US5534231A — Low frequency inductive RF plasma reactor

Claim 1

Independent Claim 170 words

A plasma reactor for processing a semiconductor substrate comprising: a reactor chamber within which a plasma is generated to produce at least one plasma product for processing the semiconductor substrate; a gas source coupled to the reactor chamber to provide gas into the reactor chamber; an exhaust system coupled to the reactor chamber to exhaust gas from the reactor chamber; a first source of radio frequency power; an induction coil adjacent to the reactor chamber and coupled to said first source of radio frequency power to inductively couple power into the plasma from said first source of radio frequency power; a split Faraday shield between the induction coil and the plasma, the split Faraday shield forming at least one substantially nonconductive gap such that the induction coil inductively couples power from said first radio frequency power source through the split Faraday shield to sustain the plasma; and a support for the semiconductor substrate positioned such that the semiconductor substrate is exposed to said at least one plasma product during processing.

Claim 2

Dependent Claim 170 words

A plasma reactor for processing a semiconductor substrate comprising: a reactor chamber within which a plasma is generated to produce at least one plasma product for processing the semiconductor substrate; a gas source coupled to the reactor chamber to provide gas into the reactor chamber; an exhaust system coupled to the reactor chamber to exhaust gas from the reactor chamber; a first source of radio frequency power; an induction coil adjacent to the reactor chamber and coupled to said first source of radio frequency power to inductively couple power into the plasma from said first source of radio frequency power; a split Faraday shield between the induction coil and the plasma, the split Faraday shield forming at least one substantially nonconductive gap such that the induction coil inductively couples power from said first radio frequency power source through the split Faraday shield to sustain the plasma; and a support for the semiconductor substrate positioned such that the semiconductor substrate is exposed to said at least one plasma product during processing.

Claim 3

Dependent Claim 32 words

The plasma reactor of claim 1 wherein the split Faraday shield has plates that are movable to vary the capacitance between the plasma in the reactor chamber and said split Faraday shield.

Claim 4

Dependent Claim 56 words

The plasma reactor of claim 1 wherein: the reactor chamber has a nonconductive reactor wall; and the split Faraday shield comprises a plurality of conductive plates adjacent to said reactor wall, each plate being spaced from a neighboring plate by a gap that is smaller than the distance between said induction coil and the reactor wall.

Claim 5

Dependent Claim 36 words

A plasma reactor as in claim 1, wherein said support comprises an electrode adjacent to which the semiconductor substrate is placed for processing, further comprising a second source of radio frequency power coupled to said electrode.

Claim 6

Dependent Claim 65 words

A plasma reactor as in claim 4 wherein: said induction coil produces within the reactor chamber a magnetic field that is substantially perpendicular to said electrode, whereby, an electric field induced by time variation of the signal to said induction coil is substantially parallel to said electrode so that the induced electric field does not directly affect the potentials of the plasma and the electrode.

Claim 7

Dependent Claim 46 words

A plasma reactor as in claim 4 wherein much less radio frequency power is provided to the electrode than to the induction coil, whereby the plasma produced in said reactor chamber has an ion density that is substantially determined by the power to said induction coil.

Claim 8

Dependent Claim 37 words

A plasma reactor as in claim 6 wherein the power signal to the electrode has a peak-to-peak voltage amplitude less than 200 volts peak-to-peak, whereby this reactor is suitable for a soft etch of the semiconductor substrate.

Claim 9

Dependent Claim 91 words

A plasma reactor as in claim 2 further comprising an electrode, adjacent to which the semiconductor substrate is to be placed for processing; and a second source of radio frequency power coupled to said electrode; wherein said plates are movable over a distance such that a ratio C s1 /C s2 can be varied over a range that includes the value 1, where C s2 is the sheath capacitance between the plasma and the split Faraday shield and where C s1 is the sheath capacitance between the plasma and the electrode.

Claim 10

Dependent Claim 24 words

A plasma reactor as in claim 1 wherein the inductively coupled power is at a frequency f 1 in the range from 0.1-6 MHz.

Claim 11

Dependent Claim 81 words

A plasma reactor as in claim 4 wherein the power that is inductively coupled from the first source of radio frequency power is at a frequency f 1 and the power that is coupled from the second source of radio frequency power is at a frequency f h that is larger than f 1 and that is at least twice as large as the inverse of an average transit time for an ion to cross a plasma sheath at said electrode.

Claim 12

Dependent Claim 42 words

A plasma reactor as in claim 4 wherein the power that is coupled from the second source of radio frequency power is at a frequency f h that is selected from the set consisting of 13.56 MHz, 27.12 MHz and 40.68 MHz.

