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US6019166A Expired / Lapsed US ⏱️ 0.0 years remaining

Pickup chuck with an integral heatsink

Assignee: Micron Technology Inc
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Filing: 1997-12-30
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Granted: 2000-02-01
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Expires: 2017-12-30
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Abstract

Abstract A pickup chuck having a heat slug for removing heat from a heat generating device that is held within the pickup chuck.

Inventors

  • 👤 Ram S. Viswanath
  • 👤 Philip R. Martin

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 21:29
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0434

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 132 words
A pickup chuck for retaining a heat generating device having a first surface, said pickup chuck comprising: a body defining passages for fluid; a heat slug coupled to said body, said heat slug being movable in a first direction that is away from said body and a second direction that is toward said body, said heat slug having a second surface for contacting said first surface of said heat generating device, said heat slug including fins; a fluid flow path in said body for directing a fluid flow across at least a portion of said fins, said fluid flow path being in fluid communication with said passages; retaining means for retaining said heat generating device in contact with said heat slug; and biasing means urging said heat slug away from said body.
Claim 2
Dependent Claim 132 words
A pickup chuck for retaining a heat generating device having a first surface, said pickup chuck comprising: a body defining passages for fluid; a heat slug coupled to said body, said heat slug being movable in a first direction that is away from said body and a second direction that is toward said body, said heat slug having a second surface for contacting said first surface of said heat generating device, said heat slug including fins; a fluid flow path in said body for directing a fluid flow across at least a portion of said fins, said fluid flow path being in fluid communication with said passages; retaining means for retaining said heat generating device in contact with said heat slug; and biasing means urging said heat slug away from said body.
Claim 3
Dependent Claim 19 words
The pickup chuck of claim 1 wherein a compliant and thermally conductive material is disposed over said second surface.
Claim 4
Dependent Claim 46 words
The pickup chuck of claim 1 wherein said retaining means includes at least one suction pad; a conduit extending through at least a portion of said body, said suction pad coupled to said conduit; and a connector for coupling said suction pad to a vacuum source.
Claim 5
Dependent Claim 31 words
The pickup chuck of claim 1 wherein said biasing means comprises at least one spring that is compressed between a surface of said body and a surface of said heat slug.
Claim 6
Dependent Claim 24 words
The pickup chuck of claim 1 wherein the surface area of said second surface is smaller than the surface area of said first surface.
Claim 7
Dependent Claim 11 words
The pickup chuck of claim 1 wherein said fluid is air.
Claim 8
Dependent Claim 164 words
A contactor in combination with a pickup chuck the contactor comprising: a first body with a surface having a set of electrical contacts thereon; and the pickup chuck comprising: a second body defining passages for fluid; a heat slug coupled to said second body, said heat slug being movable in a first direction that is away from said second body and a second direction that is toward said second body, said heat slug having a contact surface for contacting a surface of an heat generating device, said heat slug including fins; a fluid flow path in said body for directing a fluid flow across at least a portion of said fins, said fluid flow path being in fluid communication with said passages; retaining means for retaining said heat generating device in contact with said heat slug; and biasing means urging said heat slug away from said second body; said first and second bodies having complementary formations for aligning said contactor with said pickup chuck.
Claim 9
Dependent Claim 164 words
A contactor in combination with a pickup chuck the contactor comprising: a first body with a surface having a set of electrical contacts thereon; and the pickup chuck comprising: a second body defining passages for fluid; a heat slug coupled to said second body, said heat slug being movable in a first direction that is away from said second body and a second direction that is toward said second body, said heat slug having a contact surface for contacting a surface of an heat generating device, said heat slug including fins; a fluid flow path in said body for directing a fluid flow across at least a portion of said fins, said fluid flow path being in fluid communication with said passages; retaining means for retaining said heat generating device in contact with said heat slug; and biasing means urging said heat slug away from said second body; said first and second bodies having complementary formations for aligning said contactor with said pickup chuck.
Claim 10
Dependent Claim 27 words
The pickup chuck of claim 7 wherein the surface area of said heat slug contact surface is smaller than the surface area of said heat generating device.
Claim 11
Dependent Claim 47 words
The pickup chuck of claim 7 wherein said retaining means includes at least one suction pad; a conduit extending through at least a portion of said second body, said suction pad coupled to said conduit; and a connector for coupling said suction pad to a vacuum source.
Claim 12
Dependent Claim 32 words
The pickup chuck of claim 7 wherein said biasing means comprises at least one spring that is compressed between a surface of said second body and a surface of said heat slug.
Claim 13
Dependent Claim 11 words
The pickup chuck of claim 7 wherein said fluid is air.
Claim 14
Dependent Claim 179 words
A pickup chuck for retaining a heat generating device having a first surface, said pickup chuck comprising: a body defining passages for directing an air flow; a heat slug coupled to said body, said heat slug being movable in a first direction that is away from said body and a second direction that is toward said body, said heat slug having a second surface for contacting said first surface of said heat generating device; a fluid flow path in communication with said passages for directing said air flow across at least a portion of said heat slug; at least one suction pad on said body for retaining said heat generating device in contact with said heat slug; a conduit extending through at least a portion of said body, said suction pad coupled to said conduit; a connector cooperating with said conduit for coupling said suction pad to a vacuum source; and at least one spring urging said heat slug away from said body, said spring compressed between a surface of said body and a surface of said heat slug.
Claim 15
Dependent Claim 179 words
A pickup chuck for retaining a heat generating device having a first surface, said pickup chuck comprising: a body defining passages for directing an air flow; a heat slug coupled to said body, said heat slug being movable in a first direction that is away from said body and a second direction that is toward said body, said heat slug having a second surface for contacting said first surface of said heat generating device; a fluid flow path in communication with said passages for directing said air flow across at least a portion of said heat slug; at least one suction pad on said body for retaining said heat generating device in contact with said heat slug; a conduit extending through at least a portion of said body, said suction pad coupled to said conduit; a connector cooperating with said conduit for coupling said suction pad to a vacuum source; and at least one spring urging said heat slug away from said body, said spring compressed between a surface of said body and a surface of said heat slug.
Claim 16
Dependent Claim 30 words
The pickup chuck of claim 12 wherein said heat slug includes fins and wherein said fluid flow path directs said air flow across at least a portion of said fins.
Claim 17
Dependent Claim 41 words
The pickup chuck of claim 12 further comprising a contactor having a second body with a surface having a set of electrical contacts thereon, wherein said first and second bodies have complimentary formations for aligning said contactor with said first body.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2003-01-31 2003-08-02 2004-02-01 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2007-01-31 2007-08-02 2008-02-01 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2011-01-31 2011-08-02 2012-02-01 $7700.00 Window Closed / Lapsed

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