US6094965A
Expired / Lapsed
US
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Semiconductor calibration structures and calibration wafers for ascertaining layer alignment during processing and calibrating multiple semiconductor wafer coating systems
Assignee: NXP BV
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Filing: 1998-05-29
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Granted: 2000-08-01
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Expires: 2018-05-29
Abstract
Abstract Semiconductor wafer coating system calibration structures and methods are described. In one embodiment, a calibration structure includes a perimetral edge bounding a calibration body. A calibration edge is spaced from the perimetral edge and is positioned over the calibration body. Together, the edges define a distance therebetween which is configured to calibrate a wafer coating system. In a preferred embodiment, the edges define respective termination distances configured to calibrate multiple different wafer coating systems. In another embodiment, a calibration pattern is formed over a semiconductor wafer. A layer of material is formed over the calibration pattern by a coating system, and selected portions thereof removed by the system. The positions of unremoved portions of the layer of material are inspected relative to the calibration pattern to ascertain whether the coating system removed the selected portions within desired tolerances. If not, the coating system is calibrated to within desired tolerances.
Inventors
- 👤 Walter B. Hubbard
- 👤 Lisa Napolitano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:02
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2022; G03F7/16
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
43 words
A semiconductor wafer coating system calibration structure comprising: a perimetral edge bounding a calibration body; and a calibration edge spaced from said perimetral edge and positioned over said calibration body, said edges defining a distance therebetween configured to calibrate a wafer coating system.
Claim 2
Dependent Claim
43 words
A semiconductor wafer coating system calibration structure comprising: a perimetral edge bounding a calibration body; and a calibration edge spaced from said perimetral edge and positioned over said calibration body, said edges defining a distance therebetween configured to calibrate a wafer coating system.
Claim 3
Dependent Claim
28 words
The calibration structure of claim 1, wherein said calibration edge defines, together with said perimetral edge, a plurality of different distances configured to calibrate said wafer coating system.
Claim 4
Dependent Claim
22 words
The calibration structure of claim 2, wherein said calibration edge has a generally stepped appearance when viewed from over the calibration body.
Claim 5
Dependent Claim
17 words
The calibration structure of claim 1, wherein said calibration edge comprises a plurality of spaced-apart, non-contiguous edges.
Claim 6
Dependent Claim
28 words
The calibration structure of claim 4, wherein said spaced-apart, non-contiguous edges define, together with said perimetral edge, a plurality of different distances configured to calibrate said coating system.
Claim 7
Dependent Claim
16 words
The calibration structure of claim 1, wherein said coating system comprises an edge bead removal unit.
Claim 8
Dependent Claim
19 words
The calibration structure of claim 6, wherein said edge bead removal unit comprises a chemical edge bead removal unit.
Claim 9
Dependent Claim
19 words
The calibration structure of claim 6, wherein said edge bead removal unit comprises an optical edge bead removal unit.
Claim 10
Dependent Claim
17 words
The calibration structure of claim 1, wherein said distance is configured to calibrate multiple different coating systems.
Claim 11
Dependent Claim
17 words
The calibration structure of claim 9, wherein said multiple different coating systems comprise edge bead removal units.
Claim 12
Dependent Claim
51 words
A semiconductor wafer coating system calibration wafer comprising: a perimetral edge bounding a wafer body; and a layer of material disposed over the wafer body and having a calibration edge spaced inwardly of the said perimetral edge, said edges defining termination distances therebetween configured to calibrate multiple different wafer coating systems.
Claim 13
Dependent Claim
51 words
A semiconductor wafer coating system calibration wafer comprising: a perimetral edge bounding a wafer body; and a layer of material disposed over the wafer body and having a calibration edge spaced inwardly of the said perimetral edge, said edges defining termination distances therebetween configured to calibrate multiple different wafer coating systems.
Claim 14
Dependent Claim
18 words
The calibration wafer of claim 11, wherein said multiple different wafer coating systems comprise edge bead removal units.
Claim 15
Dependent Claim
21 words
The calibration wafer of claim 12, wherein one of said edge bead removal units comprises a chemical edge bead removal unit.
