US5821175A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Removal of surface contaminants by irradiation using various methods to achieve desired inert gas flow over treated surface
Assignee: Cauldron LP
•
Filing: 1994-11-09
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Granted: 1998-10-13
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Expires: 2014-11-09
Abstract
Abstract An apparatus and method for removing surface contaminants from a surface of a substrate provides a laminar flow of inert gas over the substrate surface while irradiating the substrate. The invention enables removal of surface contaminants without altering the underlying molecular crystal structure of the substrate. The source of high-energy irradiation includes a pulsed or continuous wave laser or high-energy lamp.
Inventors
- 👤 Audrey C. Engelsberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 12:24
CPC Classifications
B; B08; B08B; B08B7/00; B08B7/0035; B08B7/0057; B08B7/0042; B23; B23K; B23K26/00; B23K26/14; B23K26/142; B23K26/1435; B23K26/1436; B23K26/1437; B23K26/1462; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70383; G03F7/704; G03F7/708; G03F7/70858; G03F7/70866; G03F7/70908; G03F7/70925; H; H10; H10P; H10P14/00; H10P14/40; H10P14/412; H10P70/00; H10P70/10; H10P70/12; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P95/00; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/092; Y; Y10; Y10S; Y10S438/00; Y10S438/906
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
137 words
A method for removing surface contaminants from a treatment surface of a substrate while preserving the crystal structure of the surface being treated, comprising the steps of: introducing across said treatment surface a flow of gas inert to the treatment surface, said gas flow having a velocity vector substantially parallel to said treatment surface at substantially all points over said treatment surface; and irradiating said treatment surface with high-energy irradiation, said irradiation having an energy density and duration sufficient to release surface contaminants from the treatment surface and insufficient to alter the crystal structure of the treatment surface, wherein said gas flow originates from a gas flow that is forced through a flow straightener located upstream of said treatment surface to generate a velocity profile that is substantially uniform across the exit plane of said flow straightener.
Claim 2
Independent Claim
137 words
A method for removing surface contaminants from a treatment surface of a substrate while preserving the crystal structure of the surface being treated, comprising the steps of: introducing across said treatment surface a flow of gas inert to the treatment surface, said gas flow having a velocity vector substantially parallel to said treatment surface at substantially all points over said treatment surface; and irradiating said treatment surface with high-energy irradiation, said irradiation having an energy density and duration sufficient to release surface contaminants from the treatment surface and insufficient to alter the crystal structure of the treatment surface, wherein said gas flow originates from a gas flow that is forced through a flow straightener located upstream of said treatment surface to generate a velocity profile that is substantially uniform across the exit plane of said flow straightener.
Claim 3
Dependent Claim
14 words
A method according to claim 1 wherein said flow straightener comprises a filter assembly.
Claim 4
Dependent Claim
28 words
A method according to claim 2, wherein said gas flow originates from a gas flow that is introduced into a mixing chamber disposed upstream of said filter assembly.
Claim 5
Independent Claim
121 words
A method for removing surface contaminants from a treatment surface of a substrate while preserving the crystal structure of the surface being treated, comprising the steps of: placing said treatment surface in a flow channel in a manner such that said treatment surface is upside down relative to gravitational forces; introducing across said treatment surface a flow of gas inert to the treatment surface, said gas flow having a velocity vector substantially parallel to said treatment surface at substantially all points over said treatment surface; and irradiating said treatment surface with high-energy irradiation, said irradiation having an energy density and duration sufficient to release surface contaminants from the treatment surface and insufficient to alter the crystal structure of the treatment surface.
Claim 6
Independent Claim
121 words
A method for removing surface contaminants from a treatment surface of a substrate while preserving the crystal structure of the surface being treated, comprising the steps of: placing said treatment surface in a flow channel in a manner such that said treatment surface is upside down relative to gravitational forces; introducing across said treatment surface a flow of gas inert to the treatment surface, said gas flow having a velocity vector substantially parallel to said treatment surface at substantially all points over said treatment surface; and irradiating said treatment surface with high-energy irradiation, said irradiation having an energy density and duration sufficient to release surface contaminants from the treatment surface and insufficient to alter the crystal structure of the treatment surface.
