Patent US7270533B2 successfully refreshed from Google Patents.
US7270533B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
System for creating a turbulent flow of fluid between a mold and a substrate
Assignee: Canon Nanotechnologies Inc
•
Filing: 2004-07-23
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Granted: 2007-09-18
•
Expires: 2024-07-23
Abstract
Abstract The present invention is directed toward a system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, the system including, a fluid supply system; and a chuck body having a baffle and first and second apertures, the first and second apertures disposed between the baffle and the template, with the first and second apertures in fluid communication with the fluid supply system to produce a turbulent flow of the fluid between the mold and said substrate.
Inventors
- 👤 Ian M. McMackin
- 👤 Nicholas A. Stacey
- 👤 Daniel A. Babbs
- 👤 Duane J. Voth
- 👤 Mathew P. C. Watts
- 👤 Van N. Truskett
- 👤 Frank Y. Xu
- 👤 Ronald D. Voisin
- 👤 Pankaj B. Lad
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 14:41
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B81; B81C; B81C1/00; B81C1/00436; B81C1/00444; B81C1/0046; B82; B82Y; B82Y10/00; B82Y40/00; Y; Y10; Y10S; Y10S425/00; Y10S425/06; Y10S425/815; Y10S438/00; Y10S438/909
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
85 words
A system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, said system comprising: a fluid supply system; and a chuck body having a baffle and first and second apertures, said first and second apertures disposed on a surface of said chuck body between said baffle and said template, with said first and second apertures in fluid communication with said fluid supply system to produce a turbulent flow of said fluid between said mold and said substrate.
Claim 2
Independent Claim
85 words
A system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, said system comprising: a fluid supply system; and a chuck body having a baffle and first and second apertures, said first and second apertures disposed on a surface of said chuck body between said baffle and said template, with said first and second apertures in fluid communication with said fluid supply system to produce a turbulent flow of said fluid between said mold and said substrate.
Claim 3
Dependent Claim
31 words
The system as recited in claim 1 wherein said chuck body further includes a plurality of apertures disposed on said surface of said chuck body between said baffle and said template.
Claim 4
Dependent Claim
38 words
The system as recited in claim 1 wherein said chuck body further includes first and second throughways, with said first and second throughways placing said first and second apertures, respectfully, in fluid communication with said fluid supply system.
Claim 5
Dependent Claim
45 words
The system as recited in claim 1 wherein said chuck body further includes a plurality of apertures disposed on said surface of said chuck body between said baffle and said template, with said plurality of apertures including a pair of apertures disposed opposite one another.
Claim 6
Dependent Claim
54 words
The system as recited in claim 1 wherein said chuck body further includes a plurality of apertures disposed on said surface of said chuck body between said baffle and said template, with said plurality of apertures lying in a common circle with adjacent apertures of said plurality of apertures being spaced-apart therefrom by 90°.
Claim 7
Dependent Claim
82 words
The system as recited in claim 1 wherein said chuck body further includes a plurality of apertures disposed on said surface of said chuck body between said baffle and said template, with said plurality of apertures lying in a common circle having a plurality of quadrants, with a quadrant of said plurality of quadrants comprising a set of apertures of said plurality of apertures, with differing quadrants of said plurality of quadrants comprising differing sets of apertures of said plurality of apertures.
Claim 8
Dependent Claim
67 words
The system as recited in claim 1 further including a processor in data communication with said fluid supply system, and a memory in data communication with said processor, said memory comprising a computer-readable medium having a computer-readable program embodied thereon, said computer-readable program including a set of instructions to control a second flow of said fluid between said fluid supply system and said first and second apertures.
Claim 9
Dependent Claim
29 words
The system as recited in claim 1 wherein said baffle further includes first and second opposed surfaces, with said first surface extending obliquely with respect to said second surface.
Claim 10
Dependent Claim
27 words
The system as recited in claim 1 wherein said baffle further includes first and second opposed surfaces, with said first surface extending parallel to said second surface.
Claim 11
Independent Claim
83 words
A system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, said system comprising: a fluid supply system; and a chuck body having a baffle and a plurality of apertures, said plurality of apertures disposed on a surface of said chuck body between said baffle and said template, with said plurality of apertures in fluid communication with said fluid supply system to produce a turbulent flow of said fluid between said mold and said substrate.
Claim 12
Independent Claim
83 words
A system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, said system comprising: a fluid supply system; and a chuck body having a baffle and a plurality of apertures, said plurality of apertures disposed on a surface of said chuck body between said baffle and said template, with said plurality of apertures in fluid communication with said fluid supply system to produce a turbulent flow of said fluid between said mold and said substrate.
Claim 13
Dependent Claim
34 words
The system as recited in claim 10 wherein said chuck body further a plurality of throughways, with said plurality of throughways placing said plurality of apertures in fluid communication with said fluid supply system.
Claim 14
Dependent Claim
22 words
The system as recited in claim 10 wherein said plurality of apertures further includes a pair of apertures disposed opposite one another.
Claim 15
Dependent Claim
30 words
The system as recited in claim 10 wherein said plurality of apertures lie in a common circle with adjacent apertures of said plurality of apertures being spaced-apart therefrom by 90°.
