US5960316A
Expired / Lapsed
US
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Method to fabricate unlanded vias with a low dielectric constant material as an intraline dielectric
Assignee: Intel Corp
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Filing: 1997-03-31
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Granted: 1999-09-28
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Expires: 2017-03-31
Abstract
Abstract A method of fabricating an unlanded via over a polymer that is used as an intraline or intralayer dielectric is described. In one embodiment, the present invention creates an etch-stop layer for forming unlanded vias using three steps. A recess is created in an intraline dielectric, such as an organic polymer. An etch-stop layer is then deposited over the intraline dielectric. The etch-stop layer is then polished back before depositing a final insulating layer. The unlanded via is formed by etching through the final insulating layer. The intraline dielectric is protected by the etch-stop layer during the etch of the final insulating layer to form the unlanded via.
Inventors
- 👤 Gang Bai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 00:35
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/069; H10W20/0693; H10W20/071; H10W20/074; H10W20/077; H10W20/40; H10W20/41; H10W20/42; H10W20/495
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
66 words
A method of forming an interconnect structure, comprising: forming a conductive structure having an insulator cap; forming a low dielectric constant material over said conductive structure; planarizing said low dielectric constant material; selectively removing said low dielectric constant material to create a recess; forming a stop layer over said recess of said low dielectric constant material and over said conductive structure; and planarizing said stop layer.
Claim 2
Independent Claim
66 words
A method of forming an interconnect structure, comprising: forming a conductive structure having an insulator cap; forming a low dielectric constant material over said conductive structure; planarizing said low dielectric constant material; selectively removing said low dielectric constant material to create a recess; forming a stop layer over said recess of said low dielectric constant material and over said conductive structure; and planarizing said stop layer.
Claim 3
Dependent Claim
37 words
The method of claim 1, wherein the step of planarizing said stop layer includes polishing said stop layer until a top surface of said stop layer is substantially planar with a top surface of said insulator cap.
Claim 4
Dependent Claim
49 words
The method of claim 2, further including: forming an insulator over said stop layer and said insulator cap; and removing part of said insulator, part of said stop layer and part of said insulator cap to form an unlanded via that is capable of electrically contacting said conductive structure.
Claim 5
Dependent Claim
17 words
The method of claim 3, wherein said insulator has a different dielectric constant than said stop layer.
Claim 6
Dependent Claim
18 words
The method of claim 4, wherein said insulator is an oxide and said stop layer is a nitride.
Claim 7
Dependent Claim
47 words
The method of claim 1, wherein the step of planarizing said stop layer includes polishing said stop layer until a top surface of said stop layer is substantially planar with a top surface of said conductive structure, wherein said insulator cap is removed during said planarizing step.
Claim 8
Dependent Claim
38 words
The method of claim 6, further including: forming an insulator over said stop layer and said conductive structure; and removing part of said insulator to form an unlanded via that is capable of electrically contacting said conductive structure.
Claim 9
Dependent Claim
17 words
The method of claim 7, wherein said insulator has a different dielectric constant than said stop layer.
Claim 10
Dependent Claim
18 words
The method of claim 8, wherein said insulator is an oxide and said stop layer is a nitride.
Claim 11
Dependent Claim
29 words
The method of claim 1, wherein said low dielectric constant material is a polymer, and said stop layer has a different dielectric constant than said low dielectric constant material.
Claim 12
Independent Claim
195 words
A method of forming an interconnect structure, comprising the steps of: forming a first conductive layer over a substrate; forming a first insulator over said conductive layer; patterning said first insulator and said first conductive layer to form a first insulator cap over a first conductive line; forming a low dielectric constant material over said first insulator cap and surrounding said first conductive line, wherein said low dielectric constant material has a dielectric constant of less than four (4); planarizing said low dielectric constant material until a top surface of said first insulator cap is exposed; selectively removing said low dielectric constant material to create a recess so that a top surface of said low dielectric constant material is below a top surface of said first conductive line; forming a second insulator over said low dielectric constant material, said first insulator cap and said first conductive line; planarizing said second insulator; forming a third insulator over said second insulator, wherein said third insulator has a different dielectric constant than said second insulator; and etching said third insulator to form an unlanded via, wherein said unlanded via contacts said first conductive line and said second insulator.
