Patent US5114402A successfully refreshed from Google Patents.
US6965506B2
Expired / Lapsed
US
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System and method for dechucking a workpiece from an electrostatic chuck
Assignee: Lam Research Corp
•
Filing: 2002-04-18
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Granted: 2005-11-15
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Expires: 2022-04-18
Abstract
Abstract The present invention comprises a system and method for determining the reverse voltage and time to apply to the dechucking of a workpiece from an electrostatic chuck (ESC). The system for dechucking comprises a processing chamber operatively coupled to a microprocessor and a memory that is configured to determine the dechucking parameters for the workpiece. The method for determining dechucking parameters comprises generating a correlation between ESC resistance and dechucking parameters, performing a single experimental test on a new ESC and generating a fitting parameter, and using the correlation and the fitting parameter to determine the dechucking parameters.
Inventors
- 👤 Arthur M. Howald
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 04:53
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H02; H02N; H02N13/00; H10P72/70; H10P72/72; H10P72/722
Claims Analysis
Total Claims: 68
Claim 1
Independent Claim
124 words
A system for dechucking a workpiece, comprising: a first electrostatic chuck (ESC); a sensor operatively coupled to said first ESC, said sensor configured to generate at least one sensor measurement of an ESC electrical property for said first ESC; a computer system operatively coupled to said sensor, said computer system having a correlation between said ESC electrical property measurement and a dechucking parameter for a plurality of ESCs, said computer system configured to generate at least one dechucking parameter with said at least one sensor measurement and said correlation; and a power supply operatively coupled to said computer system and said ESC, said power supply configured to receive said dechucking parameter from said computer system and apply said dechucking parameter to said first ESC.
Claim 2
Independent Claim
124 words
A system for dechucking a workpiece, comprising: a first electrostatic chuck (ESC); a sensor operatively coupled to said first ESC, said sensor configured to generate at least one sensor measurement of an ESC electrical property for said first ESC; a computer system operatively coupled to said sensor, said computer system having a correlation between said ESC electrical property measurement and a dechucking parameter for a plurality of ESCs, said computer system configured to generate at least one dechucking parameter with said at least one sensor measurement and said correlation; and a power supply operatively coupled to said computer system and said ESC, said power supply configured to receive said dechucking parameter from said computer system and apply said dechucking parameter to said first ESC.
Claim 3
Dependent Claim
25 words
The system of claim 1 wherein said plurality of ESCs are a batch of ESCs, said batch of ESCs having similar material properties and geometry.
Claim 4
Dependent Claim
20 words
The system of claim 2 wherein said first ESC has similar material properties and geometry to said batch of ESCs.
Claim 5
Dependent Claim
24 words
The system of claim 1 wherein said correlation is generated by obtaining said ESC electrical property measurement for each of said plurality of ESCs.
Claim 6
Dependent Claim
22 words
The system of claim 1 wherein said correlation is determined by measuring the dechucking parameters for each of said plurality of ESCs.
Claim 7
Dependent Claim
17 words
The system of claim 4 wherein said ESC electrical property measurement is generated at a particular temperature.
Claim 8
Dependent Claim
17 words
The system of claim 4 wherein said ESC electrical property measurement is generated at a particular voltage.
Claim 9
Dependent Claim
21 words
The system of claim 4 wherein said ESC electrical property measurement is generated at a particular voltage and a particular temperature.
Claim 10
Dependent Claim
14 words
The system of claim 1 wherein said dechucking parameter comprises a reverse polarity voltage.
Claim 11
Dependent Claim
19 words
The system of claim 1 wherein said dechucking parameter comprises a time period for applying a reverse polarity voltage.
Claim 12
Dependent Claim
15 words
The system of claim 1 wherein said sensor comprises an ammeter configured to measure current.
Claim 13
Dependent Claim
16 words
The system of claim 11 wherein said at least one sensor measurement is a current measurement.
Claim 14
Dependent Claim
14 words
The system of claim 1 wherein said ESC electrical property is an ESC current.
