Patent US6849558B2 successfully refreshed from Google Patents.
US6849558B2
Expired / Lapsed
US
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Replication and transfer of microstructures and nanostructures
Assignee: Leland Stanford Junior University
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Filing: 2002-09-17
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Granted: 2005-02-01
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Expires: 2022-09-17
Abstract
Abstract A method for the duplication of microscopic patterns from a master to a substrate is disclosed, in which a replica of a topographic structure on a master is formed and transferred when needed onto a receiving substrate using one of a variety of printing or imprint techniques, and then dissolved. Additional processing steps can also be carried out using the replica before transfer, including the formation of nanostructures, microdevices, or portions thereof. These structures are then also transferred onto the substrate when the replica is transferred, and remain on the substrate when the replica is dissolved. This is a technique that can be applied as a complementary process or a replacement for various lithographic processing steps in the fabrication of integrated circuits and other microdevices.
Inventors
- 👤 Charles Daniel Schaper
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 07:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B81; B81C; B81C1/00; B81C1/00436; B81C1/00444; B81C1/0046; B29; B29C; B29C33/00; B29C33/44; B29C33/52; B82; B82B; B82B3/00; B82B3/0004; B82Y; B82Y10/00; B82Y40/00; G03F7/004; G03F7/09; G03F7/091; Y; Y10; Y10S; Y10S438/00; Y10S438/942
Claims Analysis
Total Claims: 50
Claim 1
Independent Claim
36 words
A method for pattern formation comprising: creating a replica of a master pattern; transferring the replica onto a substrate comprising material to be patterned; and destroying the replica while it is in contact with the substrate.
Claim 2
Independent Claim
36 words
A method for pattern formation comprising: creating a replica of a master pattern; transferring the replica onto a substrate comprising material to be patterned; and destroying the replica while it is in contact with the substrate.
Claim 3
Dependent Claim
28 words
The method of claim 1 , in which the replica can be dissolved in a solvent, and the step of destroying comprises dissolving the replica in said solvent.
Claim 4
Dependent Claim
23 words
The method of claim 2 , in which the replica is fabricated from polyvinyl alcohol (PVA), and the solvent is an aqueous solution.
Claim 5
Dependent Claim
16 words
The method of claim 1 , in which the step of destroying comprises etching the replica.
Claim 6
Dependent Claim
27 words
The method of claim 1 , in which the step of creating the replica comprises spin coating of the replica material from a solution onto the master.
Claim 7
Dependent Claim
22 words
The method of claim 1 , in which the step of creating the replica comprises casting a liquid polymer on the master.
Claim 8
Dependent Claim
22 words
The method of claim 5 or 6 , in which the step of creating the replica also comprises drying the liquid polymer.
Claim 9
Dependent Claim
23 words
The method of claim 5 or 6 , in which the step of creating the replica also comprises UV curing of the polymer.
Claim 10
Dependent Claim
21 words
The method of claim 5 or 6 , in which the step of creating the replica also comprises heating the polymer.
Claim 11
Dependent Claim
24 words
The method of claim 1 , comprising an additional step of removing the replica from the master, and attaching the replica to a carrier.
Claim 12
Dependent Claim
21 words
The method of claim 10 , in which the carrier is coated with a material to promote adhesion to the replica.
Claim 13
Dependent Claim
21 words
The method of claim 10 , in which the replica is coated with a material to promote adhesion to the carrier.
Claim 14
Dependent Claim
18 words
The method of claim 11 or 12 , in which the adhesion promotion material comprises polyvinyl alcohol (PVA).
Claim 15
Dependent Claim
21 words
The method of claim 11 or 12 , in which the adhesion promotion material comprises the same material as the replica.
Claim 16
Dependent Claim
17 words
The method of claim 10 , further comprising the additional step of storing the replica and carrier.
Claim 17
Dependent Claim
15 words
The method of claim 15 , in which the storage environment is controlled for temperature.
Claim 18
Dependent Claim
15 words
The method of claim 15 , in which the storage environment is controlled for humidity.
Claim 19
Dependent Claim
15 words
The method of claim 15 , in which the storage environment is controlled for pressure.
Claim 20
Dependent Claim
19 words
The method of claim 15 , in which the atmosphere of the storage environment is controlled for chemical composition.
Claim 21
Dependent Claim
18 words
The method of claim 15 , in which the replica is inserted into a protective package during storage.
Claim 22
Dependent Claim
19 words
The method of claim 10 , in which the step of transferring comprises aligning the carrier to the substrate.
Claim 23
Dependent Claim
19 words
The method of claim 10 , in which the step of transferring comprises touching the replica against the substrate.
Claim 24
Dependent Claim
19 words
The method of claim 22 , in which the step of transferring comprises pressing the replica against the substrate.
Claim 25
Dependent Claim
21 words
The method of claim 22 , in which the substrate is coated with a material to promote adhesion of the replica.
Claim 26
Dependent Claim
16 words
The method of claim 24 , in which the adhesion promotion material comprises a cyanoacrylate ester.
Claim 27
Dependent Claim
16 words
The method of claim 22 , in which the substrate is coated with a deformable material.
Claim 28
Dependent Claim
14 words
The method of claim 26 , in which the deformable material is a polymer.
