Patent US5814527A successfully refreshed from Google Patents.
US5814527A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making small pores defined by a disposable internal spacer for use in chalcogenide memories
Assignee: Round Rock Research LLC
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Filing: 1996-07-22
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Granted: 1998-09-29
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Expires: 2016-07-22
Abstract
Abstract A method for fabricating an ultra-small pore or contact for use in chalcogenide memory cells specifically and in semiconductor devices generally in which disposable spacers are utilized to fabricate ultra-small pores or contacts. The pores thus defined have minimum lateral dimensions ranging from approximately 500 to 4000 Angstroms. The pores thus defined may then be used to fabricate a chalcogenide memory cell or other semiconductor devices.
Inventors
- 👤 Graham R. Wolstenholme
- 👤 Steven T. Harshfield
- 👤 Raymond A. Turi
- 👤 Fernando Gonzalez
- 👤 Guy T. Blalock
- 👤 Donwon Park
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:56
CPC Classifications
H; H10; H10N; H10N70/00; H10N70/011; H10N70/061; H10N70/068; H10N70/20; H10N70/231; H10N70/801; H10N70/821; H10N70/826; H10N70/828; H10N70/881; H10N70/882; H10N70/8828
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
93 words
A method of fabricating a pore, comprising: applying a layer of a first material onto a substrate material; forming an edge feature in said layer of said first material; applying a layer of a second material onto said edge feature of said layer of said first material; applying a layer of a third material onto said layer of said second material; removing a portion of said layer of said third material; and removing a portion of said layer of said second material to define a pore in said layer of said second material.
Claim 2
Independent Claim
93 words
A method of fabricating a pore, comprising: applying a layer of a first material onto a substrate material; forming an edge feature in said layer of said first material; applying a layer of a second material onto said edge feature of said layer of said first material; applying a layer of a third material onto said layer of said second material; removing a portion of said layer of said third material; and removing a portion of said layer of said second material to define a pore in said layer of said second material.
Claim 3
Dependent Claim
39 words
The method of claim 1, wherein forming an edge feature in said layer of said first material comprises removing a portion of said layer of said first material to define an opening in said layer of said first material.
Claim 4
Dependent Claim
13 words
The method of claim 2, wherein said opening extends to said substrate material.
Claim 5
Dependent Claim
36 words
The method of claim 1, wherein removing a portion of said third material comprises: removing a portion of said layer of said third material to define a remaining portion of said layer of said third material.
Claim 6
Dependent Claim
51 words
The method of claim 4, wherein removing a portion of said layer of said second material to define a pore in said layer of said second material comprises removing a portion of said layer of said second material not covered by said remaining portion of said layer of said third material.
Claim 7
Dependent Claim
18 words
The method of claim 5, further comprising removing said remaining portion of said layer of said third material.
Claim 8
Independent Claim
106 words
A method of fabricating a pore, comprising: applying a layer of a first material onto a substrate material; applying a layer of a second material onto said layer of said first material; forming an edge feature in said layer of said second material; forming an edge feature in said layer of said first material; applying a layer of a third material onto said edge features of said layers of said first and second materials; removing a portion of said layer of said third material; and removing a portion of said layer of said first material to define a pore in said layer of said first material.
Claim 9
Independent Claim
106 words
A method of fabricating a pore, comprising: applying a layer of a first material onto a substrate material; applying a layer of a second material onto said layer of said first material; forming an edge feature in said layer of said second material; forming an edge feature in said layer of said first material; applying a layer of a third material onto said edge features of said layers of said first and second materials; removing a portion of said layer of said third material; and removing a portion of said layer of said first material to define a pore in said layer of said first material.
Claim 10
Dependent Claim
39 words
The method of claim 7, wherein forming an edge feature in said layer of said second material comprises removing a portion of said layer of said second material to define an opening in said layer of said second material.
Claim 11
Dependent Claim
16 words
The method of claim 8, wherein said opening extends to said layer of said first material.
Claim 12
Dependent Claim
39 words
The method of claim 7, wherein removing a portion of said layer of said third material comprises: removing a portion of said layer of said third material to define a remaining portion of said layer of said third material.
Claim 13
Dependent Claim
51 words
The method of claim 10, wherein removing a portion of said layer of said first material to define a pore in said layer of said first material comprises removing a portion of said layer of said first material not covered by said remaining portion of said layer of said third material.
Claim 14
Dependent Claim
18 words
The method of claim 11, further comprising removing said remaining portion of said layer of said third material.