Claim 15
Dependent Claim
96 words
The system of claim 13 wherein said ESC current is related to an operating voltage and an operating temperature according to a relationship: I ( T , V ) = V R 0 exp [ ( - A + B V ) / ( 273 + T ) ] where: I is said ESC current, T is said operating temperature in degrees Celsius, V is said operating voltage, R 0 is a fitting parameter particular to said first ESC, and A and B are fitting parameters particular to a batch of ESCs.
Claim 16
Dependent Claim
15 words
The system of claim 14 wherein said dechucking parameter is determined at said operating temperature.
Claim 17
Dependent Claim
29 words
The system of claim 15 wherein said at least one sensor measurement for said first ESC is used to determine a value for said fitting parameter R 0 .
Claim 18
Dependent Claim
14 words
The system of claim 1 wherein said ESC electrical property is an ESC resistance.
Claim 19
Dependent Claim
81 words
The system of claim 6 wherein said ESC resistance is related to an operating voltage and an operating temperature according to the following relationship: R ( T,V )= R 0 exp[( A−B√{square root over (V)} )/(273+ T )] where: I is said ESC current, T is said operating temperature in degrees Celsius, V is said operating voltage, R 0 is a fitting parameter particular to said first ESC, and A and B are fitting parameters particular to a batch of ESCs.
Claim 20
Dependent Claim
15 words
The system of claim 18 wherein said dechucking parameter is determined at said operating temperature.
Claim 21
Dependent Claim
29 words
The system of claim 19 wherein said at least one sensor measurement for said first ESC is used to determine a value for said fitting parameter R 0 .
Claim 22
Independent Claim
189 words
A system for dechucking a workpiece, comprising: a first electrostatic chuck (ESC); a sensor operatively coupled to said first ESC, said sensor configured to generate at least one ESC measurement of an ESC electrical property for said first ESC; a computer system operatively coupled to said sensor, said computer system having a correlation stored with a computer memory from a batch of ESCs, said batch of ESCs having geometric similarities to said first ESC, said correlation comprising an ESC measurement of said ESC electrical property for each ESC from said batch of ESCs, and a dechucking parameter for each ESC from said batch ESCs, said dechucking parameter comprising a reverse polarity voltage magnitude that is applied to each ESC taken from said batch of ESCs, said computer system configured to generate at least one dechucking parameter for said first ESC with said correlation and said at least one ESC measurement associated with said first ESC; and a power supply operatively coupled to said computer system and said ESC, said power supply configured receive said dechucking parameters from said computer system and apply said dechucking parameter to said first ESC.
Claim 23
Independent Claim
189 words
A system for dechucking a workpiece, comprising: a first electrostatic chuck (ESC); a sensor operatively coupled to said first ESC, said sensor configured to generate at least one ESC measurement of an ESC electrical property for said first ESC; a computer system operatively coupled to said sensor, said computer system having a correlation stored with a computer memory from a batch of ESCs, said batch of ESCs having geometric similarities to said first ESC, said correlation comprising an ESC measurement of said ESC electrical property for each ESC from said batch of ESCs, and a dechucking parameter for each ESC from said batch ESCs, said dechucking parameter comprising a reverse polarity voltage magnitude that is applied to each ESC taken from said batch of ESCs, said computer system configured to generate at least one dechucking parameter for said first ESC with said correlation and said at least one ESC measurement associated with said first ESC; and a power supply operatively coupled to said computer system and said ESC, said power supply configured receive said dechucking parameters from said computer system and apply said dechucking parameter to said first ESC.
Claim 24
Dependent Claim
17 words
The system of claim 21 wherein said ESC electrical property measurement is generated at a particular temperature.
Claim 25
Dependent Claim
17 words
The system of claim 21 wherein said ESC electrical property measurement is generated at a particular voltage.
Claim 26
Dependent Claim
21 words
The system of claim 21 wherein said ESC electrical property measurement is generated at a particular voltage and a particular temperature.
Claim 27
Dependent Claim
14 words
The system of claim 21 wherein said ESC electrical property is an ESC current.
