US5770098A
Expired / Lapsed
US
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Etching process
Assignee: Tokyo Electron Ltd
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Filing: 1994-03-16
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Granted: 1998-06-23
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Expires: 2014-03-16
Abstract
Abstract In order to etch an object to be processed, such as a semiconductor wafer, the object to be processed is placed in a vacuum processing chamber, an etching gas is introduced into the vacuum processing chamber, and electrical power is applied to a pair of electrodes within the vacuum processing chamber by a high-frequency electrical power source. A mixed gas of carbon monoxide and a gas which does not contain hydrogen and which contains at least one element from the group IV elements and at least one element from group VII elements is used as the etching gas. A halogenated carbon gas, typically a fluorocarbon such as C 4 F 8 , is used as the gas containing elements from the group IV and group VII elements. The concentration of carbon monoxide in the etching gas could be 50% or more. At least approximately 86% of an inert gas, such as argon, xenon, krypton, or N 2 and O 2 could be added to the etching gas. Use of the above etching gas enables a high etching selectivity and prevents the formation of fences.
Inventors
- 👤 Yoichi Araki
- 👤 Koichiro Inazawa
- 👤 Sachiko Furuya
- 👤 Masahiro Ogasawara
- 👤 Chishio Koshimizu
- 👤 Tiejun Song
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:34
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
171 words
An etching process comprising the steps of: placing an object to be processed in a processing chamber, creating a vacuum within said processing chamber, introducing a gas mixture into said processing chamber and subjecting said object to be processed to etching, and wherein said gas mixture consists essentially of an etching gas of a mixture of carbon monoxide and a gas which is free from hydrogen and which contains an element from the group IV elements and an element from the group VII elements, the carbon monoxide having a concentration in the etching gas of at least 50%, but less than 100%, wherein a selectivity of an oxide layer is high with respect to a substrate layer for a plurality of different substrates and said high selectivity is based on a comparison with said process when carried out using a hydrogen-containing gas, wherein the formation of fences is prevented; a quantity of an inert gas equal to or more than approximately 86% of the etching gas; and a gas containing oxygen.
Claim 2
Dependent Claim
171 words
An etching process comprising the steps of: placing an object to be processed in a processing chamber, creating a vacuum within said processing chamber, introducing a gas mixture into said processing chamber and subjecting said object to be processed to etching, and wherein said gas mixture consists essentially of an etching gas of a mixture of carbon monoxide and a gas which is free from hydrogen and which contains an element from the group IV elements and an element from the group VII elements, the carbon monoxide having a concentration in the etching gas of at least 50%, but less than 100%, wherein a selectivity of an oxide layer is high with respect to a substrate layer for a plurality of different substrates and said high selectivity is based on a comparison with said process when carried out using a hydrogen-containing gas, wherein the formation of fences is prevented; a quantity of an inert gas equal to or more than approximately 86% of the etching gas; and a gas containing oxygen.
Claim 3
Dependent Claim
16 words
An etching process according to claim 1, wherein said gas containing oxygen is O 2 .
Claim 4
Dependent Claim
31 words
An etching process according to claim 1, wherein said gas containing an element from the group IV elements and an element from the group VII elements is a halogenated carbon gas.
Claim 5
Dependent Claim
36 words
An etching process according to claim 3, wherein said halogenated carbon gas is selected from a group consisting of saturated fluorocarbon gases, nonsaturated fluorocarbon gases, saturated hybrid halogenated carbon gases, and nonsaturated hybrid halogenated carbon gases.
Claim 6
Dependent Claim
25 words
An etching process according to claim 3, wherein said halogenated carbon gas is a gas having the formula C x F y , where y≦2x+2.
Claim 7
Dependent Claim
18 words
An etching process according to claim 3, wherein said halogenated carbon gas is C 4 F 8 .
Claim 8
Dependent Claim
25 words
An etching process according to claim 1, wherein the concentration of carbon monoxide in said etching gas is at least 75% but less than 100%.
Claim 9
Dependent Claim
20 words
An etching process according to claim 1, wherein the volume of said gas containing oxygen is 10 sccm or less.
Claim 10
Dependent Claim
69 words
An etching process according to claim 1, further including the steps of: generating a helicon wave by an alternating-current electric field and a magnetic field by high-frequency electrical power; generating a plasma using energy from said helicon wave; performing the etching on said object to be processed in an environment containing said plasma; and generating an electronic cyclotron resonance region in a vicinity of said object to be processed.
Claim 11
Dependent Claim
22 words
An etching process according to claim 9, wherein said electronic cyclotron resonance region is generated by an auxiliary magnetic field generation means.
Claim 12
Dependent Claim
22 words
An etching process according to claim 9, wherein said electronic cyclotron resonance region is generated by an auxiliary magnetic field generation means.
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