6
Dependent Claim
11 words
The susceptor of claim 3 wherein said metal layer is molybdenum.
Claim 7
Dependent Claim
13 words
The susceptor of claim 4 wherein said eutectic layer is a molybdenum-nickel alloy.
References Cited (Backward Citations)
US4430588A
Cited
US4699310A
Cited
JPS61171128A
Cited
JPS6272577A
Cited
US4749118A
Cited
JPS62182116A
Cited
JPS6395644A
Cited
US4891335A
Cited
JPH01200625A
Cited
JPH03194948A
Cited
JPH03217043A
Cited
JPH03255626A
Cited
JPH03255625A
Cited
US5231690A
Cited
JPH0434953A
Cited
US5158659A
Cited
JPH0475799A
Cited
US5280156A
Cited
JPH04296040A
Cited
JPH04296485A
Cited
JPH04298062A
Cited
JPH04300136A
Cited
US5306895A
Cited
JPH04304941A
Cited
JPH0513557A
Cited
JPH0521585A
Cited
US5192622A
Cited
JPH05200641A
Cited
GB2263430A
Cited
JPH06279974A
Cited
JPH06291049A
Cited
JPH0774451A
Cited
WO1995014308A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-26 | 2000-11-25 | 2001-05-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-26 | 2004-11-25 | 2005-05-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-26 | 2008-11-25 | 2009-05-27 | $7700.00 | Window Closed / Lapsed |