Claim 28
Dependent Claim
96 words
The system of claim 25 wherein said ESC current is related to an operating voltage and an operating temperature according to an equation: I ( T , V ) = V R 0 exp [ ( - A + B V ) / ( 273 + T ) ] where: I is said ESC current, T is said operating temperature in degrees Celsius, V is said operating voltage, R 0 is a fitting parameter particular to said first ESC, and A and B are fitting parameters particular to a batch of ESCs.
Claim 29
Dependent Claim
29 words
The system of claim 26 wherein said at least one sensor measurement for said first ESC is used to determine a value for said fitting parameter R 0 .
Claim 30
Dependent Claim
14 words
The system of claim 21 wherein said ESC electrical property is an ESC resistance.
Claim 31
Dependent Claim
80 words
The system of claim 28 wherein said ESC resistance is related to an operating voltage and an operating temperature according to an equation: R ( T,V )= R 0 exp[( A−B√{square root over (V)} )/(273+ T )] where: I is said ESC current, T is said operating temperature in degrees Celsius, V is said operating voltage, R 0 is a fitting parameter particular to said first ESC, and A and B are fitting parameters particular to a batch of ESCs.
Claim 32
Dependent Claim
29 words
The system of claim 29 wherein said at least one sensor measurement for said first ESC is used to determine a value for said fitting parameter R 0 .
Claim 33
Independent Claim
105 words
A method for dechucking a workpiece from a first electrostatic chuck (ESC) within a processing chamber, comprising: generating a correlation an electrical property of ESC and an appropriate dechucking parameter, said correlation, including, measuring at least one ESC electrical property for each ESC within said batch of ESCs, determining a dechucking parameter for each ESC within said batch of ESCs, said dechucking parameter comprising a reverse polarity voltage magnitude that is applied to release a workpiece from each ESC; obtaining a single measurement for said first ESC; and determining at least one dechucking parameter for said first ESC with said single measurement and said correlation.
Claim 34
Independent Claim
105 words
A method for dechucking a workpiece from a first electrostatic chuck (ESC) within a processing chamber, comprising: generating a correlation an electrical property of ESC and an appropriate dechucking parameter, said correlation, including, measuring at least one ESC electrical property for each ESC within said batch of ESCs, determining a dechucking parameter for each ESC within said batch of ESCs, said dechucking parameter comprising a reverse polarity voltage magnitude that is applied to release a workpiece from each ESC; obtaining a single measurement for said first ESC; and determining at least one dechucking parameter for said first ESC with said single measurement and said correlation.
Claim 35
Dependent Claim
17 words
The method of claim 31 wherein said at least one ESC electrical property is an ESC current.
Claim 36
Dependent Claim
96 words
The method of claim 32 wherein said ESC current is related to an operating voltage and an operating temperature according to a relationship: I ( T , V ) = V R 0 exp [ ( - A + B V ) / ( 273 + T ) ] where: I is said ESC current, T is said operating temperature in degrees Celsius, V is said operating voltage, R 0 is a fitting parameter particular to each said ESC, and A and B are fitting parameters particular to said batch of ESCs.
Claim 37
Dependent Claim
21 words
The method of claim 33 wherein said determining said dechucking parameters for each ESC is conducted at a plurality of voltages.
Claim 38
Dependent Claim
21 words
The method of claim 33 wherein said determining said dechucking parameters for each ESC is conducted at a plurality of temperatures.
Claim 39
Dependent Claim
23 words
The method of claim 33 wherein said determining said dechucking parameters for each ESC is conducted at a plurality of voltages and temperature.
Claim 40
Dependent Claim
14 words
The method of claim 31 wherein said ESC electrical property is an ESC resistance.
Claim 41
Dependent Claim
81 words
The method of claim 37 wherein said ESC resistance is related to an operating voltage and an operating temperature according to the following relationship: R ( T,V )= R 0 exp[( A−B√{square root over (V)} )/(273+ T )] where: I is said ESC current, T is said operating temperature in degrees Celsius, V is said operating voltage, R 0 is a fitting parameter particular to each said ESC, and A and B are fitting parameters particular to a batch of ESCs.