Claim 13

Dependent Claim 46 words

A plasma reactor as in claim 1 wherein the exhaust system and the gas source cooperatively produce within said chamber a pressure for which ions are produced in said plasma at a rate at least on the order of that at which free radicals are produced.

Claim 14

Dependent Claim 22 words

A plasma reactor as in claim 1 further comprising: a grounded conductive plate adjacent to a top portion of the reactor chamber.

Claim 15

Dependent Claim 47 words

A plasma reactor as in claim 1 further comprising: a reactor wall enclosing said reactor chamber; and means for producing a dc magnetic field adjacent to a top portion of the reactor wall, thereby helping constrain energetic electrons away from the top portion of the reactor wall.

Claim 16

Dependent Claim 59 words

A plasma reactor as in claim 14 wherein said means for producing a dc magnetic field adjacent to a top portion of the reactor wall comprises a plurality of permanent bar magnets arranged parallel to one another and to the top portion of the reactor wall, each magnet having its North pole oppositely directed from any nearest neighbor magnets.

Claim 17

Dependent Claim 40 words

A plasma reactor as in claim 15 further comprising: a ferromagnetic return plate which at least covers the magnets on top and provides a ferromagnetic return for magnetic field lines at the outer edges of the plurality of bar magnets.

Claim 18

Dependent Claim 98 words

A plasma reactor as in claim 14 wherein said means for producing a dc magnetic field adjacent to a top portion of the reactor wall comprises: a plurality of concentric annular magnets parallel to the top portion of the reactor wall, each magnet having its North pole oriented substantially perpendicular to the top portion of the reactor wall and oppositely directed from any nearest neighbor magnets; and a ferromagnetic return plate which at least covers the magnets on top and provides a ferromagnetic return for magnetic field lines at the outer edges of the plurality of annular magnets.

Claim 19

Dependent Claim 44 words

A plasma reactor as in claim 14 wherein said means for producing a dc magnetic field adjacent to a top portion of the reactor wall comprises a disk magnet having it North pole oriented substantially perpendicular to the top portion of the reactor wall.

Claim 20

Dependent Claim 48 words

A plasma reactor as in claim 14 wherein said means for producing a dc magnetic field adjacent to a top portion of the reactor wall comprises a dc electromagnetic producing a magnetic field having its North pole oriented substantially perpendicular to the top portion of the reactor wall.

Claim 21

Dependent Claim 40 words

A plasma reactor as in claim 4 further comprising: a dc power source; and a coil encircling the reactor chamber and connected to the dc power source to produce a dc magnetic field that is substantially perpendicular to said electrode.

Claim 22

Independent Claim 103 words

A method of processing a semiconductor substrate in a plasma reactor comprising the steps of: supplying gas to a reaction chamber; shielding the gas in the reaction chamber with a split Faraday shield, the split Faraday shield forming at least one substantially nonconductive gap to allow the passage of inductively coupled power into the gas in the reaction chamber; inductively coupling power into the gas through said split Faraday shield to sustain a plasma in the reaction chamber; forming at least one plasma product for processing the semiconductor substrate; and exposing the semiconductor substrate to said at least one plasma product for processing.

Claim 23

Independent Claim 103 words

A method of processing a semiconductor substrate in a plasma reactor comprising the steps of: supplying gas to a reaction chamber; shielding the gas in the reaction chamber with a split Faraday shield, the split Faraday shield forming at least one substantially nonconductive gap to allow the passage of inductively coupled power into the gas in the reaction chamber; inductively coupling power into the gas through said split Faraday shield to sustain a plasma in the reaction chamber; forming at least one plasma product for processing the semiconductor substrate; and exposing the semiconductor substrate to said at least one plasma product for processing.

Claim 24

Dependent Claim 22 words

A method as in claim 21, further comprising the step of: adjusting the spacing of the split Faraday shield from the plasma.

Claim 25

Dependent Claim 26 words

A method as in claim 21, further comprising the step of: magnetically reflecting electrons within the reaction chamber away from a top of the reaction chamber.

Claim 26

Dependent Claim 18 words

A method as in claim 21 further comprising the step of: capacitively coupling power into the reaction chamber.

Claim 27

Independent Claim 130 words

A method of processing a wafer in a plasma reactor, said method comprising the steps of: supplying gas to a reaction chamber enclosed by nonconductive walls; exhausting gas from the reaction chamber; inductively coupling power into the reaction chamber; capacitively coupling power into the reaction chamber via an electrode having a capacitance C electrode to a plasma within the reaction chamber; shielding the reactor with a split Faraday shield that encircles the reaction chamber and that produces a capacitance C wall between the plasma and the combination of the split Faraday shield and the nonconductive wall; and adjusting the spacing of the split Faraday shield from the nonconductive wall over a range that produces a ratio C electrode /C wall that varies over a range that includes the value 1.

