Patent US5876119A successfully refreshed from Google Patents.
US5876119A
Expired / Lapsed
US
⏱️ 0.0 years remaining
In-situ substrate temperature measurement scheme in plasma reactor
Assignee: Applied Materials Inc
•
Filing: 1995-12-19
•
Granted: 1999-03-02
•
Expires: 2015-12-19
Abstract
Abstract A method and apparatus for noncontact temperature measurement of a substrate insitu by measuring the temperature of a substrate support member and an intermediate member located between the substrate and the substrate support member. The intermediate member has a given heat transfer surface area adjacent both the substrate and the substrate support member and high thermal conductivity so that the intermediate member rapidly approaches a steady state surface temperature after the substrate is positioned in the substrate support member. In this arrangement, the temperature of the substrate can be determined either by calibration or application of a heat transfer equation. Various temperature measuring instruments may be used, including a light probe located in the substrate support member normal to the surface of the intermediate member to measure the radiation from a temperature sensitive material deposited on the bottom surface of the intermediate member.
Inventors
- 👤 Tetsuya Ishikawa
- 👤 Brian Lue
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 11:46
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/02; G01J5/04; G01J5/041
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
73 words
A method of determining the temperature of a substrate, the method comprising the steps of: a) disposing an intermediate member between the substrate and a support member; b) flowing a gas adjacent the intermediate member; c) measuring the temperature of the intermediate member; d) measuring the temperature of the support member; and e) determining the temperature of the substrate from the temperature of the intermediate member. therein for receipt of the intermediate member.
Claim 2
Independent Claim
73 words
A method of determining the temperature of a substrate, the method comprising the steps of: a) disposing an intermediate member between the substrate and a support member; b) flowing a gas adjacent the intermediate member; c) measuring the temperature of the intermediate member; d) measuring the temperature of the support member; and e) determining the temperature of the substrate from the temperature of the intermediate member. therein for receipt of the intermediate member.
Claim 3
Dependent Claim
32 words
The method of claim 1, further comprising the step of calibrating the thermal relationship of the substrate temperature as a function of a range of intermediate member temperatures and support member temperatures.
Claim 4
Dependent Claim
30 words
The method of claim 1, wherein the intermediate member is located in a recess provided in the support member, the recess being in fluid communication with a temperature controlling gas.
Claim 5
Dependent Claim
19 words
The method of claim 1, wherein the intermediate member is insulated from the support member by a dielectric material.
Claim 6
Dependent Claim
22 words
The method of claim 1, wherein the intermediate member is in free molecular thermal conduction with the substrate and substrate support member.
Claim 7
Independent Claim
146 words
A method of determining the temperature of a substrate, the method comprising the steps of: a) disposing an intermediate member having a high thermal conductivity between the substrate and a support member, wherein the intermediate member has a temperature sensitive material located thereon, the temperature sensitive material characterized by emitting, when excited, detectable optical radiation that varies as a known function of the temperature; b) flowing a gas adjacent the intermediate member; c) measuring the temperature of the intermediate member by exposing the temperature sensitive material to a source of fluorescence to cause an emission and providing an optical fiber between a position adjacent the temperature sensitive material and a detecting station to measure the emission; d) measuring the temperature of the support member; and e) determining the temperature of the substrate from a relationship between the temperature of the intermediate member and the support member.
Claim 8
Independent Claim
146 words
A method of determining the temperature of a substrate, the method comprising the steps of: a) disposing an intermediate member having a high thermal conductivity between the substrate and a support member, wherein the intermediate member has a temperature sensitive material located thereon, the temperature sensitive material characterized by emitting, when excited, detectable optical radiation that varies as a known function of the temperature; b) flowing a gas adjacent the intermediate member; c) measuring the temperature of the intermediate member by exposing the temperature sensitive material to a source of fluorescence to cause an emission and providing an optical fiber between a position adjacent the temperature sensitive material and a detecting station to measure the emission; d) measuring the temperature of the support member; and e) determining the temperature of the substrate from a relationship between the temperature of the intermediate member and the support member.
Claim 9
Dependent Claim
13 words
The method of claim 6, wherein the temperature sensitive material is a phosphor.
Claim 10
Dependent Claim
32 words
The method of claim 7, wherein the intermediate member has a reflective film layer formed on the lower surface of the intermediate member and the phosphor is located on the reflective layer.
Claim 11
Dependent Claim
19 words
The method of claim 8, wherein the reflective layer is selected from the group consisting of gold and aluminum.
