US7531025B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of creating a turbulent flow of fluid between a mold and a substrate
Assignee: Canon Nanotechnologies Inc
•
Filing: 2004-07-23
•
Granted: 2009-05-12
•
Expires: 2024-07-23
Abstract
Abstract The present invention is directed toward a method of controlling a turbulent flow of a fluid between a substrate and a template, and more specifically, controlling a turbulent flow of a fluid between droplets disposed on a substrate and a template. To that end, the method further comprises the ingression and egression of the fluid through a first and second aperture, and in a further embodiment, a plurality of apertures, to create such a turbulent flow of the fluid.
Inventors
- 👤 Ian M. McMackin
- 👤 Nicholas A. Stacey
- 👤 Daniel A. Babbs
- 👤 Duane J. Voth
- 👤 Mathew P. C. Watts
- 👤 Van N. Truskett
- 👤 Frank Y. Xu
- 👤 Ronald D. Voisin
- 👤 Pankaj B. Lad
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 22:08
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B81; B81C; B81C1/00; B81C1/00436; B81C1/00444; B81C1/0046; B82; B82Y; B82Y10/00; B82Y40/00; Y; Y10; Y10S; Y10S425/00; Y10S425/06; Y10S425/815; Y10S438/00; Y10S438/909
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
72 words
A method of introducing a fluid between a mold, disposed on a template, and a substrate, said method comprising: introducing a flow of said fluid proximate to said template to produce a turbulent flow of said fluid between said substrate and said template, with said turbulent flow moving a portion of said fluid in said flow between said mold and said substrate to minimize gases positioned between said substrate and said template.
Claim 2
Independent Claim
72 words
A method of introducing a fluid between a mold, disposed on a template, and a substrate, said method comprising: introducing a flow of said fluid proximate to said template to produce a turbulent flow of said fluid between said substrate and said template, with said turbulent flow moving a portion of said fluid in said flow between said mold and said substrate to minimize gases positioned between said substrate and said template.
Claim 3
Dependent Claim
30 words
The method as recited in claim 1 wherein introducing further includes pulsing said flow of said fluid into a region adjacent to said template and in superimposition with said substrate.
Claim 4
Dependent Claim
36 words
The method as recited in claim 1 wherein introducing further includes pulsing said flow of said fluid at multiple regions in superimposition with said substrate and located at differing positions about a periphery of said template.
Claim 5
Dependent Claim
51 words
The method as recited in claim 1 wherein introducing further includes pulsing said flow of said fluid, with pulsing further including injecting said fluid sequentially through multiple regions at differing positions about a periphery of said template to create flow cell in an atmosphere located between said mold and said substrate.
Claim 6
Dependent Claim
30 words
The method as recited in claim 1 wherein introducing further includes sequentially pulsing and evacuating said fluid into a region adjacent to said template and in superimposition with said substrate.
Claim 7
Dependent Claim
23 words
The method as recited in claim 1 wherein introducing further includes concurrently introducing a plurality of flows of said fluid about said template.
Claim 8
Dependent Claim
26 words
The method as recited in claim 1 wherein introducing further includes sequentially introducing a plurality of flows of said fluid at differing regions about said template.
Claim 9
Dependent Claim
31 words
The method as recited in claim 1 wherein introducing further includes concurrently introducing said flow while evacuating said fluid introduced by said flow at a region disposed opposite to said flow.
Claim 10
Dependent Claim
54 words
The method as recited in claim 1 wherein introducing further includes concurrently introducing said flow, at a first region, while evacuating said fluid introduced by said flow, at a second region, with said first and second regions being in superimposition with said substrate and said mold being disposed between said first and second regions.
Claim 11
Dependent Claim
60 words
The method as recited in claim 1 wherein said fluid ingresses concurrently at a plurality of first regions, while evacuating said fluid introduced by said flow, at a plurality of second regions, with said first and second regions being in superimposition with said substrate, with said mold being disposed between a subset of said plurality of first and second regions.
Claim 12
Independent Claim
79 words
A method of introducing a fluid between a mold, disposed on a template, and a substrate, said method comprising: introducing a plurality of flows of said fluid at differing regions about a periphery of said template to produce a turbulent flow of said fluid between said substrate and said template, with said turbulent flow moving a portion of said fluid in said flow between said mold and said substrate to minimize gases positioned between said substrate and said template.
Claim 13
Independent Claim
79 words
A method of introducing a fluid between a mold, disposed on a template, and a substrate, said method comprising: introducing a plurality of flows of said fluid at differing regions about a periphery of said template to produce a turbulent flow of said fluid between said substrate and said template, with said turbulent flow moving a portion of said fluid in said flow between said mold and said substrate to minimize gases positioned between said substrate and said template.