Claim 42
Dependent Claim
21 words
The method of claim 38 wherein said determining said dechucking parameters for each ESC is conducted at a plurality of voltages.
Claim 43
Dependent Claim
21 words
The method of claim 38 wherein said determining said dechucking parameters for each ESC is conducted at a plurality of temperatures.
Claim 44
Dependent Claim
23 words
The method of claim 38 wherein said determining said dechucking parameters for each ESC is conducted at a plurality of voltages and temperature.
Claim 45
Independent Claim
87 words
A method for generating a correlation between a dechucking parameter and an electrostatic chuck (ESC) electrical property, comprising: selecting a batch of ESCs, said batch of ESCs including a plurality of ESCs having similar material properties and geometry; determining an ESC electrical property measurement for each of said ESCs from said batch; determining a dechucking parameter for each of said ESCs, said dechucking parameter comprising a reverse voltage magnitude; correlating said ESC electrical property with said dechucking parameter for each ESC drawn from said batch of ESCs.
Claim 46
Independent Claim
87 words
A method for generating a correlation between a dechucking parameter and an electrostatic chuck (ESC) electrical property, comprising: selecting a batch of ESCs, said batch of ESCs including a plurality of ESCs having similar material properties and geometry; determining an ESC electrical property measurement for each of said ESCs from said batch; determining a dechucking parameter for each of said ESCs, said dechucking parameter comprising a reverse voltage magnitude; correlating said ESC electrical property with said dechucking parameter for each ESC drawn from said batch of ESCs.
Claim 47
Dependent Claim
23 words
The method of claim 42 further comprising selecting at least one operating temperature for each ESC prior to determining said ESC electrical property.
Claim 48
Dependent Claim
23 words
The method of claim 42 further comprising selecting at least one operating voltage for each ESC prior to determining said ESC electrical property.
Claim 49
Dependent Claim
23 words
The method of claim 43 further comprising selecting at least one operating voltage for each ESC prior to determining said ESC electrical property.
Claim 50
Dependent Claim
16 words
The method of claim 42 wherein said ESC electrical property measurement is an ESC resistance measurement.
Claim 51
Dependent Claim
16 words
The method of claim 42 wherein said ESC electrical property measurement is an ESC current measurement.
Claim 52
Dependent Claim
16 words
The method of claim 42 wherein said ESC electrical property measurement is an ESC voltage measurement.
Claim 53
Dependent Claim
16 words
The method of claim 42 wherein said ESC electrical property measurement is an ESC capacitance measurement.
Claim 54
Dependent Claim
83 words
The method of claim 42 wherein said ESC electrical property measurement is an ESC impedance measurement. R ( T,V )= R 0 exp[( A−B√{square root over (V)} )/(273+ T )] where: I is said ESC current, T is said operating temperature in degrees Celsius, V is said operating voltage, R 0 is a fitting parameter particular to said first ESC, and A and B are fitting parameters particular to a batch of ESCs having similar material properties and geometry as said first ESC.
Claim 55
Independent Claim
93 words
A method for determining an electrostatic chuck (ESC) resistance, comprising: providing a processing chamber configured to hold a plasma; providing an ESC configured to be received by said processing chamber; setting an operating temperature for said ESC; setting an operating voltage for said ESC; generating a plasma within said processing chamber; applying said operating voltage to said ESC; and measuring an ESC current for said ESC with an ammeter operatively coupled to said ESC at said operating temperature; and calculating an ESC resistance with said measured ESC current and said ESC operating voltage.
Claim 56
Independent Claim
93 words
A method for determining an electrostatic chuck (ESC) resistance, comprising: providing a processing chamber configured to hold a plasma; providing an ESC configured to be received by said processing chamber; setting an operating temperature for said ESC; setting an operating voltage for said ESC; generating a plasma within said processing chamber; applying said operating voltage to said ESC; and measuring an ESC current for said ESC with an ammeter operatively coupled to said ESC at said operating temperature; and calculating an ESC resistance with said measured ESC current and said ESC operating voltage.
Claim 57
Dependent Claim
12 words
The method of claim 51 wherein said ESC is a monopolar ESC.
