Patent US6964793B2 successfully refreshed from Google Patents.
US6964793B2
Expired / Lapsed
US
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Method for fabricating nanoscale patterns in light curable compositions using an electric field
Assignee: The University of Texas System
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Filing: 2002-05-16
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Granted: 2005-11-15
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Expires: 2022-05-16
Abstract
Abstract A high-throughput lithography process for creating high-resolution patterns in a polymerizable composition using carefully controlled electric field followed by curing of the polymerizable composition is described. The process involves the use of a template that includes the desired patterns. This template is brought into close proximity to the polymerizable composition on the substrate. An external electric file is applied to the template-substrate interface while maintaining a uniform, carefully controlled gap between the template and substrate. This causes the polymerizable composition to be attracted to the raised portions of the template. By appropriately choosing the various process parameters such as the viscosity of the polymerizable composition, the magnitude of the electric field, and the distance between the template and substrate, the resolution of the structures formed in the liquid may be controlled to conform to that of the template.
Inventors
- 👤 Carlton Grant Willson
- 👤 Sidlgata V. Sreenivasan
- 👤 Roger T. Bonnecaze
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 10:16
CPC Classifications
B; B81; B81C; B81C1/00; B81C1/00436; B81C1/00444; B81C1/0046; B05; B05D; B05D3/00; B05D3/06; B05D3/061; B05D3/065; B05D3/067; B05D3/14; B05D3/141; B05D3/145; B29; B29C; B29C43/00; B29C43/003; B82; B82Y; B82Y10/00; B82Y40/00; G; G03; G03F; G03F7/00; G03F7/0002; B05D1/00; B05D1/40; B29C43/02; B29C43/021; B29C2043/023; B29C2043/025; B29C43/32; B29C2043/3205; B29C2043/3211
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
96 words
A method of creating a pattern on a body, said method comprising: arranging a liquid to be between a template and said body; orienting said template proximate to said liquid; and moving a portion of said liquid between said template and said body to form a contiguous region of said liquid between two spaced-apart electric field gradients, with each of said electric field gradients being defined by first and second electric fields, with said first electric field being adjacent to said second electric field and said first electric field being greater than said second electric field.
Claim 2
Independent Claim
96 words
A method of creating a pattern on a body, said method comprising: arranging a liquid to be between a template and said body; orienting said template proximate to said liquid; and moving a portion of said liquid between said template and said body to form a contiguous region of said liquid between two spaced-apart electric field gradients, with each of said electric field gradients being defined by first and second electric fields, with said first electric field being adjacent to said second electric field and said first electric field being greater than said second electric field.
Claim 3
Dependent Claim
29 words
The method as recited in claim 1 , wherein said pattern comprises a topology selected from a group of topologies consisting essentially of recessed and protruded, smooth, and planarized.
Claim 4
Dependent Claim
27 words
The method as recited in claim 1 , wherein moving said portion of said liquid further includes moving said portion away from said body, toward said template.
Claim 5
Dependent Claim
13 words
The method as recited in claim 1 , further includes solidifying said liquid.
Claim 6
Dependent Claim
25 words
The method as recited in claim 4 , wherein solidifying further includes solidifying said liquid in the presence of said first and second electric fields.
Claim 7
Dependent Claim
37 words
The method as recited in claim 1 , wherein said template further includes a surface facing said body and moving paid portion of said liquid further includes applying said first, and second electric fields to said surface.
Claim 8
Dependent Claim
25 words
The method as recited in claim 1 , wherein arranging said liquid further includes arranging a low viscosity liquid between said template and said body.
Claim 9
Dependent Claim
18 words
The method as recited in claim 1 , further including providing said template with an electrically conducting material.
Claim 10
Independent Claim
97 words
A method of creating a pattern on a body, said method comprising: disposing a liquid between a template and said body; orientating said template proximate to said liquid; and moving a portion of said liquid between said template and said body toward said template to form a contiguous region of said liquid between two spaced-apart electric field gradients, with each of said electric field gradients being defined by first and second electric fields, with said first electric field being adjacent to said second electric field and said first electric field being greater than said second electric field.
Claim 11
Independent Claim
97 words
A method of creating a pattern on a body, said method comprising: disposing a liquid between a template and said body; orientating said template proximate to said liquid; and moving a portion of said liquid between said template and said body toward said template to form a contiguous region of said liquid between two spaced-apart electric field gradients, with each of said electric field gradients being defined by first and second electric fields, with said first electric field being adjacent to said second electric field and said first electric field being greater than said second electric field.
Claim 12
Dependent Claim
29 words
The method as recited in claim 9 , wherein said pattern comprises a topology selected from a group of topologies consisting essentially of recessed and protruded, smoothed, and planarized.
Claim 13
Dependent Claim
28 words
The method as recited in claim 9 , wherein moving said portion of said liquid causes said portion of said liquid to contact a portion of said template.
Claim 14
Dependent Claim
19 words
The method as recited in claim 9 further including polymerizing said liquid, with said liquid comprising a polymerizable composition.
Claim 15
Dependent Claim
23 words
The method as recited in claim 12 , wherein polymerizing said liquid occurs in the presence of said first and second electric fields.
Claim 16
Independent Claim
97 words
A method of creating a pattern on a body, said method comprising: disposing a polymerizable liquid on said body; orientating said a template proximate to said polymerizable liquid; moving a portion of said polymerizable liquid toward said template to form a contiguous region of said polymerizable liquid between two spaced-apart electric field gradients, with each of said electric field gradients being defined by first and second electric fields, with said first electric field being adjacent to said second electric field and said first electric field being greater than said second electric field; and polymerizing said polymerizable liquid.
Claim 17
Independent Claim
97 words
A method of creating a pattern on a body, said method comprising: disposing a polymerizable liquid on said body; orientating said a template proximate to said polymerizable liquid; moving a portion of said polymerizable liquid toward said template to form a contiguous region of said polymerizable liquid between two spaced-apart electric field gradients, with each of said electric field gradients being defined by first and second electric fields, with said first electric field being adjacent to said second electric field and said first electric field being greater than said second electric field; and polymerizing said polymerizable liquid.
Claim 18
Dependent Claim
19 words
The method as recited in claim 14 , wherein disposing said liquid further includes disposing a low viscosity liquid.
Claim 19
Dependent Claim
18 words
The method as recited in claim 14 , further includes providing said template with an electrically conducting material.
Claim 20
Dependent Claim
20 words
The method as recited in claim 14 , wherein polymerizing said liquid occurs in the presence of said electric field.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2008-11-14 | 2009-05-16 | 2009-11-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-11-14 | 2013-05-16 | 2013-11-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2016-11-14 | 2017-05-16 | 2017-11-15 | $7700.00 | Window Closed / Lapsed |