Claim 14
Dependent Claim
36 words
The method as recited in claim 11 wherein introducing further includes introducing said fluid at differing regions about said periphery of said template sequentially to define a sequence of fluid flows that rotates about said periphery.
Claim 15
Dependent Claim
36 words
The method as recited in claim 11 wherein introducing further includes pulsing a flow of said fluid at multiple regions in superimposition with said substrate and located at differing positions about said periphery of said template.
Claim 16
Dependent Claim
42 words
The method as recited in claim 11 wherein pulsing further includes injecting said fluid sequentially through multiple regions at differing positions about said periphery of said template to create a flow cell in ah atmosphere located between said mold and said substrate.
Claim 17
Dependent Claim
30 words
The method as recited in claim 11 wherein introducing further includes sequentially pulsing and evacuating said fluid into a region adjacent to said template and in superimposition with said substrate.
Claim 18
Independent Claim
81 words
A method of introducing a fluid between a mold, disposed on a template, and a substrate, said method comprising: introducing a flow of said fluid into a region adjacent to said template and in superimposition with said substrate to produce a turbulent flow of said fluid between said substrate and said template, with said turbulent flow moving a portion of said fluid in said flow between said mold and said substrate to minimize gases positioned between said substrate and said template.
Claim 19
Independent Claim
81 words
A method of introducing a fluid between a mold, disposed on a template, and a substrate, said method comprising: introducing a flow of said fluid into a region adjacent to said template and in superimposition with said substrate to produce a turbulent flow of said fluid between said substrate and said template, with said turbulent flow moving a portion of said fluid in said flow between said mold and said substrate to minimize gases positioned between said substrate and said template.
Claim 20
Dependent Claim
36 words
The method as recited in claim 16 wherein introducing further includes pulsing said flow of said fluid at multiple regions in superimposition with said substrate and located at differing positions about a periphery of said template.
Claim 21
Dependent Claim
20 words
The method as recited in claim 16 wherein introducing further includes sequentially pulsing and evacuating said fluid into said region.
Claim 22
Dependent Claim
23 words
The method as recited in claim 16 wherein introducing further includes concurrently introducing a plurality of flows of said fluid about said template.
Claim 23
Dependent Claim
26 words
The method as recited in claim 16 wherein introducing further includes sequentially introducing a plurality of flows of said fluid at differing regions about said template.
Claim 24
Dependent Claim
32 words
The method as recited in claim 16 wherein introducing further includes concurrently introducing said flow while evacuating said fluid introduced by said flow at a second region disposed opposite to said flow.
Claim 25
Dependent Claim
22 words
The method as recited in claim 1 wherein the introducing step further comprises the step of minimizing gases positioned within said fluid.
Claim 26
Dependent Claim
22 words
The method as recited in claim 11 wherein the introducing step further comprises the step of minimizing gases positioned within said fluid.
Claim 27
Dependent Claim
22 words
The method as recited in claim 16 wherein the introducing step further comprises the step of minimizing gases positioned within said fluid.
Claim 28
Independent Claim
64 words
A method of introducing a fluid between a mold, disposed on a template, and a substrate, said method comprising: depositing a plurality of spaced-apart discrete droplets of a polymerizable material on the substrate; and controlling a turbulent flow of a fluid between droplets disposed on the substrate to minimize movement of the droplets and to minimize gases positioned between the substrate and the template.
Claim 29
Independent Claim
64 words
A method of introducing a fluid between a mold, disposed on a template, and a substrate, said method comprising: depositing a plurality of spaced-apart discrete droplets of a polymerizable material on the substrate; and controlling a turbulent flow of a fluid between droplets disposed on the substrate to minimize movement of the droplets and to minimize gases positioned between the substrate and the template.
Claim 30
Independent Claim
56 words
A method of introducing a fluid between a mold, disposed on a template, and a substrate, said method comprising: depositing a flowable region on the substrate, wherein the substrate is substantially planar; and controlling a turbulent flow of a fluid between the substrate and the template to minimize gases positioned between said substrate and said mold.
Claim 31
Independent Claim
56 words
A method of introducing a fluid between a mold, disposed on a template, and a substrate, said method comprising: depositing a flowable region on the substrate, wherein the substrate is substantially planar; and controlling a turbulent flow of a fluid between the substrate and the template to minimize gases positioned between said substrate and said mold.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2012-05-11 | 2012-11-10 | 2013-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2016-05-11 | 2016-11-10 | 2017-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2020-05-11 | 2020-11-10 | 2021-05-12 | $7700.00 | Window Closed / Lapsed |