Patent US7316554B2 successfully refreshed from Google Patents.
US7316554B2
Expired / Lapsed
US
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System to control an atmosphere between a body and a substrate
Assignee: Canon Nanotechnologies Inc
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Filing: 2005-09-21
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Granted: 2008-01-08
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Expires: 2025-09-21
Abstract
Abstract The present invention is directed towards a system to control an atmosphere about a substrate, the system including, inter alia, a body spaced-apart from a surface of the substrate a distance; a supply of fluid coupled to introduce a flow between the body and the substrate; and a wall coupled to the body to create a resistance of the flow between first and second regions of the substrate, with a position of the wall being varied in response to a decrease in a magnitude of the distance.
Inventors
- 👤 Yeong-jun Choi
- 👤 Byung-Jin Choi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 21:15
CPC Classifications
B; B29; B29C; B29C43/00; B29C43/02; B29C43/021; B29C43/003; B29C43/32; B29C43/56; B82; B82Y; B82Y10/00; B82Y40/00; G; G03; G03F; G03F7/00; G03F7/0002; B29C2043/023; B29C2043/025; B29C43/14; B29C2043/141; B29C2043/142; B29C2043/566
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
92 words
A system to control an atmosphere about a substrate, said system comprising: a body spaced-apart from a surface of said substrate a first distance; a supply of fluid coupled to introduce a flow between said body and said substrate; and a wall, spaced-apart from said surface of said substrate a second distance, coupled to said body to create a resistance of said flow between first and second regions of said substrate, with a magnitude of said second distance being increased in response to a decrease in a magnitude of said first distance.
Claim 2
Independent Claim
92 words
A system to control an atmosphere about a substrate, said system comprising: a body spaced-apart from a surface of said substrate a first distance; a supply of fluid coupled to introduce a flow between said body and said substrate; and a wall, spaced-apart from said surface of said substrate a second distance, coupled to said body to create a resistance of said flow between first and second regions of said substrate, with a magnitude of said second distance being increased in response to a decrease in a magnitude of said first distance.
Claim 3
Dependent Claim
17 words
The system as recited in claim 1 further including a plurality of walls coupled to said body.
Claim 4
Dependent Claim
26 words
The system as recited in claim 1 wherein said supply of fluid further includes a conduit to introduce said fluid between said body and said substrate.
Claim 5
Dependent Claim
31 words
The system as recited in claim 1 wherein said supply of fluid further includes a plurality of conduits at differing locations to introduce said fluid between said body and said substrate.
Claim 6
Dependent Claim
25 words
The system as recited in claim 1 wherein said fluid is selected from a group of gases including helium, hydrogen, nitrogen, carbon dioxide, and xenon.
Claim 7
Dependent Claim
18 words
The system as recited in claim 3 further including a pump system in fluid communication with said conduit.
Claim 8
Dependent Claim
33 words
The system as recited in claim 1 further including a motor in communication with said wall, with said motor being a solenoid selected from a group of solenoids comprising electric, pneumatic, and hydraulic.
Claim 9
Dependent Claim
16 words
The system as recited in claim 1 wherein said body comprises a template including a mold.
Claim 10
Dependent Claim
17 words
The system as recited in claim 1 wherein said wall surrounds a portion of said first region.
Claim 11
Independent Claim
104 words
A system to control an atmosphere about a substrate, said system comprising: a body spaced-apart from a surface of said substrate a first distance; a supply of fluid coupled to introduce a flow between said body and said substrate; and a wall, spaced-apart from said surface of said substrate a second distance, coupled to said body to create a resistance of said flow between first and second regions of said substrate, with a magnitude of said second distance being increased in response to a decrease in a magnitude of said first distance to minimize a probability of contact between said wall and said substrate.
Claim 12
Independent Claim
104 words
A system to control an atmosphere about a substrate, said system comprising: a body spaced-apart from a surface of said substrate a first distance; a supply of fluid coupled to introduce a flow between said body and said substrate; and a wall, spaced-apart from said surface of said substrate a second distance, coupled to said body to create a resistance of said flow between first and second regions of said substrate, with a magnitude of said second distance being increased in response to a decrease in a magnitude of said first distance to minimize a probability of contact between said wall and said substrate.
Claim 13
Dependent Claim
17 words
The system as recited in claim 10 further including a plurality of walls coupled to said body.
Claim 14
Dependent Claim
26 words
The system as recited in claim 10 wherein said supply of fluid further includes a conduit to introduce said fluid between said body and said substrate.
Claim 15
Dependent Claim
31 words
The system as recited in claim 10 wherein said supply of fluid further includes a plurality of conduits at differing locations to introduce said fluid between said body and said substrate.
Claim 16
Dependent Claim
25 words
The system as recited in claim 10 wherein said fluid is selected from a group of gases including helium, hydrogen, nitrogen, carbon dioxide, and xenon.
Claim 17
Dependent Claim
18 words
The system as recited in claim 12 further including a pump system in fluid communication with said conduit.
Claim 18
Dependent Claim
33 words
The system as recited in claim 10 further including a motor in communication with said wall, with said motor being a solenoid selected from a group of solenoids comprising electric, pneumatic, and hydraulic.
Claim 19
Independent Claim
105 words
A system to control an atmosphere about a substrate, said system comprising: a body spaced-apart from a surface of said substrate a first distance; a conduit in fluid communication with a pump system coupled to introduce a flow between said body and said substrate; and a wall, spaced-apart from said surface of said substrate a second distance, coupled to said body to create a resistance to said flow between first and second regions of said substrate to control said atmosphere about said first region, with a magnitude of said second distance being increased in response to a decrease in a magnitude of said first distance.
Claim 20
Independent Claim
105 words
A system to control an atmosphere about a substrate, said system comprising: a body spaced-apart from a surface of said substrate a first distance; a conduit in fluid communication with a pump system coupled to introduce a flow between said body and said substrate; and a wall, spaced-apart from said surface of said substrate a second distance, coupled to said body to create a resistance to said flow between first and second regions of said substrate to control said atmosphere about said first region, with a magnitude of said second distance being increased in response to a decrease in a magnitude of said first distance.
Claim 21
Dependent Claim
17 words
The system as recited in claim 17 further including a plurality of walls coupled to said body.
Claim 22
Dependent Claim
16 words
The system as recited in claim 18 further including a plurality of conduits at differing locations.
Claim 23
Dependent Claim
25 words
The system as recited in claim 19 wherein said fluid is selected from a group of gases including helium, hydrogen, nitrogen, carbon dioxide, and xenon.
Claim 24
Dependent Claim
24 words
The system as recited in claim 17 wherein said fluid is selected from a group of gases including helium, hydrogen, carbon dioxide, and xenon.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2011-01-07 | 2011-07-09 | 2012-01-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2015-01-07 | 2015-07-09 | 2016-01-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2019-01-07 | 2019-07-09 | 2020-01-08 | $7700.00 | Window Closed / Lapsed |