US7090716B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Single phase fluid imprint lithography method
Assignee: Canon Nanotechnologies Inc
•
Filing: 2003-10-02
•
Granted: 2006-08-15
•
Expires: 2023-10-02
Abstract
Abstract The present invention is directed toward a method for reducing pattern distortions in imprinting layers by reducing gas pockets present in a layer of viscous liquid deposited on a substrate. To that end, the method includes varying a transport of the gases disposed proximate to the viscous liquid. Specifically, the atmosphere proximate to the substrate wherein a pattern is to be recorded is saturated with gases that are either highly soluble, highly diffusive, or both with respect to the viscous liquid being deposited. Additionally, or in lieu of saturating the atmosphere, the pressure of the atmosphere may be reduced.
Inventors
- 👤 Ian M. McMackin
- 👤 Nicholas A. Stacey
- 👤 Daniel A. Babbs
- 👤 Duane J. Voth
- 👤 Michael P. C. Watts
- 👤 Van N. Truskett
- 👤 Frank Y. Xu
- 👤 Ronald D. Voisin
- 👤 Pankaj B. Lad
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 13:19
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B81; B81C; B81C1/00; B81C1/00436; B81C1/00444; B81C1/0046; B82; B82Y; B82Y10/00; B82Y40/00; Y; Y10; Y10S; Y10S425/00; Y10S425/06; Y10S425/815; Y10S438/00; Y10S438/909
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
40 words
A method for reducing gases present in a layer of viscous liquid deposited on a substrate, said method comprising: varying a transport of gases proximate to said viscous liquid to increase said transport of said gases in said viscous liquid.
Claim 2
Independent Claim
40 words
A method for reducing gases present in a layer of viscous liquid deposited on a substrate, said method comprising: varying a transport of gases proximate to said viscous liquid to increase said transport of said gases in said viscous liquid.
Claim 3
Dependent Claim
38 words
The method as recited in claim 1 wherein said transport is selected from a set of transports consisting essentially of a solubility of said gases in said viscous liquid and diffusion of said gases in said viscous liquid.
Claim 4
Dependent Claim
26 words
The method as recited in claim 1 further including controlling an atmosphere proximate to said substrate by introducing a fluid, therein, saturated with said viscous liquid.
Claim 5
Dependent Claim
19 words
The method as recited in claim 1 further including reducing a pressure of an atmosphere proximate to said substrate.
Claim 6
Independent Claim
62 words
A method for reducing gases present in viscous liquid deposited on a substrate, said method comprising: defining a processing region proximate to said substrate by placing a template in close proximity with said viscous liquid, said processing region having an atmosphere associated therewith; and varying characteristics of said atmosphere to increase a transport of gases in said atmosphere to said viscous liquid.
Claim 7
Independent Claim
62 words
A method for reducing gases present in viscous liquid deposited on a substrate, said method comprising: defining a processing region proximate to said substrate by placing a template in close proximity with said viscous liquid, said processing region having an atmosphere associated therewith; and varying characteristics of said atmosphere to increase a transport of gases in said atmosphere to said viscous liquid.
Claim 8
Dependent Claim
21 words
The method as recited in claim 5 wherein varying further includes increasing a solubility of said atmosphere in said viscous liquid.
Claim 9
Dependent Claim
20 words
The method as recited in claim 5 wherein varying further includes increasing diffusion of said atmosphere in said viscous liquid.
Claim 10
Dependent Claim
29 words
The method as recited in claim 5 wherein varying further includes introducing, into said atmosphere, a gas selected from a set of gasses consisting of carbon dioxide and helium.
Claim 11
Dependent Claim
15 words
The method as recited in claim 8 further including reducing a pressure of said atmosphere.
Claim 12
Independent Claim
71 words
A method for reducing gases present in a layer of viscous liquid deposited on a substrate, said method comprising: placing a template in close proximity with said substrate, defining a processing region therebetween having an atmosphere associated therewith; introducing a fluid into said atmosphere to increase a transport of said gases in said viscous liquid; and reducing a pressure of said processing region by applying a vacuum to said processing region.
Claim 13
Independent Claim
71 words
A method for reducing gases present in a layer of viscous liquid deposited on a substrate, said method comprising: placing a template in close proximity with said substrate, defining a processing region therebetween having an atmosphere associated therewith; introducing a fluid into said atmosphere to increase a transport of said gases in said viscous liquid; and reducing a pressure of said processing region by applying a vacuum to said processing region.
