US6100985A
Expired / Lapsed
US
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Method and apparatus for measurements of patterned structures
Assignee: Nova Ltd
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Filing: 1999-03-12
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Granted: 2000-08-08
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Expires: 2019-03-12
Abstract
Abstract A method for measuring at least one desired parameter of a patterned structure having a plurality of features defined by a certain process of its manufacturing. The structure represents a grid having at least one cycle formed of at least two locally adjacent elements having different optical properties in respect of an incident radiation. An optical model, based on at least some of the features of the structure is provided. The model is capable of determining theoretical data representative of photometric intensities of light components of different wavelengths specularly reflected from the structure and of calculating said at least one desired parameter of the structure. A measurement area, which is substantially larger than a surface area of the structure defined by the grid cycle, is illuminated by an incident radiation of a preset substantially wide wavelength range. Light component substantially specularly reflected from the measurement area is detected and measured data representative of photometric intensities of each wavelength within the wavelength range is obtained. The measured and theoretical data are analyzed and the optical model is optimized until the theoretical data satisfies a predetermined condition. Upon detecting that the predetermined condition is satisfied, said at least one parameter of the structure is calculated.
Inventors
- 👤 David Scheiner
- 👤 Moshe Finarov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 16:54
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625; G01J; G01J3/00; G01J3/28; G01J3/42; H; H10; H10P; H10P74/00; H10P74/20; H10P74/203
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
211 words
A method for measuring at least one desired parameter of a patterned structure which represents a grid having at least one cycle formed of at least two locally adjacent elements having different optical properties in respect of an incident radiation, the structure having a plurality of features defined by a certain process of its manufacturing, the method comprising the steps of: a) providing an optical model, based on at least some of said features of the structure and capable of determining theoretical data representative of photometric intensities of light components of different wavelengths specularly reflected from the structure and of calculating said at least one desired parameter of the structure; b) illuminating a measurement area by an incident radiation of a preset substantially wide wavelength range, the measurement area being substantially larger than a surface area of the structure defined by the grid cycle; c) detecting light component substantially specularly reflected from the measurement area and obtaining measured data representative of photometric intensities of each wavelength within said wavelength range; d) analyzing the measured data and the theoretical data and optimizing said optical model until said theoretical data satisfies a predetermined condition; and e) upon detecting that the predetermined condition is satisfied, calculating said at least one parameter of the structure.
Claim 2
Independent Claim
211 words
A method for measuring at least one desired parameter of a patterned structure which represents a grid having at least one cycle formed of at least two locally adjacent elements having different optical properties in respect of an incident radiation, the structure having a plurality of features defined by a certain process of its manufacturing, the method comprising the steps of: a) providing an optical model, based on at least some of said features of the structure and capable of determining theoretical data representative of photometric intensities of light components of different wavelengths specularly reflected from the structure and of calculating said at least one desired parameter of the structure; b) illuminating a measurement area by an incident radiation of a preset substantially wide wavelength range, the measurement area being substantially larger than a surface area of the structure defined by the grid cycle; c) detecting light component substantially specularly reflected from the measurement area and obtaining measured data representative of photometric intensities of each wavelength within said wavelength range; d) analyzing the measured data and the theoretical data and optimizing said optical model until said theoretical data satisfies a predetermined condition; and e) upon detecting that the predetermined condition is satisfied, calculating said at least one parameter of the structure.
Claim 3
Dependent Claim
27 words
The method according to claim 1, wherein said at least some features of the structure on which the optical model is based are available prior to measurements.
Claim 4
Dependent Claim
32 words
The method according to claim 1, wherein said at least some features of the structure on which the optical model is based comprises nominal values of said desired parameters to be measured.
Claim 5
Dependent Claim
32 words
The method according to claim 1, wherein said at least some features of the structure on which the optical model is based comprises materials forming each of said at least two elements.
Claim 6
Dependent Claim
46 words
The method according to claim 1, wherein the step of providing the optical model comprises the step of: estimating known optical effects, that may be produced in the structure in response to the incident radiation, and contribution of said optical effects into the detected light component.
Claim 7
Dependent Claim
23 words
The method according to claim 1, wherein each of said at least two elements is a stack including layers having different optical properties.