Claim 58
Dependent Claim
12 words
The method of claim 51 wherein said ESC is a bipolar ESC.
Claim 59
Dependent Claim
88 words
The method of claim 51 wherein said ESC resistance is related said operating voltage and said operating temperature according to the following relationship: R ( T,V )= R 0 exp[( A−B√{square root over (V)} )/(273+ T )] where: I is said ESC current, T is said operating temperature in degrees Celsius, V is said operating voltage, R 0 is a fitting parameter particular to said ESC, and A and B are fitting parameters particular to a batch of ESCs having similar material properties and geometry as said ESC.
Claim 60
Independent Claim
95 words
A method for determining a time period for applying a reverse voltage magnitude to release a workpiece from an electrostatic chuck (ESC), comprising: generating a clamping force to clamp said workpiece to an electrostatic chuck; estimating a first time period for applying a reverse voltage to cancel said clamping force; lifting said workpiece from said ESC; measuring a charge transfer from said workpiece during said lifting of said workpiece to said ESC with a meter; and modifying a time period for applying said reverse voltage magnitude if a current spike is detected by said meter.
Claim 61
Independent Claim
95 words
A method for determining a time period for applying a reverse voltage magnitude to release a workpiece from an electrostatic chuck (ESC), comprising: generating a clamping force to clamp said workpiece to an electrostatic chuck; estimating a first time period for applying a reverse voltage to cancel said clamping force; lifting said workpiece from said ESC; measuring a charge transfer from said workpiece during said lifting of said workpiece to said ESC with a meter; and modifying a time period for applying said reverse voltage magnitude if a current spike is detected by said meter.
Claim 62
Dependent Claim
19 words
The method of claim 55 further comprising repeating said modification until little or no said current spike is detected.
Claim 63
Independent Claim
86 words
A method for determining a reverse voltage magnitude to release a workpiece from an electrostatic chuck (ESC), comprising: generating a clamping force to clamp said workpiece to an electrostatic chuck; estimating a first time period for applying said reverse voltage magnitude to cancel said clamping force; lifting said workpiece from said ESC; measuring a charge transfer from said workpiece during said lifting of said workpiece to said ESC with a meter; and modifying said reverse voltage magnitude if a current spike is detected by said meter.
Claim 64
Independent Claim
86 words
A method for determining a reverse voltage magnitude to release a workpiece from an electrostatic chuck (ESC), comprising: generating a clamping force to clamp said workpiece to an electrostatic chuck; estimating a first time period for applying said reverse voltage magnitude to cancel said clamping force; lifting said workpiece from said ESC; measuring a charge transfer from said workpiece during said lifting of said workpiece to said ESC with a meter; and modifying said reverse voltage magnitude if a current spike is detected by said meter.
Claim 65
Dependent Claim
19 words
The method of claim 57 further comprising repeating said modification until little or no said current spike is detected.
Claim 66
Independent Claim
98 words
A method for determining a reverse voltage magnitude and time period for applying said reverse voltage magnitude to release a workpiece from an electrostatic chuck (ESC), comprising: generating a clamping force to clamp said workpiece to an electrostatic chuck; estimating a first time period for applying said reverse voltage magnitude to cancel said clamping force; lifting said workpiece from said ESC; measuring a charge transfer from said workpiece during said lifting of said workpiece to said ESC with a meter; and modifying said time period and said reverse voltage if a current spike is detected by said meter.
Claim 67
Independent Claim
98 words
A method for determining a reverse voltage magnitude and time period for applying said reverse voltage magnitude to release a workpiece from an electrostatic chuck (ESC), comprising: generating a clamping force to clamp said workpiece to an electrostatic chuck; estimating a first time period for applying said reverse voltage magnitude to cancel said clamping force; lifting said workpiece from said ESC; measuring a charge transfer from said workpiece during said lifting of said workpiece to said ESC with a meter; and modifying said time period and said reverse voltage if a current spike is detected by said meter.
Claim 68
Dependent Claim
19 words
The method of claim 59 further comprising repeating said modification until little or no said current spike is detected.
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