US7179079B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Conforming template for patterning liquids disposed on substrates
Assignee: Canon Nanotechnologies Inc
•
Filing: 2003-07-07
•
Granted: 2007-02-20
•
Expires: 2023-07-07
Abstract
Abstract The present invention includes a conforming template for patterning liquids disposed on substrates. The template includes a body having opposed first and second surfaces. The first surface includes a plurality of recessed regions with a patterning region being disposed between adjacent recessed regions. Specifically, the recessed regions define flexure regions about which each patterning region may move independent of the remaining patterning regions of the template. In one embodiment the template is mounted to a fluid chamber having an inlet and a throughway. The template is connected to the throughway and the inlet is connected to a fluid source to facilitate deformation of the template to conform to a profile of a surface adjacent thereto.
Inventors
- 👤 Sidlgata V Sreenivasan
- 👤 Byung J. Choi
- 👤 Ronald D. Voisin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 02:41
CPC Classifications
B; B29; B29C; B29C43/00; B29C43/003; B82; B82Y; B82Y10/00; B82Y40/00; G; G03; G03F; G03F7/00; G03F7/0002; B29C43/02; B29C43/021; B29C2043/023; B29C2043/025; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/887
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
60 words
A template, comprising: a body having opposed first and second surfaces, with said first surface including a plurality of recessed regions defining a plurality of flexures with a region of said second surface disposed between adjacent recessed regions defining a patterning region; and a fluid chamber having an inlet and a throughway, with said template being connected to said throughway.
Claim 2
Dependent Claim
60 words
A template, comprising: a body having opposed first and second surfaces, with said first surface including a plurality of recessed regions defining a plurality of flexures with a region of said second surface disposed between adjacent recessed regions defining a patterning region; and a fluid chamber having an inlet and a throughway, with said template being connected to said throughway.
Claim 3
Dependent Claim
25 words
The template as recited in claim 1 wherein said patterning region has a profile selected from a set of profiles including smooth, planar and patterned.
Claim 4
Dependent Claim
23 words
The template as recited in claim 1 wherein said patterning region covers an area of said second surface that has a polygonal shape.
Claim 5
Dependent Claim
20 words
The template as recited in claim 1 further including a plurality of said patterning regions arranged in a two-dimensional array.
Claim 6
Dependent Claim
78 words
A template, comprising: a body having a plurality of spaced-apart flexure regions, a scalloped surface and a smooth surface, disposed opposite to said scalloped surface, with regions of said second surface disposed between adjacent flexure regions defining a patterning region, with said template including a plurality of patterning region and said flexure regions facilitating relative movement between said patterning regions; and a fluid chamber having an inlet and a throughway, with said template being connected to said throughway.
Claim 7
Dependent Claim
78 words
A template, comprising: a body having a plurality of spaced-apart flexure regions, a scalloped surface and a smooth surface, disposed opposite to said scalloped surface, with regions of said second surface disposed between adjacent flexure regions defining a patterning region, with said template including a plurality of patterning region and said flexure regions facilitating relative movement between said patterning regions; and a fluid chamber having an inlet and a throughway, with said template being connected to said throughway.
Claim 8
Dependent Claim
53 words
The template as recited in claim 5 wherein one of said plurality of patterning regions has a profile selected from a set of profiles including smooth, planar and patterned and an area of said one of said plurality of patterning regions covers an area of said second surface that has a polygonal shape.
Claim 9
Dependent Claim
22 words
The template as recited in claim 6 wherein said plurality of patterning regions are arranged on said template in a two-dimensional array.
Claim 10
Dependent Claim
61 words
The template as recited in claim 5 wherein said template is formed from material selected from a set of material consisting of quartz, fused-silica, silicon, organic polymers, siloxane polymers, borosilicate glass, fluorocarbon polymers, metal, silicon, silicon dioxide, silicon germanium carbon, gallium nitride, silicon germanium, sapphire, gallium arsenide, epitaxial silicon, poly-silicon, gate oxide, indium tin oxide, diamond, and combinations of the same.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-02-19 | 2010-08-21 | 2011-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-02-19 | 2014-08-21 | 2015-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-02-19 | 2018-08-21 | 2019-02-20 | $7700.00 | Window Closed / Lapsed |