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US7635445B2
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US
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Method of separating a mold from a solidified layer disposed on a substrate
Assignee: Canon Nanotechnologies Inc
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Filing: 2005-04-18
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Granted: 2009-12-22
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Expires: 2025-04-18
Abstract
Abstract The present invention is directed towards a method of separating a mold, included in a template, from a layer disposed on a substrate, the method including, inter alia, applying a separation force to the template to separate the template from the layer; and facilitating localized deformation in the substrate to reduce the separation force required to achieve separation.
Inventors
- 👤 Byung-Jin Choi
- 👤 Anshuman Cherala
- 👤 Yeong-jun Choi
- 👤 Mario J. Meissl
- 👤 Sidlgata V. Sreenivasan
- 👤 Norman E. Schumaker
- 👤 Xiaoming Lu
- 👤 Ian M. McMackin
- 👤 Daniel A. Babbs
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 06:45
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7614; B; B82; B82Y; B82Y10/00; B82Y40/00; G; G03; G03F; G03F7/00; G03F7/0002; H10P72/78; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/887
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
92 words
A method of separating a mold, included in a template, from a layer disposed on a substrate, said method comprising: applying a separation force to said template to separate said template from said layer; and facilitating localized deformation in said substrate, wherein facilitating further includes applying a positive pressure to first regions of said substrate and applying a vacuum to second regions of said substrate such that said vacuum constrains said substrate in second regions of said substrate as said positive pressure deforms first regions of said substrate in a first direction.
Claim 2
Independent Claim
92 words
A method of separating a mold, included in a template, from a layer disposed on a substrate, said method comprising: applying a separation force to said template to separate said template from said layer; and facilitating localized deformation in said substrate, wherein facilitating further includes applying a positive pressure to first regions of said substrate and applying a vacuum to second regions of said substrate such that said vacuum constrains said substrate in second regions of said substrate as said positive pressure deforms first regions of said substrate in a first direction.
Claim 3
Dependent Claim
20 words
The method as recited in claim 1 wherein facilitating further includes facilitating localized deformation in response to said separation force.
Claim 4
Dependent Claim
25 words
The method as recited in claim 1 wherein facilitating further includes facilitating localized deformation of said substrate in a region in superimposition with said mold.
Claim 5
Dependent Claim
38 words
The method as recited in claim 1 wherein facilitating further includes said facilitating localized deformation of said substrate in a region in superimposition with said mold while avoiding deformation of areas of said substrate outside of said region.
Claim 6
Dependent Claim
35 words
The method as recited in claim 1 wherein said mold is adhered to said layer by an adhesion force with applying further including applying said separation force with a magnitude to overcome said adhesion force.
Claim 7
Independent Claim
83 words
A method of separating a mold, included in a template, from a layer disposed on a substrate, said method comprising: applying a separation force to said template to separate said template from said layer; and facilitating localized deformation in said substrate, wherein facilitating further includes applying a vacuum to said substrate at a plurality of spaced-apart regions, a subset of which has a vacuum associated therewith that is less than the vacuum associated with the remaining regions of said plurality of spaced-apart regions.
Claim 8
Independent Claim
83 words
A method of separating a mold, included in a template, from a layer disposed on a substrate, said method comprising: applying a separation force to said template to separate said template from said layer; and facilitating localized deformation in said substrate, wherein facilitating further includes applying a vacuum to said substrate at a plurality of spaced-apart regions, a subset of which has a vacuum associated therewith that is less than the vacuum associated with the remaining regions of said plurality of spaced-apart regions.
Claim 9
Dependent Claim
27 words
The method as recited in claim 1 wherein facilitating further includes applying a pushing force directed against said substrate to move said substrate away from said template.
Claim 10
Independent Claim
102 words
A method of separating a mold, included in a template, from a layer disposed on a substrate, said method comprising: applying a separation force to said template to separate said template from said layer; and facilitating localized deformation in said substrate, wherein facilitating further includes applying a positive pressure to first regions of said substrate, in superimposition with said mold, and applying a vacuum to second regions of said substrate outside of said first regions such that said vacuum constrains said substrate in second regions of said substrate as said positive pressure deforms first regions of said substrate in a first direction.
Claim 11
Independent Claim
102 words
A method of separating a mold, included in a template, from a layer disposed on a substrate, said method comprising: applying a separation force to said template to separate said template from said layer; and facilitating localized deformation in said substrate, wherein facilitating further includes applying a positive pressure to first regions of said substrate, in superimposition with said mold, and applying a vacuum to second regions of said substrate outside of said first regions such that said vacuum constrains said substrate in second regions of said substrate as said positive pressure deforms first regions of said substrate in a first direction.
Claim 12
Dependent Claim
37 words
The method as recited in claim 8 wherein generating further includes facilitating localized deformation of said substrate in a region in superimposition with said mold while avoiding deformation of areas of said substrate outside of said region.