Claim 13
Independent Claim
195 words
A method of forming an interconnect structure, comprising the steps of: forming a first conductive layer over a substrate; forming a first insulator over said conductive layer; patterning said first insulator and said first conductive layer to form a first insulator cap over a first conductive line; forming a low dielectric constant material over said first insulator cap and surrounding said first conductive line, wherein said low dielectric constant material has a dielectric constant of less than four (4); planarizing said low dielectric constant material until a top surface of said first insulator cap is exposed; selectively removing said low dielectric constant material to create a recess so that a top surface of said low dielectric constant material is below a top surface of said first conductive line; forming a second insulator over said low dielectric constant material, said first insulator cap and said first conductive line; planarizing said second insulator; forming a third insulator over said second insulator, wherein said third insulator has a different dielectric constant than said second insulator; and etching said third insulator to form an unlanded via, wherein said unlanded via contacts said first conductive line and said second insulator.
Claim 14
Dependent Claim
57 words
The method of claim 11, wherein the step of planarizing said second insulator includes planarizing said second insulator until said first insulator cap is exposed so that a top surface of said second insulator is substantially planar with a top surface of said first insulator cap, and wherein said unlanded via also contacts said first insulator cap.
Claim 15
Dependent Claim
52 words
The method of claim 11, wherein step of planarizing said second insulator includes planarizing said second insulator until a top surface of said second insulator is substantially planar with a top surface of said first conductive line, and wherein said first insulator cap is removed during step of planarizing said second insulator.
Claim 16
Dependent Claim
15 words
The method of claim 11, wherein said low dielectric constant material is an organic polymer.
Claim 17
Dependent Claim
24 words
The method of claim 11, wherein said first insulator has a thickness in the range of approximately 100 Angstroms (Å) to about 500 Å.
Claim 18
Dependent Claim
19 words
The method of claim 11, wherein said third insulator is an oxide and said second insulator is a nitride.
Claim 19
Dependent Claim
19 words
The method of claim 11, wherein said recess has a depth of approximately 50 Å to about 100 Å.
Claim 20
Dependent Claim
19 words
The method of claim 11, wherein said second insulator is any dielectric that can serve as an etch-stop layer.
Claim 21
Dependent Claim
29 words
The method of claim 11, wherein said first conductive line comprises a material selected from the group consisting of aluminum, copper, tungsten, silver, gold, copper and their respective alloys.
Claim 22
Independent Claim
58 words
A method of forming an integrated circuit device, comprising: forming a conductive line having an insulating cap formed of a first insulator; forming a polymer over said conductive line; planarizing said polymer; etching said polymer to create a recess; forming an etch-stop layer of a second insulator over said recess of said polymer; and planarizing said etch-stop layer.
Claim 23
Independent Claim
58 words
A method of forming an integrated circuit device, comprising: forming a conductive line having an insulating cap formed of a first insulator; forming a polymer over said conductive line; planarizing said polymer; etching said polymer to create a recess; forming an etch-stop layer of a second insulator over said recess of said polymer; and planarizing said etch-stop layer.
Claim 24
Dependent Claim
41 words
The method of claim 20, further comprising: forming a third insulator over said etch-stop-layer; and forming an unlanded via in said third insulator for providing an electrical connection between said conductive line and a conductive layer formed in said unlanded via.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-09-27 | 2003-03-29 | 2003-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-27 | 2007-03-29 | 2007-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-27 | 2011-03-29 | 2011-09-28 | $7700.00 | Window Closed / Lapsed |