Patent US6982783B2 successfully refreshed from Google Patents.
US6982783B2
Expired / Lapsed
US
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Chucking system for modulating shapes of substrates
Assignee: Canon Nanotechnologies Inc
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Filing: 2004-06-09
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Granted: 2006-01-03
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Expires: 2024-06-09
Abstract
Abstract The present invention is directed to a chucking system to modulate substrates so as to properly shape and position the same with respect to a wafer upon which a pattern is to be formed with the substrate.
Inventors
- 👤 Byung J. Choi
- 👤 Ronald D. Voisin
- 👤 Sidlgata V. Sreenivasan
- 👤 Michael P. C. Watts
- 👤 Daniel Babbs
- 👤 Mario J. Meissl
- 👤 Hillman Bailey
- 👤 Norman E. Schumaker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 23:10
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/708; G03F7/70858; G03F7/70866; G03F7/70875; B; B29; B29C; B29C43/00; B29C43/003; B29C43/02; B29C43/021; B29C43/32; B29C43/36; B29D; B29D11/00; B29D11/00009; B29D11/00365; G03B; G03B27/00; G03B27/32; G03B27/52; G03B27/62; G03F7/70691; G03F7/707; B29C2043/023; B29C2043/025; B29C2043/3205; B29C2043/3222; B29C2043/3233; B29C43/34; B29C2043/3488; B29C43/58; B29C2043/5833; B29C2043/5841; B29C33/00; B29C33/20
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
73 words
A chucking system to hold a substrate, said chucking system comprising: a chuck body having a side with a pair of spaced-apart support regions extending therefrom terminating in a plane, said pair of spaced-apart support regions having a recess defined therebetween, with a portion of said chuck body in superimposition with said recess being transparent to radiation having a predetermined wavelength, with said chuck body being defined between said side and said plane.
Claim 2
Dependent Claim
73 words
A chucking system to hold a substrate, said chucking system comprising: a chuck body having a side with a pair of spaced-apart support regions extending therefrom terminating in a plane, said pair of spaced-apart support regions having a recess defined therebetween, with a portion of said chuck body in superimposition with said recess being transparent to radiation having a predetermined wavelength, with said chuck body being defined between said side and said plane.
Claim 3
Dependent Claim
16 words
The chucking system as recited in claim 1 wherein said radiation includes radiation having ultra-violet wavelengths.
Claim 4
Dependent Claim
34 words
The chucking system as recited in claim 1 wherein said chuck body further includes an additional support region spaced-apart from one of said pair of spaced-apart support regions, with an additional recess disposed therebetween.
Claim 5
Dependent Claim
20 words
The chucking system as recited in claim 3 wherein said additional recess includes a plurality of spaced-apart pins extending therefrom.
Claim 6
Dependent Claim
44 words
The chucking system as recited in claim 1 wherein said pair of spaced-apart support regions has a support surface associated therewith, facing away from said side, with said support surface being formed from a material adapted to conform to a profile of said substrate.
Claim 7
Dependent Claim
69 words
The chucking system as recited in claim 3 wherein each of said plurality of support regions has a support surface associated therewith, facing away from said side, with said support surface being formed from a material compliant in a first direction extending between said side and said plane to conform to a profile of said substrate while being resistant to movement in a direction transverse to said first direction.
Claim 8
Dependent Claim
40 words
The chucking system as recited in claim 3 further including a wall disposed within said additional recess, extending between one of said spaced-apart support regions and said additional support region to segment said additional recess into a plurality of sub-chambers.
Claim 9
Dependent Claim
29 words
The chucking system as recited in claim 3 wherein said support regions have a shape that is selected from a set of shapes consisting of annular, polygonal and circular.
Claim 10
Dependent Claim
35 words
The chucking system as recited in claim 3 wherein said chuck body further includes an exterior surface and a throughway extending through said chuck body placing said recesses in fluid communication with said exterior surface.
Claim 11
Dependent Claim
47 words
The chucking system as recited in claim 9 further including a pressure control system in fluid communication with said throughway, with said substrate resting against said support region, covering said recess, defining a chamber, with said pressure control system operating to control a pressure in said chamber.
