US5950106A
Expired / Lapsed
US
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Method of patterning a metal substrate using spin-on glass as a hard mask
Assignee: GlobalFoundries Inc
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Filing: 1996-05-14
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Granted: 1999-09-07
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Expires: 2016-05-14
Abstract
Abstract A method for patterning an underlying metal substrate includes forming a layer of spin-on glass over the metal substrate, forming a layer of photoresist over the spin-on glass, patterning the photoresist, patterning the spin-on glass using the photoresist as a mask, and patterning the metal substrate by applying an etch using the spin-on glass as a hard mask wherein the etch removes the photoresist and partially removes the spin-on glass. In one embodiment, the spin-on glass is patterned by applying a fluorine-based plasma, an aluminum-based metal substrate is patterned by applying a chlorine-based plasma in which an etch selectivity of the metal substrate to the spin-on glass is at least 10:1, and the spin-on glass is removed by applying another fluorine-based plasma.
Inventors
- 👤 Charles E. May
- 👤 Robert Dawson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 22:37
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/40; H10P76/403; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; H10P50/00; H10P50/71
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
66 words
A method of patterning an underlying substrate, the method comprising: forming a layer of spin-on glass directly on a metal substrate; forming a patterned material directly on the spin-on glass; patterning the spin-on glass using the patterned material as an etch mask; and patterning the metal substrate by applying an etch using the spin-on glass as a hard mask, wherein the etch removes the patterned material.
Claim 2
Independent Claim
66 words
A method of patterning an underlying substrate, the method comprising: forming a layer of spin-on glass directly on a metal substrate; forming a patterned material directly on the spin-on glass; patterning the spin-on glass using the patterned material as an etch mask; and patterning the metal substrate by applying an etch using the spin-on glass as a hard mask, wherein the etch removes the patterned material.
Claim 3
Dependent Claim
42 words
The method of claim 1, wherein patterning the spin-on glass includes applying a second etch, and the method further includes removing the spin-on glass after patterning the metal substrate by applying a third etch using a same etchant as the second etch.
Claim 4
Independent Claim
73 words
A method of patterning an underlying substrate, the method comprising: forming a layer of spin-on glass directly on a metal substrate; forming a layer of photoresist directly on the spin-on glass; patterning the photoresist; patterning the spin-on glass using the photoresist as a mask; and patterning the metal substrate by applying an etch using the spin-on glass as a hard mask, wherein the etch removes the photoresist and partially removes the spin-on glass.
Claim 5
Independent Claim
73 words
A method of patterning an underlying substrate, the method comprising: forming a layer of spin-on glass directly on a metal substrate; forming a layer of photoresist directly on the spin-on glass; patterning the photoresist; patterning the spin-on glass using the photoresist as a mask; and patterning the metal substrate by applying an etch using the spin-on glass as a hard mask, wherein the etch removes the photoresist and partially removes the spin-on glass.
Claim 6
Dependent Claim
19 words
The method of claim 3, wherein the metal substrate includes an aluminum-based layer that is patterned by the etch.
Claim 7
Dependent Claim
34 words
The method of claim 3, further including forming an antireflective coating on the metal substrate, and forming the spin-on glass on the antireflective coating, wherein patterning the metal substrate includes patterning the antireflective coating.
Claim 8
Dependent Claim
19 words
The method of claim 5, wherein the antireflective coating includes titanium-nitride, and the metal substrate includes an aluminum-copper alloy.
Claim 9
Dependent Claim
14 words
The method of claim 3, wherein the metal substrate has a planar top surface.
Claim 10
Dependent Claim
19 words
The method of claim 5, wherein the metal substrate and the antireflective coating each have a planar top surface.
Claim 11
Dependent Claim
25 words
The method of claim 3, wherein patterning the spin-on glass includes applying a fluorine-based plasma, and patterning the metal substrate includes applying a chlorine-based plasma.
Claim 12
Dependent Claim
15 words
The method of claim 3, including removing the spin-on glass after patterning the metal substrate.
Claim 13
Dependent Claim
20 words
The method of claim 10, wherein patterning the spin-on glass and removing the spin-on glass includes applying a same etchant.
Claim 14
Dependent Claim
13 words
The method of claim 11, wherein the same etchant is a fluorine-based plasma.
Claim 15
Dependent Claim
25 words
The method of claim 3, including leaving the spin-on glass attached to the metal substrate as a permanent dielectric layer after patterning the metal substrate.
Claim 16
Dependent Claim
21 words
The method of claim 3, wherein the photoresist is formed with a substantially greater thickness than that of the spin-on glass.
Claim 17
Dependent Claim
38 words
The method of claim 14, wherein the photoresist is formed with a thickness in the range of 5,000 to 15,000 angstroms, and the spin-on glass is formed with a thickness in the range of 500 to 3,000 angstroms.
Claim 18
Dependent Claim
27 words
The method of claim 3, wherein patterning the metal substrate includes removing in the range of 10 to 20 percent of a thickness of the spin-on glass.
Claim 19
Dependent Claim
31 words
The method of claim 3, wherein patterning the spin-on glass includes applying a plasma etch in which an etch selectivity of the spin-on glass to the photoresist is at least 10:1.
Claim 20
Dependent Claim
47 words
The method of claim 3, wherein patterning the metal substrate includes applying a plasma etch in which an etch selectivity of the metal substrate to the spin-on glass is at least 10:1, and an etch selectivity of the photoresist to the metal substrate is at least 1:1.