Claim 28

Independent Claim 130 words

A method of processing a wafer in a plasma reactor, said method comprising the steps of: supplying gas to a reaction chamber enclosed by nonconductive walls; exhausting gas from the reaction chamber; inductively coupling power into the reaction chamber; capacitively coupling power into the reaction chamber via an electrode having a capacitance C electrode to a plasma within the reaction chamber; shielding the reactor with a split Faraday shield that encircles the reaction chamber and that produces a capacitance C wall between the plasma and the combination of the split Faraday shield and the nonconductive wall; and adjusting the spacing of the split Faraday shield from the nonconductive wall over a range that produces a ratio C electrode /C wall that varies over a range that includes the value 1.

Claim 29

Dependent Claim 44 words

A method as in claim 24 wherein the inductively coupled power is provided at a frequency in the range 0.1-6 MHz and the capacitively coupled power is provided at a frequency selected from the set consisting of 13.56 MHz, 27.12 MHz and 40.68 MHz.

Claim 30

Dependent Claim 37 words

A method as in claim 21 further comprising the step of: producing a dc magnetic field within the reaction chamber in a direction substantially perpendicular to an electrode utilized to capacitively couple power into said reaction chamber.

Claim 31

Dependent Claim 39 words

A method as in claim 21 further comprising the step of exhausting gas from the reaction chamber, wherein said steps of supplying gas and exhausting gas produce within said reaction chamber a pressure in the range from 1-30 milliTorr.

Claim 32

Dependent Claim 26 words

The plasma reactor of claim 1 wherein said reactor has a height and a cylindrical lateral cross-section having a diameter that is greater than said height.

Claim 33

Dependent Claim 28 words

The plasma reactor of claim 1 wherein said split Faraday shield comprises plates that are moveable to vary the capacitance between the plasma and said split Faraday shield.

Claim 34

Dependent Claim 37 words

The plasma reactor of claim 1 wherein said split Faraday shield comprises a plurality of conductive plates of substantially equal size disposed externally about said plasma, each plate being spaced from a neighboring plate by a gap.

Claim 35

Dependent Claim 14 words

The plasma reactor of claim 1 wherein the induction coil encircles the reactor chamber.

Claim 36

Dependent Claim 32 words

The plasma reactor of claim 1, further comprising a nonconductive reactor wall enclosing the reactor chamber wherein the split Faraday shield and the induction coil are external to said nonconductive reactor wall.

Claim 37

Dependent Claim 56 words

The plasma reactor of claim 1, wherein the induction coil produces a magnetic field having a direction and the gap formed by said split Faraday shield is substantially parallel to the direction of the magnetic field such that the gap substantially prevents the inducement of a current in the split Faraday shield by said magnetic field.

Claim 38

Dependent Claim 22 words

A plasma reactor as in claim 1 wherein the plasma in the reactor chamber has a pressure of greater than 1 milliTorr.

Claim 39

Dependent Claim 20 words

A plasma reactor as in claim 4, wherein: said split Faraday shield acts as a counter electrode to said electrode.

Claim 40

Dependent Claim 17 words

A plasma reactor as in claim 36, wherein: said Faraday shield is grounded relative to said electrode.

Claim 41

Dependent Claim 34 words

A plasma reactor as in claim 36, wherein: said Faraday shield and said electrode each have an area, and the area of the Faraday shield is substantially larger than the area of the electrode.

Claim 42

Dependent Claim 18 words

The plasma reactor of claim 1, wherein said split Faraday shield is grounded relative to said induction coil.

Claim 43

Dependent Claim 20 words

The plasma reactor of claim 1, wherein said split Faraday shield is direct current grounded relative to said induction coil.

Claim 44

Dependent Claim 20 words

The plasma reactor of claim 1, wherein said split Faraday shield is radio frequency grounded relative to said induction coil.

Claim 45

Dependent Claim 66 words

A plasma reactor as in claim 1, wherein: the induction coil produces within the reactor chamber a magnetic field that is substantially perpendicular to the support, whereby an electric field induced by the time variation of the signal to the induction coil is substantially parallel to the support so that the induced electric field does not substantially affect the potentials of the plasma and the support.

Claim 46

Dependent Claim 13 words

The plasma reactor of claim 1, wherein the workpiece is a semiconductor wafer.