Claim 14
Dependent Claim
21 words
The method as recited in claim 10 wherein introducing further includes increasing a solubility of said atmosphere in said viscous liquid.
Claim 15
Dependent Claim
20 words
The method as recited in claim 10 wherein introducing further includes increasing diffusion of said atmosphere in said viscous liquid.
Claim 16
Dependent Claim
25 words
The method as recited in claim 10 wherein introducing further includes introducing said fluid into said atmosphere to saturate said atmosphere with said viscous liquid.
Claim 17
Independent Claim
39 words
A method for reducing gases present in a layer of viscous liquid deposited on a substrate, said method comprising: varying a composition of gases proximate to said viscous liquid to increase transport of said gases in said viscous liquid.
Claim 18
Independent Claim
39 words
A method for reducing gases present in a layer of viscous liquid deposited on a substrate, said method comprising: varying a composition of gases proximate to said viscous liquid to increase transport of said gases in said viscous liquid.
Claim 19
Dependent Claim
42 words
The method as recited in claim 14 wherein varying further includes introducing into said gases, defining initial gases, an additional gas having a solubility in said viscous liquid that is greater than a solubility of said initial gases in said viscous liquid.
Claim 20
Dependent Claim
42 words
The method as recited in claim 14 wherein varying further includes introducing into said gases, defining initial gases, an additional gas having a diffusivity in said viscous liquid that is greater than a diffusivity of said initial gases in said viscous liquid.
Claim 21
Dependent Claim
28 words
The method as recited in claim 14 wherein varying further includes controlling an atmosphere proximate to said substrate by introducing a fluid, therein, saturated with said viscous liquid.
Claim 22
Dependent Claim
19 words
The method as recited in claim 14 further including reducing a pressure of an atmosphere proximate to said substrate.
Claim 23
Dependent Claim
27 words
The method as recited in claim 15 wherein introducing further includes introducing said additional gas selected from a set of gases consisting of carbon dioxide and helium.
Claim 24
Dependent Claim
27 words
The method as recited in claim 16 wherein introducing further includes introducing said additional gas selected from a set of gases consisting of carbon dioxide and helium.
Claim 25
Dependent Claim
23 words
The method as recited in claim 14 wherein varying further includes saturating an atmosphere proximate to said viscous liquid with a helium gas.
Claim 26
Dependent Claim
23 words
The method as recited in claim 1 wherein varying further includes introducing an atmosphere proximate to said viscous liquid with a helium gas.
Claim 27
Dependent Claim
23 words
The method as recited in claim 1 wherein varying further includes saturating an atmosphere proximate to said viscous liquid with a helium gas.
Claim 28
Dependent Claim
16 words
The method as recited in claim 1 further including solidifying a pattern into said viscous liquid.
Claim 29
Dependent Claim
18 words
The method as recited in claim 5 further including forming, from said viscous liquid, a solidified patterned layer.
Claim 30
Independent Claim
26 words
A method for reducing gases present in a viscous liquid deposited on a substrate, said method comprising: generating a helium-containing atmosphere proximate to said viscous liquid.
Claim 31
Independent Claim
26 words
A method for reducing gases present in a viscous liquid deposited on a substrate, said method comprising: generating a helium-containing atmosphere proximate to said viscous liquid.
Claim 32
Dependent Claim
27 words
The method as recited in claim 26 wherein generating further includes varying a composition of gases disposed proximate to said viscous liquid with additional gases including helium.
Claim 33
Dependent Claim
30 words
The method as recited in claim 26 wherein generating further includes removing gases proximate to said viscous liquid, defining evacuated gases, and introducing proximate to said viscous liquid helium-containing gases.
Claim 34
Dependent Claim
41 words
The method as recited in claim 26 wherein generating further includes removing gases in a processing region proximate to said viscous liquid, defining evacuated gases, and introducing into said processing region helium-containing gases to saturate said processing region with helium gas.
Claim 35
Dependent Claim
18 words
The method as recited in claim 26 further including forming, from said viscous liquid, a solidified patterned layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2009-08-14 | 2010-02-13 | 2010-08-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2013-08-14 | 2014-02-13 | 2014-08-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2017-08-14 | 2018-02-13 | 2018-08-15 | $7700.00 | Window Closed / Lapsed |