Claim 16
Dependent Claim
22 words
The calibration wafer of claim 12, wherein said one of said edge bead removal units comprises an optical edge bead removal unit.
Claim 17
Dependent Claim
30 words
The calibration wafer of claim 11, wherein said calibration edge defines, together with said perimetral edge, a plurality of different distances configured to calibrate said multiple different wafer coating systems.
Claim 18
Dependent Claim
21 words
The calibration wafer of claim 15, wherein said calibration edge has a generally stepped appearance when viewed from over the wafer.
Claim 19
Dependent Claim
18 words
The calibration wafer of claim 15, wherein said calibration edge defines, in part, a generally contiguous calibration pattern.
Claim 20
Dependent Claim
17 words
The calibration wafer of claim 15, wherein said calibration edge comprises a plurality of spaced-apart, non-contiguous edges.
Claim 21
Dependent Claim
55 words
A semiconductor wafer coating system calibration wafer comprising: a perimetral edge bounding a wafer body; and a layer of material disposed over the wafer body and having a calibration edge spaced inwardly of the said perimetral edge, said edges defining a plurality of different termination distances therebetween configured to calibrate an edge bead removal unit.
Claim 22
Dependent Claim
55 words
A semiconductor wafer coating system calibration wafer comprising: a perimetral edge bounding a wafer body; and a layer of material disposed over the wafer body and having a calibration edge spaced inwardly of the said perimetral edge, said edges defining a plurality of different termination distances therebetween configured to calibrate an edge bead removal unit.
Claim 23
Dependent Claim
12 words
The calibration wafer of claim 19, wherein said calibration edge is contiguous.
Claim 24
Dependent Claim
18 words
The calibration wafer of claim 19, wherein said calibration edge generally follows the shape of the perimetral edge.
Claim 25
Dependent Claim
17 words
The calibration wafer of claim 19, wherein said calibration edge comprises a plurality of spaced-apart, non-contiguous edges.
Claim 26
Dependent Claim
81 words
A calibration wafer for calibrating a plurality of wafer coating systems comprising: a wafer having an outer edge having a shape which defines the wafer's periphery; and a calibration pattern distributed about a portion of said wafer proximate said periphery, said calibration pattern having first and second edges which generally follow at least a portion of said outer edge shape, and one joinder edge joined with one of the first and second edges and extending generally away from the outer edge.
Claim 27
Dependent Claim
81 words
A calibration wafer for calibrating a plurality of wafer coating systems comprising: a wafer having an outer edge having a shape which defines the wafer's periphery; and a calibration pattern distributed about a portion of said wafer proximate said periphery, said calibration pattern having first and second edges which generally follow at least a portion of said outer edge shape, and one joinder edge joined with one of the first and second edges and extending generally away from the outer edge.
Claim 28
Dependent Claim
39 words
The calibration wafer of claim 23, wherein said calibration pattern comprises a first color, and said wafer comprises a second color intermediate said first and second edges and said wafer's outer edge, said first and second colors being different.
Claim 29
Dependent Claim
23 words
The calibration wafer of claim 23, wherein said first and second edges are spaced inwardly of said wafer's outer edge different respective distances.
Claim 30
Dependent Claim
31 words
The calibration wafer of claim 23, wherein said calibration pattern comprises a plurality of first and second edges, and a plurality of joinder edges joined with individual first and second edges.
Claim 31
Dependent Claim
25 words
The calibration wafer of claim 26, wherein said plurality of first and second edges are spaced inwardly of said wafer's outer edge different respective distances.
Claim 32
Dependent Claim
20 words
The calibration wafer of claim 27, wherein said plurality of first and second edges are disposed in an alternating fashion.
Claim 33
Dependent Claim
42 words
The calibration wafer of claim 27, wherein said calibration pattern comprises a first color, and said wafer comprises a second color intermediate said plurality of said first and second edges and said wafer's outer edge, said first and second colors being different.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-08-01 | 2004-01-31 | 2004-08-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-01 | 2008-01-31 | 2008-08-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-01 | 2012-01-31 | 2012-08-01 | $7700.00 | Window Closed / Lapsed |