Claim 12
Dependent Claim
75 words
A non-contact method of determining the temperature of a substrate, the method comprising the steps of: a) disposing an intermediate member between the substrate and a substrate support member; b) flowing a gas adjacent the intermediate member; c) measuring the temperature of the intermediate member; d) measuring the temperature of the support member; and e) determining the temperature of the substrate from a relationship between the temperature of the intermediate member and the support member.
Claim 13
Dependent Claim
75 words
A non-contact method of determining the temperature of a substrate, the method comprising the steps of: a) disposing an intermediate member between the substrate and a substrate support member; b) flowing a gas adjacent the intermediate member; c) measuring the temperature of the intermediate member; d) measuring the temperature of the support member; and e) determining the temperature of the substrate from a relationship between the temperature of the intermediate member and the support member.
Claim 14
Dependent Claim
103 words
The method of claim 7, wherein the substrate temperature is determined according to the following equation: ##EQU6## where: α n : accommodation factor for surface n; Λ: free molecular thermal conductivity of the gas; P: gas pressure; T n : temperature of surface n; A 1 : heat transfer area between substrate and intermediate member; A 2 : heat transfer area between intermediate member and support member; surface n=1: surface of object adjacent the intermediate member; surface n=2: surface of intermediate member adjacent object; surface n=2': surface of intermediate member adjacent support member; and surface n=3: surface of support member adjacent intermediate member.
Claim 15
Independent Claim
84 words
An apparatus for determining the temperature of a semiconductor substrate without contacting the substrate, comprising: a) a chamber; b) a substrate support member located in the chamber, the support member having a substrate receiving surface and a first temperature measuring device; c) an intermediate member located adjacent the substrate receiving surface of the support member having a temperature sensitive material disposed thereon; and d) a second temperature measuring device disposed in cooperation with the intermediate member for measuring the temperature of the intermediate member.
Claim 16
Independent Claim
84 words
An apparatus for determining the temperature of a semiconductor substrate without contacting the substrate, comprising: a) a chamber; b) a substrate support member located in the chamber, the support member having a substrate receiving surface and a first temperature measuring device; c) an intermediate member located adjacent the substrate receiving surface of the support member having a temperature sensitive material disposed thereon; and d) a second temperature measuring device disposed in cooperation with the intermediate member for measuring the temperature of the intermediate member.
Claim 17
Dependent Claim
18 words
The apparatus of claim 12, further comprising a dielectric member insulating the intermediate member from the support member.
Claim 18
Independent Claim
96 words
An apparatus for determining the temperature of a semiconductor substrate without contacting the substrate, comprising: a) a chamber; b) a substrate support member located in the chamber, the support member having a substrate receiving surface and a first temperature measuring device; c) an intermediate member located adjacent the substrate receiving surface of the support member and having a temperature sensitive element disposed thereon; and d) a second temperature measuring device disposed in cooperation with the intermediate member for measuring the temperature of the intermediate member, wherein the second temperature measuring device is a light detecting member.
Claim 19
Independent Claim
96 words
An apparatus for determining the temperature of a semiconductor substrate without contacting the substrate, comprising: a) a chamber; b) a substrate support member located in the chamber, the support member having a substrate receiving surface and a first temperature measuring device; c) an intermediate member located adjacent the substrate receiving surface of the support member and having a temperature sensitive element disposed thereon; and d) a second temperature measuring device disposed in cooperation with the intermediate member for measuring the temperature of the intermediate member, wherein the second temperature measuring device is a light detecting member.
Claim 20
Dependent Claim
19 words
The apparatus of claim 14, wherein the support member defines a recess therein for receipt of the intermediate member.
Claim 21
Dependent Claim
28 words
The apparatus of claim 15, wherein the recess is in fluid communication with a temperature controlling gas flowing in a passage between the substrate and the support member.
Claim 22
Dependent Claim
27 words
The apparatus of claim 14, wherein the light detecting member includes a processor to determine the temperature of the substrate from the temperature of the intermediate member.
Claim 23
Dependent Claim
17 words
The apparatus of claim 14, wherein the intermediate member is a disk comprised of a dielectric material.
Claim 24
Dependent Claim
19 words
The apparatus of claim 18, wherein the dielectric material is selected from the group consisting of ceramics and semiconductors.
Claim 25
Dependent Claim
28 words
The apparatus of claim 18, wherein the dielectric material is a ceramic selected from the group consisting of sapphire, diamond, magnesium oxide, glass, quartz, zirconia, silicon and germanium.
Claim 26
Dependent Claim
21 words
The apparatus of claim 18, wherein the dielectric material is a semiconductor selected from the group consisting of silicon and germanium.