Claim 29
Dependent Claim
14 words
The method of claim 26 , in which the deformable material is a photoresist.
Claim 30
Dependent Claim
17 words
The method of claim 26 , in which the deformable polymer is the material to be patterned.
Claim 31
Independent Claim
98 words
A method for forming a pattern on a substrate, comprising: spin coating a polymer film onto a master comprising topographic patterns, such that the polymer film replicates the topographic structures of the master; transferring the polymer film to a carrier; aligning the carrier carrying the polymer film to a substrate which comprises a material to be patterned; transferring the polymer film to the substrate, in a manner such that the polymer film transfers the topographic pattern of the polymer film to the material to be patterned; and dissolving the polymer film while it is attached to the substrate.
Claim 32
Independent Claim
98 words
A method for forming a pattern on a substrate, comprising: spin coating a polymer film onto a master comprising topographic patterns, such that the polymer film replicates the topographic structures of the master; transferring the polymer film to a carrier; aligning the carrier carrying the polymer film to a substrate which comprises a material to be patterned; transferring the polymer film to the substrate, in a manner such that the polymer film transfers the topographic pattern of the polymer film to the material to be patterned; and dissolving the polymer film while it is attached to the substrate.
Claim 33
Dependent Claim
19 words
The method of claim 30 , in which the polymer used to form the polymer film is polyvinyl alcohol.
Claim 34
Dependent Claim
27 words
The method of claim 30 , comprising an additional step of storing the carrier with polymer film for some time before transferring the replica to the substrate.
Claim 35
Dependent Claim
25 words
The method of claim 10 , comprising additional steps of forming a barrier layer on the replica after the replica is removed from the master.
Claim 36
Dependent Claim
16 words
The method of claim 33 , in which the material for the barrier layer comprises gold.
Claim 37
Dependent Claim
26 words
The method of claim 34 , in which the step of forming the barrier layer comprises deposition of gold on the replica using a sputtering process.
Claim 38
Dependent Claim
23 words
The method of claim 33 or 35 , comprising an additional step of forming an additional barrier layer of polymer on the replica.
Claim 39
Dependent Claim
15 words
The method of claim 36 , in which the polymer barrier layer is subsequently etched.
Claim 40
Independent Claim
142 words
A method for forming a patterned layer of material on a substrate, comprising preparation of a master with topographic structures in a layout that corresponds to a desired pattern; coating the master with a polymer film; curing the polymer film in a manner that forms topographic structures in the film that replicate at least a portion of the topographic patterns of the master; transferring the polymer film from the master to a carrier; processing the polymer film with a sequence of steps that leave solid materials on certain portions of the topographic structures of the polymer film that correspond to the desired pattern; aligning the polymer film with solid materials to a substrate; bringing the polymer film with solid materials and the substrate into close proximity; and transferring the solid materials from said certain portions on the polymer film to the substrate.
Claim 41
Independent Claim
142 words
A method for forming a patterned layer of material on a substrate, comprising preparation of a master with topographic structures in a layout that corresponds to a desired pattern; coating the master with a polymer film; curing the polymer film in a manner that forms topographic structures in the film that replicate at least a portion of the topographic patterns of the master; transferring the polymer film from the master to a carrier; processing the polymer film with a sequence of steps that leave solid materials on certain portions of the topographic structures of the polymer film that correspond to the desired pattern; aligning the polymer film with solid materials to a substrate; bringing the polymer film with solid materials and the substrate into close proximity; and transferring the solid materials from said certain portions on the polymer film to the substrate.
Claim 42
Dependent Claim
20 words
The method of claim 38 , in which the sequence of steps that leave solid materials comprises sputtering a material.
Claim 43
Dependent Claim
38 words
The method of claim 39 , in which the composition of the material to be sputtered is selected from the group containing gold, platinum, palladium, copper, aluminum, chromium, nickel, silicon, germanium, tungsten, silver, yttrium, barium, cobalt, and carbon.
Claim 44
Dependent Claim
18 words
The method of claim 38 , in which the sequence of steps that leave solid materials comprises electroplating.
Claim 45
Dependent Claim
49 words
The method of claim 41 , in which the sequence of steps that leave solid materials comprises sputtering a layer of material, followed by a step of electroplating using additional material of similar composition as said layer of material, such that the dimensions of the layer of material increase.
Claim 46
Dependent Claim
22 words
The method of claim 38 , in which the sequence of steps that leave solid materials comprises spin coating a second polymer.
Claim 47
Dependent Claim
14 words
The method of claim 43 , in which the second polymer is a photoresist.
Claim 48
Dependent Claim
22 words
The method of claim 44 , in which the sequence of steps that leave solid materials additionally comprises exposure to ultraviolet light.
Claim 49
Dependent Claim
21 words
The method of claim 45 , in which the sequence of steps that leave solid materials additionally comprises developing the photoresist.
Claim 50
Dependent Claim
20 words
The method of claim 38 , in which the sequence of steps that leave solid materials comprises an etch process.
References Cited (Backward Citations)
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| 7.5 Years (Year 8) | 2012-02-01 | 2012-08-02 | 2013-02-01 | $3760.00 | Window Closed / Lapsed |
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