Claim 15
Independent Claim
128 words
A method of fabricating a pore, comprising: applying a layer of a first material onto a substrate material; applying a layer of a second material onto said layer of said first material; applying a layer of a third material onto said layer of said second material; forming an edge feature in said layer of said third material; applying a layer of a fourth material onto said edge feature of said layer of said third material; removing a portion of said layer of said fourth material; removing a portion of said layer of said second material to define a pore in said layer of said second material; and removing a portion of said layer of said first material to define a pore in said layer of said first material.
Claim 16
Independent Claim
128 words
A method of fabricating a pore, comprising: applying a layer of a first material onto a substrate material; applying a layer of a second material onto said layer of said first material; applying a layer of a third material onto said layer of said second material; forming an edge feature in said layer of said third material; applying a layer of a fourth material onto said edge feature of said layer of said third material; removing a portion of said layer of said fourth material; removing a portion of said layer of said second material to define a pore in said layer of said second material; and removing a portion of said layer of said first material to define a pore in said layer of said first material.
Claim 17
Dependent Claim
39 words
The method of claim 13, wherein forming an edge feature in said layer of said third material comprises removing a portion of said layer of said third material to define an opening in said layer of said third material.
Claim 18
Dependent Claim
16 words
The method of claim 14, wherein said opening extends to said layer of said second material.
Claim 19
Dependent Claim
36 words
The method of claim 13, wherein removing a portion of said fourth material comprises: removing a portion of said layer of said fourth material to define a remaining portion of said layer of said fourth material.
Claim 20
Dependent Claim
51 words
The method of claim 16, wherein removing a portion of said layer of said second material to define a pore in said layer of said second material comprises removing a portion of said layer of said second material not covered by said remaining portion of said layer of said fourth material.
Claim 21
Dependent Claim
51 words
The method of claim 16, wherein removing a portion of said layer of said first material to define a pore in said layer of said first material comprises removing a portion of said layer of said first material not covered by said remaining portion of said layer of said fourth material.
Claim 22
Dependent Claim
18 words
The method of claim 18, further comprising removing said remaining portion of said layer of said fourth material.
Claim 23
Independent Claim
120 words
A method of fabricating a chalcogenide memory cell, comprising: applying a layer of a first material onto a conductive substrate material; forming an edge feature in said layer of said first material; applying a layer of a insulative material onto said edge feature of said layer of said first material; applying a layer of a third material onto said layer of said insulative material; removing a portion of said layer of said third material; removing a portion of said layer of said insulative material to define a pore in said layer of said insulative material; applying a layer of a chalcogenide material into said pore; and applying a layer of a conductive material onto said layer of said chalcogenide material.
Claim 24
Independent Claim
120 words
A method of fabricating a chalcogenide memory cell, comprising: applying a layer of a first material onto a conductive substrate material; forming an edge feature in said layer of said first material; applying a layer of a insulative material onto said edge feature of said layer of said first material; applying a layer of a third material onto said layer of said insulative material; removing a portion of said layer of said third material; removing a portion of said layer of said insulative material to define a pore in said layer of said insulative material; applying a layer of a chalcogenide material into said pore; and applying a layer of a conductive material onto said layer of said chalcogenide material.
Claim 25
Dependent Claim
39 words
The method of claim 20, wherein forming an edge feature in said layer of said first material comprises removing a portion of said layer of said first material to define an opening in said layer of said first material.
Claim 26
Dependent Claim
13 words
The method of claim 21, wherein said opening extends to said substrate material.
Claim 27
Dependent Claim
39 words
The method of claim 20, wherein removing a portion of said layer of said third material comprises: removing a portion of said layer of said third material to define a remaining portion of said layer of said third material.
Claim 28
Dependent Claim
51 words
The method of claim 23, wherein removing a portion of said layer of said insulative material to define a pore in said layer of said insulative material comprises removing a portion of said layer of said insulative material not covered by said remaining portion of said layer of said third material.
Claim 29
Dependent Claim
18 words
The method of claim 24, further comprising removing said remaining portion of said layer of said third material.
Claim 30
Independent Claim
133 words
A method of fabricating a chalcogenide memory cell, comprising: applying a layer of a insulative material onto a conductive substrate material; applying a layer of a second material onto said layer of said insulative material; forming an edge feature in said layer of said second material; forming an edge feature in said layer of said insulative material; applying a layer of a third material onto said edge features of said layers of said insulative and second materials; removing a portion of said layer of said third material; removing a portion of said layer of said insulative material to define a pore in said layer of said insulative material; applying a layer of a chalcogenide material into said pore; and applying a layer of a conductive material onto said layer of said chalcogenide material.
