US7462028B2
Active / In Force
US
⏱️ 0.4 years remaining
Partial vacuum environment imprinting
Assignee: Canon Nanotechnologies Inc
•
Filing: 2007-04-02
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Granted: 2008-12-09
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Expires: 2027-04-02
Abstract
Abstract The present invention is directed towards a method and a system to create and maintain a desired environment in the vicinity of a nano-imprint lithography template by creation of a partial vacuum using channels or holes in the template holding the nano-imprint mold.
Inventors
- 👤 Anshuman Cherala
- 👤 Pankaj B. Lad
- 👤 Ian M. McMackin
- 👤 Byung-Jin Choi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 09:24
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B29; B29C; B29C43/00; B29C43/003; B29C59/00; B29C59/02; B29C59/022; B82; B82Y; B82Y10/00; B82Y40/00; G03F7/70; G03F7/708; G03F7/70808; G03F7/70841; B29C43/02; B29C43/021; B29C2043/023; B29C2043/025; B29C43/32; B29C43/58; B29C2043/5833
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
119 words
A system for creating a specific environment during a nanolithography imprinting process, comprising: a substrate disposed on a chuck surface; a template stage having an air bearing reference surface; an air bearing surface disposed around the substrate and interfacing with the air bearing reference surface creating an interface gap; a template coupled to the template stage and positioned in close proximity to the substrate creating a controlled volume surrounding a nano-imprint mold on the template and the substrate; and a means for creating a partial vacuum in the controlled volume surrounding the nano-imprint mold and the substrate thereby enabling a gas flow through the interface gap and the controlled volume to create the specific environment in the controlled volume.
Claim 2
Independent Claim
119 words
A system for creating a specific environment during a nanolithography imprinting process, comprising: a substrate disposed on a chuck surface; a template stage having an air bearing reference surface; an air bearing surface disposed around the substrate and interfacing with the air bearing reference surface creating an interface gap; a template coupled to the template stage and positioned in close proximity to the substrate creating a controlled volume surrounding a nano-imprint mold on the template and the substrate; and a means for creating a partial vacuum in the controlled volume surrounding the nano-imprint mold and the substrate thereby enabling a gas flow through the interface gap and the controlled volume to create the specific environment in the controlled volume.
Claim 3
Dependent Claim
53 words
The system as recited in claim 1 , wherein the template comprises a plurality of holes positioned around the nano-imprint mold and passing through the template and the creating means utilizes the plurality of holes to create the partial evacuation of gas in the controlled volume surrounding the nano-imprint mold and the substrate.
Claim 4
Dependent Claim
30 words
The system as recited in claim 1 , wherein the template further comprises a channel formed in the template around the nano-imprint mold, the channel coupled to the creating means.
Claim 5
Dependent Claim
60 words
The system as recited in claim 1 , wherein the creating means further comprises a body with the air bearing surface positioned around the template in a configuration that creates the interface gap between sides of the template and sides of the body whereby air flow up through the interface gap evacuates gas from between the template and the substrate.
Claim 6
Dependent Claim
21 words
The system as recited in claim 1 , further comprising a polymerizable fluid dispensed between the nano-imprint mold and the substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2011-12-09 | 2012-06-09 | 2012-12-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2015-12-09 | 2016-06-09 | 2016-12-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2019-12-09 | 2020-06-09 | 2020-12-09 | $7700.00 | Window Closed / Lapsed |