Claim 7
Independent Claim
107 words
A method for removing surface contaminants from a treatment surface of a substrate while preserving the crystal structure of the surface being treated, comprising the steps of: placing the substrate in a recess formed in a flow channel such that the treatment surface is flush with the surface of said flow channel; introducing across said treatment surface and into said flow channel a flow of gas inert to the treatment surface; and irradiating said treatment surface with high-energy irradiation, said irradiation having an energy density and duration sufficient to release surface contaminants from the treatment surface and insufficient to alter the crystal structure of the treatment surface.
Claim 8
Independent Claim
107 words
A method for removing surface contaminants from a treatment surface of a substrate while preserving the crystal structure of the surface being treated, comprising the steps of: placing the substrate in a recess formed in a flow channel such that the treatment surface is flush with the surface of said flow channel; introducing across said treatment surface and into said flow channel a flow of gas inert to the treatment surface; and irradiating said treatment surface with high-energy irradiation, said irradiation having an energy density and duration sufficient to release surface contaminants from the treatment surface and insufficient to alter the crystal structure of the treatment surface.
Claim 9
Dependent Claim
16 words
A method according to claim 5, wherein the substrate is restrained in said recess by vacuum.
Claim 10
Dependent Claim
34 words
A method according to claim 5, wherein said gas flow of a planar inlet region of said flow channel has a velocity profile that is substantially uniform across the plane of said inlet region.
Claim 11
Independent Claim
107 words
A method for removing surface contaminants from a treatment surface of a substrate while preserving the crystal structure of the surface being treated, comprising the steps of: introducing across said treatment surface a main flow of gas inert to the treatment surface; introducing into said flow channel a secondary flow of gas inert to said treatment surface, said secondary gas flow being introduced at an angle to said main gas flow; and irradiating said treatment surface with high-energy irradiation, said irradiation having an energy density and duration sufficient to release surface contaminants from the treatment surface and insufficient to alter the crystal structure of the treatment surface.
Claim 12
Independent Claim
107 words
A method for removing surface contaminants from a treatment surface of a substrate while preserving the crystal structure of the surface being treated, comprising the steps of: introducing across said treatment surface a main flow of gas inert to the treatment surface; introducing into said flow channel a secondary flow of gas inert to said treatment surface, said secondary gas flow being introduced at an angle to said main gas flow; and irradiating said treatment surface with high-energy irradiation, said irradiation having an energy density and duration sufficient to release surface contaminants from the treatment surface and insufficient to alter the crystal structure of the treatment surface.
Claim 13
Dependent Claim
42 words
The method of claim 8 wherein the treatment surface is substantially planar but includes cavities therein, said secondary gas flow interacting with said main gas flow to induce a resultant flow into the treatment surface cavities to carry away dislodged contaminants therein.
References Cited (Backward Citations)
US3364087A
Cited
US3464534A
Cited
US3503804A
Cited
US3603284A
Cited
US3699298A
Cited
US3805736A
Cited
US3845738A
Cited
US4160166A
Cited
JPS5515620A
Cited
US4181538A
Cited
JPS567439A
Cited
US4305973A
Cited
JPS5623748A
Cited
US4292093A
Cited
US4393311A
Cited
JPS5776846A
Cited
JPS57102229A
Cited
JPS57187936A
Cited
WO1983001400A1
Cited
US4756765A
Cited
US4558660A
Cited
EP0091646A1
Cited
US4568632A
Cited
US4588610A
Cited
JPS59215728A
Cited
JPS6037736A
Cited
JPS60129136A
Cited
JPS60130126A
Cited
JPS61119028A
Cited
JPS61147988A
Cited
US4668304A
Cited
US4731516A
Cited
EP0233755A2
Cited
US4752668A
Cited
US4680616A
Cited
US4782029A
Cited
US4687539A
Cited
EP0268301A2
Cited
JPS63178845A
Cited
US5221556A
Cited
EP0297506A2
Cited
DE3904969A1
Cited
US4993360A
Cited
US5024968A
Cited
US5099557A
Cited
US5531857A
Cited
EP0350021A2
Cited
US5151134A
Cited
EP0380387A1
Cited
US4920994A
Cited
US5151135A
Cited
US4987286A
Cited
US4979180A
Cited
US5127574A
Cited
US5238499A
Cited
JPH04157088A
Cited
US5314538A
Cited
JPH0513346A
Cited
JPH05179447A
Cited
US5228206A
Cited
US5370738A
Cited
US5373140A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-10-12 | 2002-04-13 | 2002-10-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-10-12 | 2006-04-13 | 2006-10-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-10-12 | 2010-04-13 | 2010-10-13 | $7700.00 | Window Closed / Lapsed |