Claim 8
Dependent Claim
115 words
The method according to claim 5, wherein each of said at least two elements is a stack including layers having different optical properties, and said estimating comprises: i. estimating a specular reflection within the grid cycle associated with the width of stacks relative to the wavelength of the incident radiation and with dissipation in the stacks having a geometry that reduces reflection due to cavity-like structures; ii. estimating interference in transparent layers within each stack and between light beams reflected from each stack within the grid cycle; iii. estimating polarization associated with the interaction of the incident radiation with patterned conductive layers of the grid-like structure; iv. estimating effects associated with coherence length of illumination.
Claim 9
Dependent Claim
34 words
The method according to claim 1, wherein said analyzing comprises the step of: comparing the theoretical data with the measured data and providing data indicative of the relationship between the measured, and theoretical data.
Claim 10
Dependent Claim
38 words
The method according to claim 1, wherein said optimizing comprises the steps of: adjusting certain variable factors of the optical model until the theoretical data satisfies the predetermined condition and obtaining correct values of the optical model factors.
Claim 11
Dependent Claim
26 words
The method according to claim 9, wherein said certain variable factors of the optical model define contributions of known optical effects into the detected light component.
Claim 12
Dependent Claim
29 words
The method according to claim 1, wherein said predetermined condition represents a merit function defining a certain value of a goodness of fit between the measured and theoretical data.
Claim 13
Dependent Claim
28 words
The method according to claim 1, wherein said optimizing comprises the step of: adjusting said at least one desired parameter until the theoretical data satisfies the predetermine condition.
Claim 14
Dependent Claim
19 words
The method according to claim 1, wherein the measurement area is a part of the structure to be measured.
Claim 15
Dependent Claim
37 words
The method according to claim 1, wherein the measurement area is located on a test site representing a test pattern similar to that of the structure, the test pattern having the same design rules and layer stacks.
Claim 16
Dependent Claim
77 words
The method according to claim 1, wherein said theoretical data is determined according to the following equation: ##EQU17## wherein r 1 and r 2 are the amplitudes of reflection signal from the two elements, respectively; A 1p , A 1s and A 2p , A 2s are filling factors corrected in accordance with effects of size-coupling dissipation in a cavity-like structure and s- and p-polarizations associated with the two elements, respectively; γ is a degree of coherence.
Claim 17
Dependent Claim
77 words
The method according to claim 1, wherein said theoretical data is determined according to the following equation: ##EQU18## wherein r i is the amplitude of reflection signal from I-th element in said at least one cycle; A ip and A is are filling factors corrected in accordance with effects of dissipation in a cavity-like structure and s- and p-polarizations associated with the i-th element in said at least one cycle, respectively; γ is a degree of coherence.
Claim 18
Dependent Claim
43 words
The method according to claim 1, wherein said structure comprises at least one additional cycle formed of at least two different locally adjacent elements aligned along an axis perpendicular to an axis of alignment of the elements of said at least one cycle.
Claim 19
Dependent Claim
42 words
The method according to claim 17, wherein said theoretical data is determined according to the following equation: ##EQU19## wherein R Gi and G i are the reflection intensity from and width of the i-th element; k is the total number of elements.
Claim 20
Dependent Claim
35 words
The method according to claim 1, wherein said at least one desired parameter to be measured is a width of at least one of said at least two locally adjacent elements in the grid cycle.
Claim 21
Dependent Claim
35 words
The method according to claim 6, wherein said at least one desired parameter to be measured is a width of at least one of said at least two locally adjacent elements in the grid cycle.
Claim 22
Dependent Claim
30 words
The method according to claim 6, wherein said at least one desired parameter to be measured is a depth of at least one layer of said at least one stack.
Claim 23
Dependent Claim
33 words
The method according to claim 6, wherein said at least one desired parameter to be measured is a depth of a metal-loss portion, resulting from a chemical mechanical polishing applied to said structure.
Claim 24
Independent Claim
220 words
An apparatus for measuring at least one desired parameter of a patterned structure that represents a grid having at least one grid cycle formed of at least two locally adjacent elements having different optical properties in respect of an incident radiation, the structure having a plurality of features defined by a certain process of its manufacturing the apparatus comprising: a spectrophotometer illuminating a measurement area by an incident radiation of a preset substantially wide wavelength range and detecting a specular reflection light component of light reflected from the measurement area for providing measured data representative of photometric intensities of detected light within said wavelength range, wherein the measurement area is substantially larger than a surface area of the structure defined by the grid cycle; and a processor unit coupled to the spectrophotometer, the processor unit comprising a pattern recognition software and a translation means so as to be responsive to said measured data and locate measurements, the processor being adapted for applying an optical model based on at least some of said features of the structure for providing theoretical data representative of photometric intensities of light specularly reflected from the structure within said wavelength range and calculating said at least one desired parameter, and comparing said measured and theoretical data and detecting whether the theoretical data satisfies a predetermined condition.