Claim 47

Dependent Claim 13 words

The plasma reactor of claim 4, wherein the workpiece is a semiconductor wafer.

Claim 48

Dependent Claim 28 words

The plasma reactor of claim 1, wherein the at least one plasma product is selected from the group consisting of ions, free electrons, neutral radicals, and excited molecules.

Claim 49

Dependent Claim 20 words

The plasma reactor of claim 1, wherein the plasma has a potential modulation on the order of 20 volts peak-to-peak.

Claim 50

Dependent Claim 19 words

The plasma reactor of claim 1, wherein the plasma has a potential modulation no greater than 20 volts peak-to-peak.

Claim 51

Dependent Claim 22 words

The plasma reactor of claim 1, wherein the at least one nonconductive gap has a width on the order of 1 cm.

Claim 52

Dependent Claim 144 words

A plasma reactor for processing a semiconductor substrate comprising: a reactor chamber within which a plasma is generated to produce at least one plasma product for processing the semiconductor substrate; a first source of radio frequency power; an induction coil adjacent to the reactor chamber and coupled to the first source of radio frequency power to inductively couple power into the plasma from the first source of radio frequency power; a split Faraday shield between the induction coil and the plasma, the split Faraday shield forming a plurality of substantially nonconductive gaps such that the induction coil couples power from the first source of radio frequency power through the split Faraday shield to sustain the plasma in the reactor chamber; and a support for the semiconductor substrate positioned such that the semiconductor substrate is exposed to the at least one plasma product during processing.

Claim 53

Dependent Claim 144 words

A plasma reactor for processing a semiconductor substrate comprising: a reactor chamber within which a plasma is generated to produce at least one plasma product for processing the semiconductor substrate; a first source of radio frequency power; an induction coil adjacent to the reactor chamber and coupled to the first source of radio frequency power to inductively couple power into the plasma from the first source of radio frequency power; a split Faraday shield between the induction coil and the plasma, the split Faraday shield forming a plurality of substantially nonconductive gaps such that the induction coil couples power from the first source of radio frequency power through the split Faraday shield to sustain the plasma in the reactor chamber; and a support for the semiconductor substrate positioned such that the semiconductor substrate is exposed to the at least one plasma product during processing.

Claim 54

Dependent Claim 19 words

The plasma reactor of claim 49, wherein the plurality of gaps are arranged substantially symmetrically about the reactor chamber.

Claim 55

Dependent Claim 37 words

The plasma reactor of claim 49, wherein the split Faraday shield forms at least four substantially nonconductive gaps such that the induction coil couples power from the first source of radio frequency power into the reactor chamber.

Claim 56

Dependent Claim 56 words

The plasma reactor of claim 49, wherein the area of the split Faraday shield and a distance between the split Faraday shield and the plasma are selected such that the capacitive impedance between the plasma and the split Faraday shield is less than the capacitive impedance between the plasma and any source of radio frequency power.

Claim 57

Dependent Claim 73 words

The plasma reactor of claim 49, further comprising at least one source of capacitively coupled radio frequency power; wherein the area of the split Faraday shield and a distance between the split Faraday shield and the plasma are selected such that the capacitive impedance between the plasma and the split Faraday shield is less than the capacitive impedance between the plasma and the at least one source of capacitively coupled radio frequency power.

Claim 58

Dependent Claim 41 words

The plasma reactor of claim 53, wherein the capacitive impedance between the plasma and the split Faraday shield is several times less than the capacitive impedance between the plasma and the at least one source of capacitively coupled radio frequency power.

Claim 59

Dependent Claim 54 words

The plasma reactor of claim 54, wherein: the at least one source of capacitively coupled power is a second source of radio frequency power coupled to the support; the at least one plasma product is ions; and the source of capacitively coupled radio frequency power accelerates the ions toward the semiconductor substrate during processing.

Claim 60

Dependent Claim 101 words

The plasma reactor of claim 49, further comprising a source of capacitively coupled power for said plasma, wherein: the source of capacitively coupled power acts as an effective cathode relative to the plasma; the split Faraday shield acts as an effective anode relative to the plasma; and the area of the effective anode is much greater than the area of the effective cathode such that the ratio C s2 /C s1 is at least 10, where C s2 is the capacitance between the plasma and the effective anode and C s1 is the capacitance between the plasma and the effective cathode.

Claim 61

Dependent Claim 57 words

The plasma reactor of claim 49, wherein the semiconductor substrate is susceptible to damage from bombardment of ions from the plasma, and wherein the split Faraday shield reduces the damage to the semiconductor substrate from the bombardment of the ions relative to a level of damage that would exist in the absence of the split Faraday shield.