Claim 21
Dependent Claim
80 words
The method of claim 3, wherein the metal substrate is an aluminum-based metal, patterning the spin-on glass includes applying a fluorine-based plasma in which an etch selectivity of the spin-on glass to the photoresist is at least 10:1, and patterning the metal substrate includes applying a chlorine-based plasma in which an etch selectivity of the aluminum-based metal to the spin-on glass is at least 10:1 and an etch selectivity of the photoresist to the aluminum-based metal is at least 1:1.
Claim 22
Dependent Claim
48 words
The method of claim 19, wherein prior to applying the chlorine-based plasma, a thickness of the spin-on glass is in the range of 100 to 1,000 angstroms greater than a thickness of the aluminum-based metal divided by the etch selectivity of the aluminum-based metal to the spin-on glass.
Claim 23
Independent Claim
85 words
A method of patterning an underlying metal substrate, the method comprising: dispensing a layer of spin-on glass directly on a metal substrate; curing the spin-on glass; dispensing a layer of photoresist directly on the spin-on glass; patterning the photoresist; patterning the spin-on glass by applying a fluorine-based plasma using the photoresist as a mask; and patterning the metal substrate by applying a chlorine-based plasma using the spin-on glass as a hard mask, wherein the chlorine-based plasma removes the photoresist and partially removes the spin-on glass.
Claim 24
Independent Claim
85 words
A method of patterning an underlying metal substrate, the method comprising: dispensing a layer of spin-on glass directly on a metal substrate; curing the spin-on glass; dispensing a layer of photoresist directly on the spin-on glass; patterning the photoresist; patterning the spin-on glass by applying a fluorine-based plasma using the photoresist as a mask; and patterning the metal substrate by applying a chlorine-based plasma using the spin-on glass as a hard mask, wherein the chlorine-based plasma removes the photoresist and partially removes the spin-on glass.
Claim 25
Dependent Claim
32 words
The method of claim 21, wherein the spin-on glass is dispensed on a layer of antireflective coating formed on the metal substrate, and patterning the metal substrate includes patterning the antireflective coating.
Claim 26
Dependent Claim
21 words
The method of claim 21, including removing the spin-on glass after patterning the metal substrate by applying a second fluorine-based plasma.
Claim 27
Dependent Claim
41 words
The method of claim 22, including removing the spin-on glass after patterning the metal substrate by applying a second fluorine-based plasma, and leaving the antireflective coating exposed by the second fluorine-based plasma attached to the metal substrate as a barrier layer.
Claim 28
Dependent Claim
11 words
The method of claim 24, wherein the antireflective coating is titanium-nitride.
Claim 29
Dependent Claim
25 words
The method of claim 21, including leaving the spin-on glass attached to the metal substrate as a permanent dielectric layer after patterning the metal substrate.
Claim 30
Dependent Claim
45 words
The method of claim 21, wherein an etch selectivity of the spin-on glass to the photoresist while applying the fluorine-based plasma is at least 10:1, and an etch selectivity of the substrate to the spin-on glass while applying the chlorine-based plasma is at least 10:1.
Claim 31
Dependent Claim
29 words
The method of claim 27, wherein an etch selectivity of the photoresist to the metal substrate while applying the chlorine-based plasma is in the range of 1:1 to 5:1.
Claim 32
Independent Claim
172 words
A method of patterning an underlying aluminum-based layer during manufacture of an integrated circuit, the method comprising in sequence: forming an aluminum-based layer directly on a semiconductor base; dispensing a layer of spin-on glass directly on the aluminum-based layer; curing the spin-on glass, wherein the cured spin-on glass has a thickness in the range of 500 to 5,000 angstroms; dispensing a layer of photoresist directly on the spin-on glass; patterning the photoresist by exposing selected areas of the photoresist to light and then immersing the photoresist in a developer solution, wherein the patterned photoresist has a thickness in the range of 5,000 to 15,000 angstroms; patterning the spin-on glass by applying a fluorine-based plasma using the photoresist as a mask, thereby partially removing the photoresist; and patterning the aluminum-based layer by applying a chlorine-based plasma using the spin-on glass as a hard mask, wherein the chlorine-based plasma removes the photoresist and partially removes the spin-on glass, and an etch selectivity of the aluminum-based layer to the spin-on glass is at least 10:1.
Claim 33
Independent Claim
172 words
A method of patterning an underlying aluminum-based layer during manufacture of an integrated circuit, the method comprising in sequence: forming an aluminum-based layer directly on a semiconductor base; dispensing a layer of spin-on glass directly on the aluminum-based layer; curing the spin-on glass, wherein the cured spin-on glass has a thickness in the range of 500 to 5,000 angstroms; dispensing a layer of photoresist directly on the spin-on glass; patterning the photoresist by exposing selected areas of the photoresist to light and then immersing the photoresist in a developer solution, wherein the patterned photoresist has a thickness in the range of 5,000 to 15,000 angstroms; patterning the spin-on glass by applying a fluorine-based plasma using the photoresist as a mask, thereby partially removing the photoresist; and patterning the aluminum-based layer by applying a chlorine-based plasma using the spin-on glass as a hard mask, wherein the chlorine-based plasma removes the photoresist and partially removes the spin-on glass, and an etch selectivity of the aluminum-based layer to the spin-on glass is at least 10:1.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-09-06 | 2003-03-08 | 2003-09-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-06 | 2007-03-08 | 2007-09-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-06 | 2011-03-08 | 2011-09-07 | $7700.00 | Window Closed / Lapsed |