US6954275B2
Expired / Lapsed
US
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Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography
Assignee: The University of Texas System
•
Filing: 2001-08-01
•
Granted: 2005-10-11
•
Expires: 2021-08-01
Abstract
Abstract Described are high precision gap and orientation measurement methods between a template and a substrate used in imprint lithography processes. Gap and orientation measurement methods presented here include uses of broad-band light based measuring techniques.
Inventors
- 👤 Byung J. Choi
- 👤 Matthew Colburn
- 👤 S. V. Sreenivasan
- 👤 C. Grant Willson
- 👤 Todd Bailey
- 👤 John Ekerdt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:22
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/14; B; B29; B29C; B29C43/00; B29C43/02; B29C43/021; B29C31/00; B29C31/04; B29C31/042; B29C31/044; B29C31/045; B29C31/047; B29C35/00; B29C35/02; B29C35/08; B29C35/0888; B29C37/00; B29C37/005; B29C43/003; B29D; B29D11/00; B29D11/00009; B29D11/00038; B29D11/00125; B29D11/0023; B82; B82Y; B82Y10/00; B82Y40/00; G03; G03F; G03F7/00; G03F7/0002; G03F9/00; B29C35/0805; B29C2035/0827; B29C2037/90; B29C2043/023; B29C2043/025; B29C59/00; B29C59/02; B29C59/022
Claims Analysis
Total Claims: 52
Claim 1
Independent Claim
99 words
A method of determining a spacing between a template and a substrate spaced-apart from the template, defining a region therebetween having an index of refraction associated therewith, the method comprising: impinging incident light upon the region by propagating the incident light along a path having a plurality of indices of refraction associated therewith, including the index of refraction, to form monitoring light; and determining from the monitoring light, a measured dimension of the region by ascertaining a wavenumber associated with the monitoring light that is a function of a wavelength of the monitoring light and the index of refraction.
Claim 2
Independent Claim
99 words
A method of determining a spacing between a template and a substrate spaced-apart from the template, defining a region therebetween having an index of refraction associated therewith, the method comprising: impinging incident light upon the region by propagating the incident light along a path having a plurality of indices of refraction associated therewith, including the index of refraction, to form monitoring light; and determining from the monitoring light, a measured dimension of the region by ascertaining a wavenumber associated with the monitoring light that is a function of a wavelength of the monitoring light and the index of refraction.
Claim 3
Dependent Claim
34 words
The method of claim 1 , further comprising determining an error signal, wherein the error signal corresponds to a difference between a desired dimension of the region and a measured dimension of the region.
Claim 4
Dependent Claim
67 words
The method of claim 1 , further comprising determining an error signal, wherein the error signal corresponds to a difference between a desired dimension of the region and a measured dimension of the region; and sending the error signal to at least one actuator, wherein the at least one actuator is configured to adjust the spacing between the template and the substrate in response to the difference.
Claim 5
Dependent Claim
37 words
The method of claim 1 , further comprising making plurality of dimensional measurements of the region at differing locations and determining whether the template and the substrate are substantially parallel based on the plurality of dimensional measurements.
Claim 6
Dependent Claim
24 words
The method of claim 4 , further comprising determining parallelism between the template and the substrate in response to the plurality of dimensional measurements.
Claim 7
Dependent Claim
22 words
The method of claim 4 , further comprising dynamically adjusting an orientation between the template and the substrate to maintain parallelism therebetween.
Claim 8
Dependent Claim
41 words
The method of claim 1 , further comprising making a plurality of dimensional measurements of the region at 3 or more non-colinear locations and determining whether the template and the substrate are substantially parallel based on the plurality of dimensional measurements.
Claim 9
Dependent Claim
40 words
The method of claim 7 , further comprising determining an error signal, wherein the error signal corresponds to a relative movement between the template and the substrate required to bring the template and the substrate into a substantially parallel configuration.
Claim 10
Dependent Claim
75 words
The method of claim 7 , further comprising determining an error signal, wherein the error signal corresponds to a relative movement between the template and the substrate required to bring the template and the substrate into a substantially parallel configuration; and sending the error signal to at least one actuator, wherein the at least one actuator is configured to adjust the relative position of the template and the substrate to achieve a substantially parallel configuration.
Claim 11
Dependent Claim
22 words
The method of claim 1 , wherein determining further comprises monitoring variations in an intensity of the monitored light across various wavelengths.
Claim 12
Dependent Claim
17 words
The method as recited in claim 1 , wherein the incident light comprises a plurality of wavelengths.
Claim 13
Dependent Claim
30 words
The method as recited in claim 11 , wherein determining further includes obtaining data representative of an intensity of at least some of the wavelengths associated with the monitoring light.