Claim 62

Dependent Claim 65 words

The plasma reactor of claim 49, wherein the semiconductor substrate is susceptible to damage from bombardment of high energy ions having impact energy of at least 100 electron volts and wherein the split Faraday shield substantially reduces the bombardment of the semiconductor substrate by the high energy ions relative to a level of bombardment that would exist in the absence of the split Faraday shield.

Claim 63

Dependent Claim 32 words

The plasma reactor of claim 1, wherein the split Faraday shield substantially eliminates bombardment of the semiconductor substrate by high energy ions having an impact energy of at least 100 electron volts.

Claim 64

Dependent Claim 26 words

The plasma reactor of claim 49, wherein an average direct current potential of the plasma is no greater than 30 volts relative to the semiconductor substrate.

Claim 65

Dependent Claim 19 words

The plasma reactor of claim 49, wherein the plasma has a potential modulation no greater than 20 volts peak-to-peak.

Claim 66

Dependent Claim 30 words

The plasma reactor of claim 49, wherein the plasma has a potential no greater than 20 volts plus an offset on the order of kT e /e relative to ground.

Claim 67

Dependent Claim 33 words

The plasma reactor of claim 49, wherein the plasma has an average direct current potential no greater than 10 volts plus an offset on the order of kT e /e relative to ground.

Claim 68

Dependent Claim 20 words

The plasma reactor of claim 49, wherein the plasma has a potential modulation on the order of 20 volts peak-to-peak.

Claim 69

Dependent Claim 70 words

The plasma reactor of claim 49, wherein the induction coil has a first end and a second end coupled to the first source of radio frequency power; and wherein the first source of radio frequency power drives current through the induction coil between the first end and the second end such that the induction coil non-resonantly couples power from the first source of radio frequency power into the reactor chamber.

Claim 70

Dependent Claim 69 words

The plasma reactor of claim 49, wherein the induction coil produces a magnetic field having a direction and the gaps formed by the split Faraday shield are substantially parallel to the direction of the magnetic field such that the gaps substantially prevent the inducement of a circumferential current in the split Faraday shield by the magnetic field that would prevent the inductive coupling of power into the reactor chamber.

Claim 71

Dependent Claim 65 words

The plasma reactor of claim 49, wherein the induction coil produces within the reactor chamber a magnetic field that is substantially perpendicular to the support, whereby, an electric field induced by the time variation of the signal to the induction coil is substantially parallel to the support so that the induced electric field does not substantially affect the potentials of the plasma and the support.

Claim 72

Dependent Claim 68 words

The plasma reactor of claim 49, wherein: the reactor chamber has a radius; the first source of radio frequency power has a frequency and a power; and the radius of the reactor chamber, and the frequency and the power of the first source of radio frequency power are selected to produce an electric field within the reactor chamber having a peak-to-peak amplitude on the order of 10 volts/cm.

Claim 73

Dependent Claim 71 words

The plasma reactor of claim 49, wherein: the reactor chamber has a radius; the first source of radio frequency power has a frequency and a power; and the radius of the reactor chamber, and the frequency and the power of the first source of radio frequency power are selected to produce an electric field within the reactor chamber having a peak-to-peak amplitude in the range of from 1 to 10 volts/cm.

Claim 74

Dependent Claim 13 words

The plasma reactor of claim 49, wherein the split Faraday shield is grounded.

Claim 75

Dependent Claim 20 words

The plasma reactor of claim 49, wherein the split Faraday shield is radio frequency grounded relative to the induction coil.

Claim 76

Dependent Claim 32 words

The plasma reactor of claim 49, further comprising a nonconductive reactor wall enclosing the reactor chamber wherein the split Faraday shield and the induction coil are external to the nonconductive reactor wall.

Claim 77

Dependent Claim 35 words

The plasma reactor of claim 49, wherein the support comprises an electrode adjacent to which the semiconductor substrate is placed for processing, further comprising a second source of radio frequency power coupled to the electrode.

Claim 78

Dependent Claim 27 words

The plasma reactor of claim 73, wherein said at least one plasma product is ions and the electrode accelerates the ions toward the semiconductor substrate during processing.

Claim 79

Dependent Claim 36 words

The plasma reactor of claim 49, further comprising a reactor wall enclosing the reactor chamber wherein the width of each of the gaps is smaller than the distance between the induction coil and the reactor wall.

Claim 80

Dependent Claim 22 words

The plasma reactor of claim 49, wherein each of the substantially nonconductive gaps has a width on the order of 1 cm.

Claim 81

Dependent Claim 21 words

The plasma reactor of claim 49, wherein each of the substantially nonconductive gaps has a width no greater than 1 cm.