Claim 12
Dependent Claim
130 words
A chucking system to hold a substrate, said chucking system comprising: a chuck body having a side with a pair of spaced-apart support regions extending therefrom terminating in a plane, said pair of spaced-apart support regions having a recess defined therebetween, with a portion of said chuck body in superimposition with said recess being transparent to ultra-violet radiation, with said pair of spaced-apart support regions having a support surface associated therewith, facing away from said side, with said support surface being formed from a material compliant in a first direction extending between said side and said plane to conform to a profile of said substrate while being resistant to movement in a direction transverse to said first direction, with said chuck body being defined between said side and said plane.
Claim 13
Dependent Claim
130 words
A chucking system to hold a substrate, said chucking system comprising: a chuck body having a side with a pair of spaced-apart support regions extending therefrom terminating in a plane, said pair of spaced-apart support regions having a recess defined therebetween, with a portion of said chuck body in superimposition with said recess being transparent to ultra-violet radiation, with said pair of spaced-apart support regions having a support surface associated therewith, facing away from said side, with said support surface being formed from a material compliant in a first direction extending between said side and said plane to conform to a profile of said substrate while being resistant to movement in a direction transverse to said first direction, with said chuck body being defined between said side and said plane.
Claim 14
Dependent Claim
34 words
The chucking system as recited in claim 11 wherein said chuck body further includes an additional support region spaced-apart from one of said pair of spaced-apart support regions, with an additional recess disposed therebetween.
Claim 15
Dependent Claim
20 words
The chucking system as recited in claim 12 wherein said additional recess includes a plurality of spaced-apart pins extending therefrom.
Claim 16
Dependent Claim
39 words
The chucking system as recited in claim 13 further including a wall disposed within said additional recess, extending between one of said support regions and said additional support region to segment said additional recess into a plurality of sub-chambers.
Claim 17
Dependent Claim
29 words
The chucking system as recited in claim 14 wherein said support regions have a shape that is selected from a set of shapes consisting of annular, polygonal and circular.
Claim 18
Dependent Claim
73 words
The chucking system as recited in claim 12 wherein said chuck body further includes an exterior surface and a throughway extending through said chuck body placing said recesses in fluid communication with said exterior surface and a pressure control system in fluid communication with said throughway, with said substrate resting against said support region, covering said recess, defining a chamber, with said pressure control system operating to control a pressure in said chamber.
Claim 19
Dependent Claim
73 words
A chucking system to hold a substrate, said chucking system comprising: a chuck body having first and second opposed sides, with said body including sub-portions extending from said second side terminating in a plane and defining a recess therebetween, with remaining portions of said body being disposed between said plane and said first side, with a portion of said body in superimposition with said recess being transparent to radiation having a predetermined wavelength.
Claim 20
Dependent Claim
73 words
A chucking system to hold a substrate, said chucking system comprising: a chuck body having first and second opposed sides, with said body including sub-portions extending from said second side terminating in a plane and defining a recess therebetween, with remaining portions of said body being disposed between said plane and said first side, with a portion of said body in superimposition with said recess being transparent to radiation having a predetermined wavelength.
Claim 21
Dependent Claim
29 words
The chucking system as recited in claim 17 wherein said first side further includes an additional sub-portion spaced-apart from one of said sub-portions, with an additional recess disposed therebetween.
Claim 22
Dependent Claim
20 words
The chucking system as recited in claim 18 wherein said additional recess includes a plurality of spaced-apart pins extending therefrom.
Claim 23
Dependent Claim
37 words
The chucking system as recited in claim 19 further including a wall disposed within said additional recess, extending between one of said sub-portions and said additional sub-portion to segment said additional recess into a plurality of sub-chambers.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2009-01-02 | 2009-07-04 | 2010-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2013-01-02 | 2013-07-04 | 2014-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2017-01-02 | 2017-07-04 | 2018-01-03 | $7700.00 | Window Closed / Lapsed |