Claim 14
Dependent Claim
15 words
The method as recited in claim 1 , wherein the monitoring light comprises reflected light.
Claim 15
Dependent Claim
22 words
The method as recited in claim 1 , wherein the region comprises a material, with the material having said index of refraction.
Claim 16
Dependent Claim
21 words
The method as recited in claim 1 , wherein the region comprises a material, with the material substantially filling the region.
Claim 17
Dependent Claim
28 words
The method as recited in claim 1 , wherein determining further includes ascertaining the dimension of the region be a function of an intensity of the monitoring light.
Claim 18
Dependent Claim
15 words
The method as recited in claim 1 , wherein the template is a patterned template.
Claim 19
Dependent Claim
16 words
The method as recited in claim 1 , wherein the template is a substantially planar template.
Claim 20
Dependent Claim
19 words
The method as recited in claim 1 , wherein the optical characteristics include an intensity of the monitoring light.
Claim 21
Independent Claim
118 words
A method of determining a spacing between a template and a substrate, the method comprising: positioning the template in a spaced relationship with respect to the substrate defining a gap therebetween, with a material being disposed in the gap and having an index of refraction associated therewith; applying incident light to the template and the substrate; monitoring light reaching an interface of the template with the material, defining monitored light; and determining a magnitude of the spacing between the template and the substrate based on the monitored light by obtaining data representative of optical properties of the monitored light, with the magnitude being a function of optical characteristics of the material and a wavelength of the monitored light.
Claim 22
Independent Claim
118 words
A method of determining a spacing between a template and a substrate, the method comprising: positioning the template in a spaced relationship with respect to the substrate defining a gap therebetween, with a material being disposed in the gap and having an index of refraction associated therewith; applying incident light to the template and the substrate; monitoring light reaching an interface of the template with the material, defining monitored light; and determining a magnitude of the spacing between the template and the substrate based on the monitored light by obtaining data representative of optical properties of the monitored light, with the magnitude being a function of optical characteristics of the material and a wavelength of the monitored light.
Claim 23
Dependent Claim
39 words
The method of claim 20 , further comprising determining an error signal, wherein the error signal corresponds to a difference between a desired distance between the template and the substrate and the spacing between the template and the substrate.
Claim 24
Dependent Claim
67 words
The method of claim 20 , further comprising determining an error signal, wherein the error signal corresponds to a difference between a desired distance between the template and the substrate and the spacing between the template and the substrate; and sending the error signal to at least one actuator, wherein the at least one actuator is configured to adjust the spacing between the template and the substrate.
Claim 25
Dependent Claim
40 words
The method of claim 20 , further comprising determining the spacing between the template and the substrate at a plurality of locations and determining whether the template and the substrate are substantially parallel based on the plurality of spacing determinations.
Claim 26
Dependent Claim
40 words
The method of claim 23 , further comprising determining an error signal, wherein the error signal corresponds to a relative movement between the template and the substrate required to bring the template and the substrate into a substantially parallel configuration.
Claim 27
Dependent Claim
75 words
The method of claim 23 , further comprising determining an error signal, wherein the error signal corresponds to a relative movement between the template and the substrate required to bring the template and the substrate into a substantially parallel configuration; and sending the error signal to at least one actuator, wherein the at least one actuator is configured to adjust the relative position of the template and the substrate to achieve a substantially parallel configuration.
Claim 28
Dependent Claim
42 words
The method of claim 20 , further comprising determining the spacing between the template and the substrate at 3 or more non-colinear locations and determining whether the template and the substrate are substantially parallel based on the 3 or more spacing determinations.
Claim 29
Dependent Claim
40 words
The method of claim 26 , further comprising determining an error signal, wherein the error signal corresponds to a relative movement between the template and the substrate required to bring the template and the substrate into a substantially parallel configuration.
Claim 30
Dependent Claim
75 words
The method of claim 26 , further comprising determining an error signal, wherein the error signal corresponds to a relative movement between the template and the substrate required to bring the template and the substrate into a substantially parallel configuration; and sending the error signal to at least one actuator, wherein the at least one actuator is configured to adjust the relative position of the template and the substrate to achieve a substantially parallel configuration.
Claim 31
Dependent Claim
29 words
The method of claim 20 , wherein monitoring light reflected from the template and the substrate further comprises monitoring variations in intensity of the monitored light across various wavelengths.
Claim 32
Dependent Claim
17 words
The method as recited in claim 20 , wherein the incident light comprises a plurality of wavelengths.
Claim 33
Dependent Claim
32 words
The method as recited in claim 30 , wherein determining the magnitude further includes obtaining data representative of an intensity of at least some of the wavelengths associated with the monitored light.
Claim 34
Dependent Claim
15 words
The method as recited in claim 20 , wherein the monitored light comprises reflected light.
