US6565928B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Film forming method and film forming apparatus
Assignee: Tokyo Electron Ltd
•
Filing: 2001-07-16
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Granted: 2003-05-20
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Expires: 2021-07-16
Abstract
Abstract A polyimide solution is supplied to a wafer and the wafer is rotated by means of a spin chuck, thereby forming a polyimide film on the wafer. An irradiator for irradiating a laser beam to a peripheral portion of the wafer W is provided. After the polyimide film is formed and side rinse is performed, a laser beam is irradiated to the peripheral portion to solidify the film at the peripheral portion. The solidified polyimide film forms a weir, thus preventing the polyimide solution which has not dried yet from flowing out toward a peripheral edge portion.
Inventors
- 👤 Yasuhiro Sakamoto
- 👤 Hidetami Yaegashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 01:13
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0448; B; B05; B05D; B05D1/00; B05D1/002; B05D1/005; B05D3/00; B05D3/06
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
159 words
A film forming method, comprising the steps of: feeding a processing solution onto a surface of a substrate; rotating the substrate to disperse the processing solution, thereby forming a film of the processing solution which covers the entire surface of the substrate; removing the film of the processing solution formed at a peripheral edge portion of the substrate; solidifying the film of the processing solution formed at only a peripheral portion on an inside of the peripheral edge of the substrate, wherein the removing step and the solidifying step are carried out after the processing solution has covered the entire surface of the substrate; and wherein the removing step is carried out simultaneously with the solidifying step, by concurrently irradiating a first beam and a second beam to the film, the first beam being irradiated to a portion of the film to be removed, and the second beam being irradiated to a portion of the film to be solidified.
Claim 2
Dependent Claim
159 words
A film forming method, comprising the steps of: feeding a processing solution onto a surface of a substrate; rotating the substrate to disperse the processing solution, thereby forming a film of the processing solution which covers the entire surface of the substrate; removing the film of the processing solution formed at a peripheral edge portion of the substrate; solidifying the film of the processing solution formed at only a peripheral portion on an inside of the peripheral edge of the substrate, wherein the removing step and the solidifying step are carried out after the processing solution has covered the entire surface of the substrate; and wherein the removing step is carried out simultaneously with the solidifying step, by concurrently irradiating a first beam and a second beam to the film, the first beam being irradiated to a portion of the film to be removed, and the second beam being irradiated to a portion of the film to be solidified.
Claim 3
Dependent Claim
25 words
The method as set forth in claim 1 , wherein the removing step and the solidifying step are carried out with the substrate being rotated.
Claim 4
Dependent Claim
33 words
The method as set forth in claim 1 , wherein the first beam is irradiated by means of a first irradiator and the second beam is irradiated by means of a second irradiator.
Claim 5
Dependent Claim
35 words
The method as set forth in claim 1 , wherein the first beam is a laser beam, and the second beam is a laser beam which is different in output power from the first beam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2006-05-19 | 2006-11-18 | 2007-05-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-05-19 | 2010-11-18 | 2011-05-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-05-19 | 2014-11-18 | 2015-05-20 | $7700.00 | Window Closed / Lapsed |