Claim 31
Independent Claim
133 words
A method of fabricating a chalcogenide memory cell, comprising: applying a layer of a insulative material onto a conductive substrate material; applying a layer of a second material onto said layer of said insulative material; forming an edge feature in said layer of said second material; forming an edge feature in said layer of said insulative material; applying a layer of a third material onto said edge features of said layers of said insulative and second materials; removing a portion of said layer of said third material; removing a portion of said layer of said insulative material to define a pore in said layer of said insulative material; applying a layer of a chalcogenide material into said pore; and applying a layer of a conductive material onto said layer of said chalcogenide material.
Claim 32
Dependent Claim
39 words
The method of claim 26, wherein forming an edge feature in said layer of said second material comprises removing a portion of said layer of said second material to define an opening in said layer of said second material.
Claim 33
Dependent Claim
16 words
The method of claim 27, wherein said opening extends to said layer of said insulative material.
Claim 34
Dependent Claim
39 words
The method of claim 26, wherein removing a portion of said layer of said third material comprises: removing a portion of said layer of said third material to define a remaining portion of said layer of said third material.
Claim 35
Dependent Claim
51 words
The method of claim 26, wherein removing a portion of said layer of said insulative material to define a pore in said layer of said insulative material comprises removing a portion of said layer of said insulative material not covered by said remaining portion of said layer of said third material.
Claim 36
Dependent Claim
18 words
The method of claim 30, further comprising removing said remaining portion of said layer of said third material.
Claim 37
Independent Claim
162 words
A method of fabricating a chalcogenide memory cell, comprising: applying a layer of an insulative material onto a conductive substrate material; applying a layer of a second material onto said layer of said insulative material; applying a layer of a third material onto said layer of said second material; forming an edge feature in said layer of said third material; applying a layer of a fourth material onto said edge feature of said layer of said third material; removing a portion of said layer of said fourth material; removing a portion of said layer of said second material to define a pore in said layer of said second material; removing a portion of said layer of said insulative material to define a pore in said layer of said insulative material; applying a layer of a chalcogenide material into said pore in said layer of said insulative material; and applying a layer of a conductive material onto said layer of said chalcogenide material.
Claim 38
Independent Claim
162 words
A method of fabricating a chalcogenide memory cell, comprising: applying a layer of an insulative material onto a conductive substrate material; applying a layer of a second material onto said layer of said insulative material; applying a layer of a third material onto said layer of said second material; forming an edge feature in said layer of said third material; applying a layer of a fourth material onto said edge feature of said layer of said third material; removing a portion of said layer of said fourth material; removing a portion of said layer of said second material to define a pore in said layer of said second material; removing a portion of said layer of said insulative material to define a pore in said layer of said insulative material; applying a layer of a chalcogenide material into said pore in said layer of said insulative material; and applying a layer of a conductive material onto said layer of said chalcogenide material.
Claim 39
Dependent Claim
39 words
The method of claim 32, wherein forming an edge feature in said layer of said third material comprises removing a portion of said layer of said third material to define an opening in said layer of said first material.
Claim 40
Dependent Claim
16 words
The method of claim 33, wherein said opening extends to said layer of said second material.
Claim 41
Dependent Claim
39 words
The method of claim 32, wherein removing a portion of said layer of said fourth material comprises: removing a portion of said layer of said fourth material to define a remaining portion of said layer of said fourth material.
Claim 42
Dependent Claim
51 words
The method of claim 35, wherein removing a portion of said layer of said second material to define a pore in said layer of said second material comprises removing a portion of said layer of said second material not covered by said remaining portion of said layer of said fourth material.
Claim 43
Dependent Claim
51 words
The method of claim 35, wherein removing a portion of said layer of said insulative material to define a pore in said layer of said insulative material comprises removing a portion of said layer of said insulative material not covered by said remaining portion of said layer of said fourth material.
Claim 44
Dependent Claim
18 words
The method of claim 37, further comprising removing said remaining portion of said layer of said fourth material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-09-28 | 2002-03-30 | 2002-09-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-09-28 | 2006-03-30 | 2006-09-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-09-28 | 2010-03-30 | 2010-09-29 | $7700.00 | Window Closed / Lapsed |