Claim 13
Independent Claim
99 words
A method of separating a mold, included in a template, adhered to a layer, with an adhesion force, which is disposed on a substrate, said method comprising: applying a separation force, having a magnitude associate therewith, to said template, and generating sufficient localized deformation in said substrate to facilitate overcoming said adhesion force with said separation force, wherein generating further includes applying a vacuum to said substrate at a plurality of spaced-apart regions, a subset of which has a vacuum associated therewith that is less than the vacuum associated with the remaining regions of said plurality of spaced-apart regions.
Claim 14
Independent Claim
99 words
A method of separating a mold, included in a template, adhered to a layer, with an adhesion force, which is disposed on a substrate, said method comprising: applying a separation force, having a magnitude associate therewith, to said template, and generating sufficient localized deformation in said substrate to facilitate overcoming said adhesion force with said separation force, wherein generating further includes applying a vacuum to said substrate at a plurality of spaced-apart regions, a subset of which has a vacuum associated therewith that is less than the vacuum associated with the remaining regions of said plurality of spaced-apart regions.
Claim 15
Independent Claim
108 words
A method of separating a mold, included in a template, adhered to a layer, with an adhesion force, which is disposed on a substrate, said method comprising: applying a separation force, having a magnitude associated therewith, to said template; and generating sufficient localized deformation in said substrate to facilitate overcoming said adhesion force with said separation force, wherein generating further includes applying a positive pressure to first regions of said substrate and applying a vacuum to second regions of said substrate such that said vacuum constrains said substrate in second regions of said substrate as said positive pressure deforms first regions of said substrate in a first direction.
Claim 16
Independent Claim
108 words
A method of separating a mold, included in a template, adhered to a layer, with an adhesion force, which is disposed on a substrate, said method comprising: applying a separation force, having a magnitude associated therewith, to said template; and generating sufficient localized deformation in said substrate to facilitate overcoming said adhesion force with said separation force, wherein generating further includes applying a positive pressure to first regions of said substrate and applying a vacuum to second regions of said substrate such that said vacuum constrains said substrate in second regions of said substrate as said positive pressure deforms first regions of said substrate in a first direction.
Claim 17
Dependent Claim
20 words
The method as recited in claim 10 wherein facilitating further includes generating localized deformation in response to said separation force.
Claim 18
Independent Claim
125 words
A method of separating a mold, included in a template, adhered to a layer, with an adhesion force, which is disposed on a substrate, said method comprising: applying a separation force, having a magnitude associated therewith, to said template; and generating sufficient localized deformation in said substrate to facilitate overcoming said adhesion force with said separation force, wherein generating further includes applying a positive pressure to first regions of said substrate and applying a vacuum to second regions of said substrate such that said vacuum constrains said substrate in second regions of said substrate as said positive pressure deforms first regions of said substrate in a first direction; and applying a pushing force directed against said substrate to move said substrate away from said template.
Claim 19
Independent Claim
125 words
A method of separating a mold, included in a template, adhered to a layer, with an adhesion force, which is disposed on a substrate, said method comprising: applying a separation force, having a magnitude associated therewith, to said template; and generating sufficient localized deformation in said substrate to facilitate overcoming said adhesion force with said separation force, wherein generating further includes applying a positive pressure to first regions of said substrate and applying a vacuum to second regions of said substrate such that said vacuum constrains said substrate in second regions of said substrate as said positive pressure deforms first regions of said substrate in a first direction; and applying a pushing force directed against said substrate to move said substrate away from said template.
Claim 20
Dependent Claim
33 words
The method as recited in claim 13 wherein pushing further includes directing a flow of gas against regions of said substrate outside of a zone of said substrate in superimposition with said mold.
Claim 21
Independent Claim
116 words
A method of separating a mold, included in a template, adhered to a layer, with an adhesion force, which is disposed on a substrate, said method comprising: applying a separation force, having a magnitude associated therewith, to said template; and generating sufficient localized deformation in said substrate to facilitate overcoming said adhesion force with said separation force; and applying a pushing force directed against said substrate to move said substrate away from said template, wherein generating further includes applying a vacuum to said substrate at a plurality of spaced-apart regions, a subset of which has a vacuum associated therewith that is less than the vacuum associated with the remaining regions of said plurality of spaced-apart regions.
Claim 22
Independent Claim
116 words
A method of separating a mold, included in a template, adhered to a layer, with an adhesion force, which is disposed on a substrate, said method comprising: applying a separation force, having a magnitude associated therewith, to said template; and generating sufficient localized deformation in said substrate to facilitate overcoming said adhesion force with said separation force; and applying a pushing force directed against said substrate to move said substrate away from said template, wherein generating further includes applying a vacuum to said substrate at a plurality of spaced-apart regions, a subset of which has a vacuum associated therewith that is less than the vacuum associated with the remaining regions of said plurality of spaced-apart regions.
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