Claim 27
Independent Claim
116 words
An apparatus for determining the temperature of a semiconductor substrate without contacting the substrate, comprising: a) a chamber; b) a substrate support member located in the chamber, the support member having a substrate receiving surface and a first temperature measuring device; c) an intermediate member located adjacent the substrate receiving surface of the support member; and d) a second temperature measuring device disposed in cooperation with the intermediate member for measuring the temperature of the intermediate member, wherein the second temperature measuring assembly comprises a reflective layer disposed on the intermediate member, and a temperature sensitive material disposed on the reflective layer, and a light detecting member for detecting light emitted from the temperature sensitive material.
Claim 28
Independent Claim
116 words
An apparatus for determining the temperature of a semiconductor substrate without contacting the substrate, comprising: a) a chamber; b) a substrate support member located in the chamber, the support member having a substrate receiving surface and a first temperature measuring device; c) an intermediate member located adjacent the substrate receiving surface of the support member; and d) a second temperature measuring device disposed in cooperation with the intermediate member for measuring the temperature of the intermediate member, wherein the second temperature measuring assembly comprises a reflective layer disposed on the intermediate member, and a temperature sensitive material disposed on the reflective layer, and a light detecting member for detecting light emitted from the temperature sensitive material.
Claim 29
Independent Claim
102 words
A method for detecting the temperature of an object through a non-contact arrangement, the method comprising the steps of: a) providing an intermediate member having high thermal conductivity in a space defined between the object to be measured and a support member supporting the object to be measured; b) detecting the temperature of the intermediate member by detecting the emission of radiation from a temperature sensitive material disposed on the intermediate member; c) detecting the temperature of the support member; and d) determining the temperature of the object from the temperature of the intermediate member and the temperature of the support member.
Claim 30
Independent Claim
102 words
A method for detecting the temperature of an object through a non-contact arrangement, the method comprising the steps of: a) providing an intermediate member having high thermal conductivity in a space defined between the object to be measured and a support member supporting the object to be measured; b) detecting the temperature of the intermediate member by detecting the emission of radiation from a temperature sensitive material disposed on the intermediate member; c) detecting the temperature of the support member; and d) determining the temperature of the object from the temperature of the intermediate member and the temperature of the support member.
Claim 31
Independent Claim
123 words
A method for detecting the temperature of an object, the method comprising the steps of: a) providing an intermediate member having high thermal conductivity in a space defined between the object to be measured and a support member supporting the object to be measured, wherein the intermediate member is provided with a temperature sensitive element located on one side thereof, the temperature sensitive element having temperature sensitive luminescent properties and cooperating with a light detecting member to detect light emitted from the temperature sensitive element; b) detecting the temperature of the intermediate member; c) detecting the temperature of the support member; and d) determining the temperature of the object from the temperature of the intermediate member and the temperature of the support member.
Claim 32
Independent Claim
123 words
A method for detecting the temperature of an object, the method comprising the steps of: a) providing an intermediate member having high thermal conductivity in a space defined between the object to be measured and a support member supporting the object to be measured, wherein the intermediate member is provided with a temperature sensitive element located on one side thereof, the temperature sensitive element having temperature sensitive luminescent properties and cooperating with a light detecting member to detect light emitted from the temperature sensitive element; b) detecting the temperature of the intermediate member; c) detecting the temperature of the support member; and d) determining the temperature of the object from the temperature of the intermediate member and the temperature of the support member.
Claim 33
Independent Claim
160 words
A method for detecting the temperature of an object, the method comprising the steps of: a) providing an intermediate member having high thermal conductivity in a space defined between the object to be measured and a support member supporting the object to be measured; b) detecting the temperature of the intermediate member; c) detecting the temperature of the support member; and d) determining the temperature of the object through application of the equation: ##EQU7## where: α n : accommodation factor for surface n; Λ: free molecular thermal conductivity of the gas; P: gas pressure; T n : temperature of surface n; A 1 : heat transfer area between substrate and intermediate member; A 2 : heat transfer area between intermediate member and support member; surface n=1: surface of object adjacent the intermediate member; surface n=2: surface of intermediate member adjacent object; surface n=2': surface of intermediate member adjacent support member; and surface n=3: surface of support member adjacent intermediate member.
Claim 34
Independent Claim
160 words
A method for detecting the temperature of an object, the method comprising the steps of: a) providing an intermediate member having high thermal conductivity in a space defined between the object to be measured and a support member supporting the object to be measured; b) detecting the temperature of the intermediate member; c) detecting the temperature of the support member; and d) determining the temperature of the object through application of the equation: ##EQU7## where: α n : accommodation factor for surface n; Λ: free molecular thermal conductivity of the gas; P: gas pressure; T n : temperature of surface n; A 1 : heat transfer area between substrate and intermediate member; A 2 : heat transfer area between intermediate member and support member; surface n=1: surface of object adjacent the intermediate member; surface n=2: surface of intermediate member adjacent object; surface n=2': surface of intermediate member adjacent support member; and surface n=3: surface of support member adjacent intermediate member.