Claim 82

Dependent Claim 20 words

The plasma reactor of claim 49, wherein the plasma is maintained at a pressure greater than 1 milliTorr during processing.

Claim 83

Dependent Claim 120 words

The plasma reactor of claim 65, wherein the induction coil produces a magnetic field having a direction and the gaps formed by the split Faraday shield are substantially parallel to the direction of the magnetic field such that the gaps substantially prevent the inducement of a circumferential current in the split Faraday shield by the magnetic field that would prevent the inductive coupling of power into the reactor chamber; and wherein the magnetic field is substantially perpendicular to the support, whereby, an electric field induced by the time variation of the signal to the induction coil is substantially parallel to the support so that the induced electric field does not substantially affect the potentials of the plasma and the support.

Claim 84

Dependent Claim 104 words

The plasma reactor of claim 79, further comprising a nonconductive reactor wall enclosing the reactor chamber, wherein: the split Faraday shield and the induction coil are external to the nonconductive reactor wall; the semiconductor substrate is susceptible to damage from bombardment of ions from the plasma, and wherein the split Faraday shield reduces the damage to the semiconductor substrate from the bombardment of the ions relative to a level of damage that would exist in the absence of the split Faraday shield; and the width of each of the gaps is smaller than the distance between the induction coil and the nonconductive reactor wall.

Claim 85

Dependent Claim 36 words

The plasma reactor of claim 60, further comprising a reactor wall enclosing the reactor chamber wherein the width of each of the gaps is smaller than the distance between the induction coil and the reactor wall.

Claim 86

Dependent Claim 56 words

The plasma reactor of claim 60, wherein the area of the split Faraday shield and a distance between the split Faraday shield and the plasma are selected such that the capacitive impedance between the plasma and the split Faraday shield is less than the capacitive impedance between the plasma and any source of radio frequency power.

Claim 87

Dependent Claim 77 words

The plasma reactor of claim 60, further comprising at least one source of capacitively coupled radio frequency power; wherein the area of the split Faraday shield and a distance between the split Faraday shield and the plasma are selected such that the capacitive impedance between the plasma and the split Faraday shield is at least ten times less than the capacitive impedance between the plasma and the at least one source of capacitively coupled radio frequency power.

Claim 88

Dependent Claim 70 words

The plasma reactor of claim 83, wherein the induction coil has a first end and a second end coupled to the first source of radio frequency power; and wherein the first source of radio frequency power drives current through the induction coil between the first end and the second end such that the induction coil non-resonantly couples power from the first source of radio frequency power into the reactor chamber.

Claim 89

Dependent Claim 90 words

The plasma reactor of claim 84, further comprising a nonconductive reactor wall enclosing the reactor chamber wherein the split Faraday shield and the induction coil are external to the nonconductive reactor wall and wherein: the split Faraday shield is grounded; and the semiconductor substrate is susceptible to damage from bombardment of ions from the plasma, and wherein the split Faraday shield reduces the damage to the semiconductor substrate from bombardment of the ions relative to a level of damage that would exist in the absence of the split Faraday shield.

Claim 90

Dependent Claim 28 words

The plasma reactor of claim 85, wherein the width of each of the gaps is smaller than the distance between the induction coil and the nonconductive reactor wall.

Claim 91

Dependent Claim 35 words

The plasma reactor of claim 85, wherein the support comprises an electrode adjacent to which the semiconductor substrate is placed for processing, further comprising a second source of radio frequency power coupled to the electrode.

Claim 92

Dependent Claim 94 words

A plasma reactor for processing a semiconductor wafer comprising: a nonconductive reactor wall enclosing a reactor chamber within which a plasma is generated to produce at least one plasma product for processing said semiconductor wafer; power means for providing capacitive and inductive power; shield means external to the reactor chamber for substantially blocking the capacitive power from the power means from reaching the reactor chamber while permitting the inductive power from the power means to reach the reactor chamber; means for exposing the semiconductor wafer to the at least one plasma product during processing.

Claim 93

Dependent Claim 94 words

A plasma reactor for processing a semiconductor wafer comprising: a nonconductive reactor wall enclosing a reactor chamber within which a plasma is generated to produce at least one plasma product for processing said semiconductor wafer; power means for providing capacitive and inductive power; shield means external to the reactor chamber for substantially blocking the capacitive power from the power means from reaching the reactor chamber while permitting the inductive power from the power means to reach the reactor chamber; means for exposing the semiconductor wafer to the at least one plasma product during processing.

Claim 94

Dependent Claim 17 words

The plasma reactor of claim 88, further comprising means for accelerating charged particles toward the semiconductor wafer.