Claim 16
Dependent Claim
57 words
The system as recited in claim 10 said plurality of apertures lie in a common circle having a plurality of quadrants, with a quadrant of said plurality of quadrants comprising a set of apertures of said plurality of apertures, with differing quadrants of said plurality of quadrants comprising differing sets of apertures of said plurality of apertures.
Claim 17
Dependent Claim
66 words
The system as recited in claim 10 further including a processor in data communication with said fluid supply system, and a memory in data communication with said processor, said memory comprising a computer-readable medium having a computer-readable program embodied thereon, said computer-readable program including a set of instructions to control a second flow of said fluid between said fluid supply system and said plurality of apertures.
Claim 18
Independent Claim
99 words
A system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, said system comprising: a fluid supply system; and a chuck body having a baffle and first and second throughways having first and second apertures disposed thereon, said first and second apertures disposed on a surface of said chuck body between said baffle and said template, with said first and second throughways placing said first and second apertures, respectfully, in fluid communication with said fluid supply system to produce a turbulent flow of said fluid between said mold and said substrate.
Claim 19
Independent Claim
99 words
A system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, said system comprising: a fluid supply system; and a chuck body having a baffle and first and second throughways having first and second apertures disposed thereon, said first and second apertures disposed on a surface of said chuck body between said baffle and said template, with said first and second throughways placing said first and second apertures, respectfully, in fluid communication with said fluid supply system to produce a turbulent flow of said fluid between said mold and said substrate.
Claim 20
Dependent Claim
31 words
The system as recited in claim 16 wherein said chuck body further includes a plurality of apertures disposed on said surface of said chuck body between said baffle and said template.
Claim 21
Dependent Claim
45 words
The system as recited in claim 16 wherein said chuck body further includes a plurality of apertures disposed on said surface of said chuck body between said baffle and said template, with said plurality of apertures including a pair of apertures disposed opposite one another.
Claim 22
Dependent Claim
54 words
The system as recited in claim 16 wherein said chuck body further includes a plurality of apertures disposed on said surface of said chuck body between said baffle and said template, with said plurality of apertures lying in a common circle with adjacent apertures of said plurality of apertures being spaced-apart therefrom by 90°.
Claim 23
Dependent Claim
82 words
The system as recited in claim 16 wherein said chuck body further includes a plurality of apertures disposed on said surface of said chuck body between said baffle and said template, with said plurality of apertures lying in a common circle having a plurality of quadrants, with a quadrant of said plurality of quadrants comprising a set of apertures of said plurality of apertures, with differing quadrants of said plurality of quadrants comprising differing sets of apertures of said plurality of apertures.
Claim 24
Independent Claim
109 words
A system comprising: a nanolithography mold disposed on a template; a substrate positioned a distance from said template; a fluid supply system containing a fluid to be imprinted upon by said nanolithography mold when it is disposed between said mold and said substate; and a chuck body having a baffle ring surrounding said template and first and second apertures, said first and second apertures disposed on a surface of said chuck body between said baffle and said template, with said first and second apertures in fluid communication with said fluid supply system and configured to produce a turbulent flow of said fluid between said nanolithography mold and said substrate.
Claim 25
Independent Claim
109 words
A system comprising: a nanolithography mold disposed on a template; a substrate positioned a distance from said template; a fluid supply system containing a fluid to be imprinted upon by said nanolithography mold when it is disposed between said mold and said substate; and a chuck body having a baffle ring surrounding said template and first and second apertures, said first and second apertures disposed on a surface of said chuck body between said baffle and said template, with said first and second apertures in fluid communication with said fluid supply system and configured to produce a turbulent flow of said fluid between said nanolithography mold and said substrate.
Claim 26
Dependent Claim
27 words
The system as recited in claim 21 wherein said system is configured to produce said turbulent flow by pulsing said fluid through said first and second apertures.
Claim 27
Dependent Claim
26 words
The system as recited in claim 22 wherein said system is configured to pulse said fluid through said first and second apertures in an alternating manner.
Claim 28
Dependent Claim
34 words
The system as recited in claim 21 wherein said system is configured to produce said turbulent flow by pulsing said fluid through said first aperure and vacuuming said pulsed fluid through said second aperture.
Claim 29
Dependent Claim
84 words
The system as recited in claim 21 wherein said chuck body further includes a plurality of apertures disposed on said surface of said surface of said chuck body between said baffle and said template, with said plurality of apertures lying in a common circle having a plurality quadrants, with a quadrant of said plurality of quadrants comprising a set of apertures of said plurality of apertures, with differing quadrants of said plurality of quadrants comprising differing sets of apertures of said plurality of apertures.
Claim 30
Dependent Claim
29 words
The system as recited in claim 21 wherein said baffle further includes first and second opposed surfaces, with said first surface extending obliquely with respect to said second surface.
Claim 31
Dependent Claim
27 words
The system as recited in claim 26 wherein said baffle further includes first and second opposed surfaces, with said first surface extending parallel to said second surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-09-17 | 2011-03-19 | 2011-09-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-09-17 | 2015-03-19 | 2015-09-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-09-17 | 2019-03-19 | 2019-09-18 | $7700.00 | Window Closed / Lapsed |