Claim 35
Dependent Claim
42 words
The method as recited in claim 20 , wherein the index of refraction and the wavelength of the monitored light define a wavenumber, with the magnitude further being a function of the optical properties of the monitored light corresponding to the wavenumber.
Claim 36
Dependent Claim
20 words
The method as recited in claim 20 , wherein the optical characteristics of the material include the index of refraction.
Claim 37
Dependent Claim
15 words
The method as recited in claim 20 , wherein the material substantially fills the gap.
Claim 38
Dependent Claim
15 words
The method as recited in claim 20 , wherein the template is a patterned template.
Claim 39
Dependent Claim
16 words
The method as recited in claim 20 , wherein the template is a substantially planar template.
Claim 40
Dependent Claim
23 words
The method as recited in claim 20 , wherein the optical properties of the monitored light include an intensity of the monitored light.
Claim 41
Independent Claim
159 words
A method of determining a spacing between a template and a substrate, with a material being disposed between the template and the substrate, the method comprising: positioning the template in a spaced relationship with respect to the substrate defining a gap therebetween, with said material being disposed in said gap and having an index of refraction associated therewith; applying light to the template and the substrate, wherein the light comprises a plurality of wavelengths; monitoring light reflected from a surface of the template and the substrate defining monitored light; and determining a magnitude of the spacing between the template and the substrate based on the monitored light by obtaining data representative of an intensity of at least some of the wavelengths associated with the monitored light arid determining a wavenumber associated therewith, wherein the wavenumber is a function of the index of refraction and the wavelength of the monitored light, with said magnitude being a function of the wavenumber.
Claim 42
Independent Claim
159 words
A method of determining a spacing between a template and a substrate, with a material being disposed between the template and the substrate, the method comprising: positioning the template in a spaced relationship with respect to the substrate defining a gap therebetween, with said material being disposed in said gap and having an index of refraction associated therewith; applying light to the template and the substrate, wherein the light comprises a plurality of wavelengths; monitoring light reflected from a surface of the template and the substrate defining monitored light; and determining a magnitude of the spacing between the template and the substrate based on the monitored light by obtaining data representative of an intensity of at least some of the wavelengths associated with the monitored light arid determining a wavenumber associated therewith, wherein the wavenumber is a function of the index of refraction and the wavelength of the monitored light, with said magnitude being a function of the wavenumber.
Claim 43
Dependent Claim
33 words
The method of claim 39 , further comprising determining an error signal, wherein the error signal corresponds to the difference between a desired distance between the template and the substrate and the magnitude.
Claim 44
Dependent Claim
64 words
The method of claim 39 , further comprising determining an error signal, wherein the error signal corresponds to the difference between a desired distance between the template and the substrate and the magnitude; and sending the error signal to at least one actuator, wherein the at least one actuator is configured to adjust the spacing between the surface of the template and the substrate.
Claim 45
Dependent Claim
19 words
The method of claim 39 , wherein the template comprises a plurality of recesses defined on a surface thereof.
Claim 46
Dependent Claim
27 words
The method of claim 39 , wherein the template comprises a plurality of recesses defined on a surface thereof, wherein the recesses are of a known depth.
Claim 47
Dependent Claim
40 words
The method of claim 39 , wherein the template comprises a plurality of recesses defined on a surface thereof and wherein applying light to the template and the substrate comprises passing the light through one or more of the recesses.
Claim 48
Dependent Claim
44 words
The method of claim 39 , wherein the template comprises a plurality of recesses defined on a surface thereof and wherein a depth of each recess is at least ¼ of a mean wavelength of the light applied to the template and the substrate.
Claim 49
Dependent Claim
40 words
The method of claim 39 , further comprising determining the distance between the template and the substrate at a plurality of locations and determining whether the template and the substrate are substantially parallel based on the plurality of distance determinations.
Claim 50
Dependent Claim
41 words
The method of claim 46 , further comprising determining an error signal, wherein the error signal corresponds to a relative movement between the template and the substrate required to bring the template and the substrate in to a substantially parallel configuration.
Claim 51
Dependent Claim
76 words
The method of claim 46 , further comprising determining an error signal, wherein the error signal corresponds to a relative movement between the template and the substrate required to bring the template and the substrate in to a substantially parallel configuration; and sending the error signal to at least one actuator, wherein the at least one actuator is configured to adjust the relative position between the template and the substrate to achieve a substantially parallel configuration.
Claim 52
Dependent Claim
13 words
The method of claim 39 , wherein the template is a patterned template.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2008-10-10 | 2009-04-11 | 2009-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-10-10 | 2013-04-11 | 2013-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2016-10-10 | 2017-04-11 | 2017-10-11 | $7700.00 | Window Closed / Lapsed |