Claim 95

Dependent Claim 20 words

The plasma reactor of claim 88, further comprising means for varying the capacitance between said shield means and the plasma.

Claim 96

Dependent Claim 12 words

The method of claim 21, wherein the workpiece is a semiconductor wafer.

Claim 97

Dependent Claim 30 words

The method of claim 21, further comprising the step of maintaining an average direct current potential of the plasma at no greater than 30 volts relative to the semiconductor substrate.

Claim 98

Dependent Claim 31 words

The method of claim 21, further comprising the step of: maintaining the potential of the plasma such that a modulation of the plasma potential is no greater than 20 volts peak-to-peak.

Claim 99

Dependent Claim 35 words

The method of claim 21, further comprising the step of maintaining the potential of the plasma at no greater than 20 volts plus an offset on the order of kT e /e relative to ground.

Claim 100

Dependent Claim 57 words

The method of claim 21, further comprising the steps of: capacitively coupling power into the plasma through a capacitance C s1 ; and capacitively coupling power from the plasma to ground through a capacitance C s2 between the plasma and the split Faraday shield; wherein the capacitance C s1 is less than the capacitance C s2 .

Claim 101

Dependent Claim 22 words

The method of claim 95, wherein the capacitance C s1 is at least ten times less than the capacitance C s2 .

Claim 102

Dependent Claim 45 words

The method of claim 21, wherein the step of forming the at least one plasma product further comprises the step of: using the inductively coupled power to produce an electric field within the reaction chamber having a peak-to-peak amplitude on the order of 10 volts/cm.

Claim 103

Dependent Claim 42 words

The method of claim 21, wherein the step of forming the at least one plasma product further comprises the step of: using the inductively coupled power to produce an electric field within the reaction chamber that is substantially parallel to the workpiece.

Claim 104

Dependent Claim 17 words

The method of claim 21, wherein the inductively coupled power is coupled non-resonantly into the reactor chamber.

Claim 105

Dependent Claim 64 words

The method of claim 21, wherein the semiconductor substrate is susceptible to damage from bombardment of ions, further comprising the step of: using the split Faraday shield to block sufficient capacitive power such that the damage to the semiconductor substrate from bombardment of the ions is reduced relative to a level of damage that would exist in the absence of the split Faraday shield.

Claim 106

Dependent Claim 18 words

The method of claim 24, wherein the capacitively coupled power causes ions to accelerate toward the semiconductor substrate.

Claim 107

Dependent Claim 21 words

The method of claim 21, further comprising the step of varying the capacitance between the split Faraday shield and the plasma.

Claim 108

Dependent Claim 32 words

The method of claim 21, further comprising the step of varying the capacitance between the split Faraday shield and the plasma relative to the capacitance between the semiconductor substrate and the plasma.

Claim 109

Dependent Claim 145 words

A plasma reactor comprising: a reactor chamber within which a plasma is generated; means for coupling said reactor chamber to a gas source to provide gas to the reactor chamber; means for coupling said reactor chamber to an exhaust system to exhaust gas from the reactor chamber; a first source of radio frequency power; an induction coil surrounding at least part of the plasma and coupled to said first source of radio frequency power to inductively couple power into the plasma from said first radio frequency power source; an electrode, adjacent to which a wafer is to be placed for processing; a second source of radio frequency power coupled to said electrode; and a counter electrode to said electrode, said counter electrode being external to the reactor chamber; wherein said counter electrode is movable to vary the capacitance between the plasma and the counter electrode.

Claim 110

Dependent Claim 145 words

A plasma reactor comprising: a reactor chamber within which a plasma is generated; means for coupling said reactor chamber to a gas source to provide gas to the reactor chamber; means for coupling said reactor chamber to an exhaust system to exhaust gas from the reactor chamber; a first source of radio frequency power; an induction coil surrounding at least part of the plasma and coupled to said first source of radio frequency power to inductively couple power into the plasma from said first radio frequency power source; an electrode, adjacent to which a wafer is to be placed for processing; a second source of radio frequency power coupled to said electrode; and a counter electrode to said electrode, said counter electrode being external to the reactor chamber; wherein said counter electrode is movable to vary the capacitance between the plasma and the counter electrode.

Claim 111

Dependent Claim 25 words

The plasma reactor of claim 1, wherein said split Faraday shield comprises at least four radio frequency grounded conductive plates disposed externally about said plasma.

Claim 112

Dependent Claim 24 words

The plasma reactor of claim 1, wherein said split Faraday shield comprises a plurality of conductive shield sections that are each radio frequency grounded.