Claim 25
Independent Claim
220 words
An apparatus for measuring at least one desired parameter of a patterned structure that represents a grid having at least one grid cycle formed of at least two locally adjacent elements having different optical properties in respect of an incident radiation, the structure having a plurality of features defined by a certain process of its manufacturing the apparatus comprising: a spectrophotometer illuminating a measurement area by an incident radiation of a preset substantially wide wavelength range and detecting a specular reflection light component of light reflected from the measurement area for providing measured data representative of photometric intensities of detected light within said wavelength range, wherein the measurement area is substantially larger than a surface area of the structure defined by the grid cycle; and a processor unit coupled to the spectrophotometer, the processor unit comprising a pattern recognition software and a translation means so as to be responsive to said measured data and locate measurements, the processor being adapted for applying an optical model based on at least some of said features of the structure for providing theoretical data representative of photometric intensities of light specularly reflected from the structure within said wavelength range and calculating said at least one desired parameter, and comparing said measured and theoretical data and detecting whether the theoretical data satisfies a predetermined condition.
Claim 26
Dependent Claim
46 words
The apparatus according to claim 23, wherein said spectrophotometer comprises a spectrophotometric detector and a variable aperture stop located in the optical path of light reaching the detector, the diameter of the aperture stop being variable in accordance with the grid cycle of the measured structure.
Claim 27
Dependent Claim
19 words
The apparatus according to claim 23, wherein said measurement area is located within the patterned area of said structure.
Claim 28
Dependent Claim
24 words
The apparatus according to claim 23, wherein said measurement are is located within a test site located outside the patterned area of said structure.
Claim 29
Dependent Claim
80 words
The apparatus according to claim 23, wherein said theoretical data is determined according to the following equation: ##EQU20## wherein r 1 and r 2 are the amplitudes of reflection signal from the two elements, respectively; A 1p , A 1s and A 2p , A 2s , are filling factors corrected in accordance with effects of size coupling and dissipation in a cavity-like structure and s- and p-polarizations associated with the two elements, respectively; γ is a degree of coherence.
Claim 30
Dependent Claim
80 words
The apparatus according to claim 23, wherein said theoretical data is determined according to the following equation: ##EQU21## wherein r 1 is the amplitude of reflection signal from I-th element in said at least one cycle; A ip and A is are filling factors corrected in accordance with effects of size coupling and dissipation in a cavity-like structure and s- and p-polarizations associated with the i-th element in said at least one cycle, respectively; γ is a degree of coherence.
Claim 31
Dependent Claim
42 words
The apparatus according to claim 29, wherein said theoretical data is determined according to the following equation: ##EQU22## wherein R Gi and G i are the reflection intensity from and width of the i-th element; k is the total number of elements.
Claim 32
Dependent Claim
43 words
The apparatus according to claim 23, wherein said structure comprises at least one additional cycle formed of at least two different locally adjacent elements aligned along an axis perpendicular to an axis of alignment of the elements of said at least one cycle.
Claim 33
Dependent Claim
23 words
The apparatus according to claim 23, wherein each of said at least two elements is a stack including layers having different optical properties.
Claim 34
Dependent Claim
35 words
The apparatus according to claim 23, wherein said at least one desired parameter to be measured is a width of at least one of said at least two locally adjacent elements in the grid cycle.
Claim 35
Dependent Claim
35 words
The apparatus according to claim 31, wherein said at least one desired parameter to be measured is a width of at least one of said at least two locally adjacent elements in the grid cycle.
Claim 36
Dependent Claim
30 words
The apparatus according to claim 31, wherein said at least one desired parameter to be measured is a depth of at least one layer of said at least one stack.
Claim 37
Dependent Claim
33 words
The apparatus according to claim 31, wherein said at least one desired parameter to be measured is a depth of a metal-loss portion resulting from a chemical mechanical polishing applied to said structure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-08-08 | 2004-02-07 | 2004-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-08 | 2008-02-07 | 2008-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-08 | 2012-02-07 | 2012-08-08 | $7700.00 | Window Closed / Lapsed |