Claim 35
Independent Claim
81 words
A method for measuring the temperature of a substrate on a substrate support member, comprising the steps of: a) providing an intermediate member between a substrate and the substrate support member in a processing chamber, the intermediate member having a reflective surface with a temperature sensitive material formed thereon; b) measuring the fluorescent decay of the material on the intermediate member to determine the temperature thereof; and c) determining the temperature of the substrate from the temperature of the intermediate member.
Claim 36
Independent Claim
81 words
A method for measuring the temperature of a substrate on a substrate support member, comprising the steps of: a) providing an intermediate member between a substrate and the substrate support member in a processing chamber, the intermediate member having a reflective surface with a temperature sensitive material formed thereon; b) measuring the fluorescent decay of the material on the intermediate member to determine the temperature thereof; and c) determining the temperature of the substrate from the temperature of the intermediate member.
Claim 37
Dependent Claim
27 words
The method of claim 26, wherein the reflective film layer is formed on a lower surface of the intermediate member and the temperature sensitive material is phosphor.
Claim 38
Dependent Claim
19 words
The method of claim 27, wherein the reflective layer is selected from the group consisting of gold and aluminum.
Claim 39
Dependent Claim
42 words
The method of claim 26, wherein the step of measuring the fluorescent decay comprises providing a light pipe in the support member, the light pipe having a light receiving end that is substantially normal to the reflective surface of the floating member.
Claim 40
Dependent Claim
22 words
The method of claim 26, wherein the intermediate member comprises a disk made of a material which is transparent to infrared light.
Claim 41
Dependent Claim
33 words
The method of claim 30, wherein the disk has a sufficiently high thermal conductivity so that the temperature difference across the disk is less than the standard error in measuring the fluorescent decay.
Claim 42
Dependent Claim
31 words
The method of claim 31, wherein the disk is comprised of a material selected from the group consisting of sapphire, diamond, magnesium oxide, glass, quartz, silicon, germanium, zirconia and alumina oxide.
Claim 43
Dependent Claim
23 words
The method of claim 32, wherein the disk has a phosphor dot located thereon and a protective, non-corrosive layer formed over the dot.
Claim 44
Independent Claim
73 words
An apparatus for determining the temperature of an object without contacting the object, comprising: a) an object support member having an object receiving surface and a first temperature measuring device; b) an intermediate member located adjacent the object receiving surface of the support member having a temperature sensitive material disposed thereon; and c) a second temperature measuring device disposed in cooperation with the intermediate member for measuring the temperature of the intermediate member.
Claim 45
Independent Claim
73 words
An apparatus for determining the temperature of an object without contacting the object, comprising: a) an object support member having an object receiving surface and a first temperature measuring device; b) an intermediate member located adjacent the object receiving surface of the support member having a temperature sensitive material disposed thereon; and c) a second temperature measuring device disposed in cooperation with the intermediate member for measuring the temperature of the intermediate member.
Claim 46
Independent Claim
90 words
An apparatus for determining the temperature of an object without contacting the object, comprising: a) an object support member having an object receiving surface and a first temperature measuring device; b) an intermediate member located adjacent the object receiving surface of the support member; and c) a second temperature measuring device in cooperation with the intermediate member for measuring the temperature of the intermediate member, wherein the second temperature measuring device is a light detecting member for detecting light emitted from a temperature sensitive element formed on the intermediate member.
Claim 47
Independent Claim
90 words
An apparatus for determining the temperature of an object without contacting the object, comprising: a) an object support member having an object receiving surface and a first temperature measuring device; b) an intermediate member located adjacent the object receiving surface of the support member; and c) a second temperature measuring device in cooperation with the intermediate member for measuring the temperature of the intermediate member, wherein the second temperature measuring device is a light detecting member for detecting light emitted from a temperature sensitive element formed on the intermediate member.
Claim 48
Dependent Claim
19 words
The apparatus of claim 35, wherein the support member defines a recess therein for receipt of the intermediate member.
References Cited (Backward Citations)
US3542123A
Cited
US3715923A
Cited
US4560286A
Cited
WO1989006349A1
Cited
US5249142A
Cited
US5294200A
Cited
US5098198A
Cited
US5106200A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-01 | 2002-08-31 | 2003-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-01 | 2006-08-31 | 2007-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-01 | 2010-08-31 | 2011-03-02 | $7700.00 | Window Closed / Lapsed |