Patent US6561706B2 successfully refreshed from Google Patents.
US6561706B2
Expired / Lapsed
US
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Critical dimension monitoring from latent image
Assignee: GlobalFoundries US Inc
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Filing: 2001-06-28
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Granted: 2003-05-13
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Expires: 2021-06-28
Abstract
Abstract A system for monitoring a latent image exposed in a photo resist during semiconductor manufacture is provided. The system includes one or more light sources, each light source directing light to the latent image and/or one or more gratings exposed on one or more portions of a wafer. Light reflected from the latent image and/or the gratings is collected by a signature system, which processes the collected light. Light passing through the latent image and/or gratings may similarly be collected by the signature system, which processes the collected light. The collected light is analyzed and can be employed to generate feedback information to control the exposure. The collect light is further analyzed and can be employed to generate feed forward information that can be employed to control post exposure processes including development and baking processes.
Inventors
- 👤 Bhanwar Singh
- 👤 Michael K. Templeton
- 👤 Bharath Rangarajan
- 👤 Ramkumar Subramanian
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 14:13
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70633; G03F7/70653; G03F7/70675
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
199 words
A system for analyzing a latent image exposed in a photo resist and for generating information to facilitate controlling a post exposure developing process in semiconductor manufacturing, comprising: an exposing system adapted to expose one or more patterns on one or more photo resist layers on a wafer; a developing system adapted to develop a photo resist; a developing driving system adapted to control the developing system; a post exposure baking system adapted to harden the photo resist; a baking driving system adapted to control the post exposure baking system; one or more light sources adapted to direct light to at least one portion of the wafer; one or more light collectors adapted to collect a light reflected from the at least one portion of the wafer; a signature system adapted to produce a signature from the light reflected from the at least one portion of the wafer; and a processor operatively coupled to the signature system, the developing system, and the post exposure baking system, the processor receiving one or more signatures from the signature system and the processor adapted to employ the one or more signatures to control the developing system and the post exposure baking system.
Claim 2
Independent Claim
199 words
A system for analyzing a latent image exposed in a photo resist and for generating information to facilitate controlling a post exposure developing process in semiconductor manufacturing, comprising: an exposing system adapted to expose one or more patterns on one or more photo resist layers on a wafer; a developing system adapted to develop a photo resist; a developing driving system adapted to control the developing system; a post exposure baking system adapted to harden the photo resist; a baking driving system adapted to control the post exposure baking system; one or more light sources adapted to direct light to at least one portion of the wafer; one or more light collectors adapted to collect a light reflected from the at least one portion of the wafer; a signature system adapted to produce a signature from the light reflected from the at least one portion of the wafer; and a processor operatively coupled to the signature system, the developing system, and the post exposure baking system, the processor receiving one or more signatures from the signature system and the processor adapted to employ the one or more signatures to control the developing system and the post exposure baking system.
Claim 3
Dependent Claim
50 words
The system of claim 1 , wherein the signature system further comprises a scatterometry system, the scatterometry system adapted to process the light reflected from the at least one portion of the wafer and the scatterometry system further adapted to produce one or more signatures based on the reflected light.
Claim 4
Dependent Claim
45 words
The system of claim 2 , where the processor is operatively coupled to the scatterometry system, where the processor is further adapted to analyze the one or more signatures and to control the developing system based at least partially on the one or more signatures.
Claim 5
Dependent Claim
42 words
The system of claim 3 , wherein the scatterometry system is further adapted to process a light passing through the at least one portion, the light passing through the at least one portion being employed to produce the one or more signatures.
Claim 6
Dependent Claim
37 words
The system of claim 3 , wherein the processor is further adapted to map the wafer into a plurality of grid blocks and to analyze signatures generated by light reflected from the one or more grid blocks.
Claim 7
Dependent Claim
24 words
The system of claim 5 , wherein one or more gratings are exposed in at least one of the one or more grid blocks.
Claim 8
Dependent Claim
33 words
The system of claim 6 , wherein the signature system is further adapted to produce one or more signatures from a light reflected from at least one of the one or more gratings.
Claim 9
Independent Claim
126 words
A method for analyzing light reflected from a latent image exposed in a photo resist and for controlling a post exposure developing system, comprising: partitioning a wafer into one or more portions; exposing a pattern in the one or more portions, the exposing producing a latent image in the photo resist; directing a light onto the latent image; collecting a light reflected from the latent image; analyzing the reflected light to produce one or more signatures associated with the latent image; generating data used in connection with controlling the post exposure developing system based, at least in part, on the one or more signatures; and generating data operable to control a post exposure baking system based, at least in part, on the one or more signatures.
Claim 10
Independent Claim
126 words
A method for analyzing light reflected from a latent image exposed in a photo resist and for controlling a post exposure developing system, comprising: partitioning a wafer into one or more portions; exposing a pattern in the one or more portions, the exposing producing a latent image in the photo resist; directing a light onto the latent image; collecting a light reflected from the latent image; analyzing the reflected light to produce one or more signatures associated with the latent image; generating data used in connection with controlling the post exposure developing system based, at least in part, on the one or more signatures; and generating data operable to control a post exposure baking system based, at least in part, on the one or more signatures.
Claim 11
Dependent Claim
22 words
The method of claim 8 , wherein analyzing the reflected light further comprises using a scatterometry system to process the reflected light.
Claim 12
Independent Claim
170 words
A method for regulating a post exposure developing process, comprising: partitioning a wafer into a plurality of grid blocks, the wafer having a photo resist layer deposited thereon; exposing one or more gratings on the photo resist layer, the gratings positioned within one or more of the plurality of grid blocks; directing a first light onto at least one of the one or more gratings; collecting a second light reflected from at least one of the one or more gratings, the second reflected light being a reflection of the first light; generating feedback information concerning the exposure, based, at least in part, on analyzing the second light; controlling an exposing system based, at least in part, on the feedback information; generating feed forward information concerning the exposure, based, at least in part, on analyzing the second light; controlling a post exposure developing process based, at least in part, on the feed forward information; and controlling a post exposure baking process based, at least in part, on the feed forward information.
Claim 13
Independent Claim
170 words
A method for regulating a post exposure developing process, comprising: partitioning a wafer into a plurality of grid blocks, the wafer having a photo resist layer deposited thereon; exposing one or more gratings on the photo resist layer, the gratings positioned within one or more of the plurality of grid blocks; directing a first light onto at least one of the one or more gratings; collecting a second light reflected from at least one of the one or more gratings, the second reflected light being a reflection of the first light; generating feedback information concerning the exposure, based, at least in part, on analyzing the second light; controlling an exposing system based, at least in part, on the feedback information; generating feed forward information concerning the exposure, based, at least in part, on analyzing the second light; controlling a post exposure developing process based, at least in part, on the feed forward information; and controlling a post exposure baking process based, at least in part, on the feed forward information.
Claim 14
Dependent Claim
17 words
A computer readable medium containing computer executable components operable to perform the method of claim 10 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-05-12 | 2006-11-11 | 2007-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-05-12 | 2010-11-11 | 2011-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-05-12 | 2014-11-11 | 2015-05-13 | $7700.00 | Window Closed / Lapsed |