Claim 113

Dependent Claim 24 words

The plasma reactor of claim 70, wherein said split Faraday shield comprises a plurality of conductive shield sections that are each radio frequency grounded.

Claim 114

Dependent Claim 37 words

The plasma reactor of claim 1, wherein the reactor chamber has a nonconductive wall and said split Faraday shield is much closer to the nonconductive wall than to the induction coil during processing of the semiconductor substrate.

Claim 115

Dependent Claim 37 words

The plasma reactor of claim 4, wherein the reactor chamber has a nonconductive wall and said split Faraday shield is much closer to the nonconductive wall than to the induction coil during processing of the semiconductor substrate.

Claim 116

Dependent Claim 107 words

The plasma reactor of claim 1, wherein: the semiconductor substrate comprises a semiconductor wafer having a surface with a layer of polysilicon over a thin underlying layer of oxide insulator; the induction coil couples sufficient power into the plasma to produce a high ion density in the plasma; and the split Faraday shield substantially reduces the level of capacitive modulation of the plasma potential relative to a level of capacitive modulation that would be present in the absence of the split Faraday shield such that ions from the plasma controllably etch the polysilicon at a high rate without substantially damaging the thin underlying layer of oxide insulator.

Claim 117

Dependent Claim 116 words

The plasma reactor of claim 4, wherein: the semiconductor substrate comprises a semiconductor wafer having a surface with a layer of polysilicon over a thin underlying layer of oxide insulator; the induction coil couples sufficient power into the plasma to produce a high ion density in the plasma; and the split Faraday shield substantially reduces the level of capacitive modulation of the plasma potential relative to a level of capacitive modulation that would be present in the absence of the split Faraday shield such that the second source of radio frequency power controllably accelerates ions from the plasma to etch the polysilicon at a high rate without substantially damaging the thin underlying layer of oxide insulator.

Claim 118

Dependent Claim 23 words

The plasma reactor of claim 111, wherein the ion current density at the semiconductor wafer is greater than a few milliamps/cm 2 .

Claim 119

Dependent Claim 96 words

The method of claim 21 wherein: the semiconductor substrate includes a surface layer of polysilicon and a thin underlying layer of oxide insulator; the step of exposing the semiconductor substrate to said at least one plasma product further comprises the step of etching the surface layer of polysilicon using the at least one plasma product; and the step of shielding the gas further comprises the step of controlling the energy of the at least one plasma product such that the surface layer of polysilicon is etched without substantially damaging the thin underlying layer of oxide insulator.

Claim 120

Dependent Claim 192 words

A plasma reactor comprising: a reactor chamber within which a plasma is generated; means for coupling said reactor chamber to a gas source to provide gas to the reactor chamber; means for coupling said reactor chamber to an exhaust system to exhaust gas from the reactor chamber; a first source of radio frequency power; an induction coil surrounding at least part of the plasma and coupled to said first source of radio frequency power to inductively couple power into the plasma from said first radio frequency power source; an electrode, adjacent to which a wafer is to be placed for processing; a second source of radio frequency power coupled to said electrode; and a counter electrode to said electrode, said counter electrode being external to the reactor chamber; wherein the relative areas of the electrode and the counter electrode, and a distance between the counter electrode and the plasma are selected such that the ratio C s2 /C s1 is at least 10, where C s2 is the sheath capacitance between a plasma body and the counter electrode and C s1 is the sheath capacitance between the plasma body and the electrode.

Claim 121

Dependent Claim 192 words

A plasma reactor comprising: a reactor chamber within which a plasma is generated; means for coupling said reactor chamber to a gas source to provide gas to the reactor chamber; means for coupling said reactor chamber to an exhaust system to exhaust gas from the reactor chamber; a first source of radio frequency power; an induction coil surrounding at least part of the plasma and coupled to said first source of radio frequency power to inductively couple power into the plasma from said first radio frequency power source; an electrode, adjacent to which a wafer is to be placed for processing; a second source of radio frequency power coupled to said electrode; and a counter electrode to said electrode, said counter electrode being external to the reactor chamber; wherein the relative areas of the electrode and the counter electrode, and a distance between the counter electrode and the plasma are selected such that the ratio C s2 /C s1 is at least 10, where C s2 is the sheath capacitance between a plasma body and the counter electrode and C s1 is the sheath capacitance between the plasma body and the electrode.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1999-07-09	2000-01-08	2000-07-09	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2003-07-09	2004-01-08	2004-07-09	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2007-07-09	2008-01-08	2008-07-09	$7700.00	Window Closed / Lapsed

Low frequency inductive RF plasma reactor

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