Patent US6289732B1 successfully refreshed from Google Patents.
US6289732B1
Expired / Lapsed
US
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Hermetically sealed semiconductor inertial sensor
Assignee: STMicroelectronics SRL
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Filing: 1997-12-09
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Granted: 2001-09-18
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Expires: 2017-12-09
Abstract
Abstract An inertial sensor has a sensing element formed on one surface of a chip of semiconductor material and which is movable with respect to the chip. The sensing element is enclosed in a sealed hollow structure, in which the hollow structure includes a metal wall disposed on the surface around the sensing element, and a closure plate fixed to the wall.
Inventors
- 👤 Bruno Murari
- 👤 Paolo Ferrari
- 👤 Benedetto Vigna
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 08:29
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/0802; G01P1/00; G01P1/02; G01P1/023
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
85 words
A monolithic integrated circuit inertial sensor comprising: a monolithic integrated circuit substrate comprising semiconductor material; an inertial sensing element on a surface of said substrate and movable with respect thereto; and a hollow structure enclosing said inertial sensing element, said hollow structure comprising a metal wall disposed on the surface of said substrate around said inertial sensing element, said metal wall having a height at least as great as a height of said inertial sensing element, and a closure plate fixed to said metal wall.
Claim 2
Dependent Claim
85 words
A monolithic integrated circuit inertial sensor comprising: a monolithic integrated circuit substrate comprising semiconductor material; an inertial sensing element on a surface of said substrate and movable with respect thereto; and a hollow structure enclosing said inertial sensing element, said hollow structure comprising a metal wall disposed on the surface of said substrate around said inertial sensing element, said metal wall having a height at least as great as a height of said inertial sensing element, and a closure plate fixed to said metal wall.
Claim 3
Dependent Claim
19 words
A monolithic intergrated circuit inertial sensor according to claim 1 , wherein said metal wall compreses a welding alloy.
Claim 4
Dependent Claim
19 words
A monolithic intergrated circuit inertial sensor according to claim 1 , wherein said closure plate comprises a metal material.
Claim 5
Dependent Claim
19 words
A monolithic intergrated circuit inertial sensor according to claim 1 , wherein said closure plate comprises a polymeric material.
Claim 6
Dependent Claim
20 words
A monolithic intergrated circuit inertial sensor according to claim 1 , further comprising a processing circuit formed in said substrate.
Claim 7
Dependent Claim
26 words
A monolithic intergrated circuit inertial sensor according to claim 1 , further comprising a plastic container encapsulating said substrate, said sensing element, and said hollow structure.
Claim 8
Dependent Claim
82 words
A monolithic integrated circuit inertial sensor comprising: a monolithic integrated circuit substrate comprising semiconductor material; an inertial sensing element on a surface of said substrate and movable with respect thereto; a hollow structure enclosing said inertial sensing element and connected to said substrate, said hollow structure comprising a wall disposed on the surface of said substrate about said inertial sensing element, and a closure plate on said wall; and a processing circuit in said substrate and connected to said inertial sensing element.
Claim 9
Dependent Claim
82 words
A monolithic integrated circuit inertial sensor comprising: a monolithic integrated circuit substrate comprising semiconductor material; an inertial sensing element on a surface of said substrate and movable with respect thereto; a hollow structure enclosing said inertial sensing element and connected to said substrate, said hollow structure comprising a wall disposed on the surface of said substrate about said inertial sensing element, and a closure plate on said wall; and a processing circuit in said substrate and connected to said inertial sensing element.
Claim 10
Dependent Claim
16 words
A monolithic intergrated circuit inertial sensor according to claim 7 , wherein said wall comprises metal.
Claim 11
Dependent Claim
18 words
A monolithic intergrated circuit inertial sensor according to claim 7 , wherein said wall comprises a welding alloy.
Claim 12
Dependent Claim
19 words
A monolithic intergrated circuit inertial sensor according to claim 7 , wherein said closure plate comprises a metal material.
Claim 13
Dependent Claim
19 words
A monolithic intergrated circuit inertial sensor according to claim 7 , wherein said closure plate comprises a polymeric material.
Claim 14
Dependent Claim
26 words
A monolithic intergrated circuit inertial sensor according to claim 7 , further comprising a plastic container encapsulating said substrate, said sensing element, and said hollow structure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-09-17 | 2005-03-19 | 2005-09-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-09-17 | 2009-03-19 | 2009-09-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-09-17 | 2013-03-19 | 2013-09-18 | $7700.00 | Window Closed / Lapsed |