US7641840B2
Active / In Force
US
⏱️ 0.5 years remaining
Method for expelling gas positioned between a substrate and a mold
Assignee: Canon Nanotechnologies Inc
•
Filing: 2007-05-17
•
Granted: 2010-01-05
•
Expires: 2027-05-17
Abstract
Abstract The present invention is directed towards a method of expelling a gas positioned between a substrate and a mold, the substrate and the mold further having a liquid positioned therebetween.
Inventors
- 👤 Byung-Jin Choi
- 👤 Mahadevan GanapathiSubramanian
- 👤 Yeong-jun Choi
- 👤 Mario J. Meissl
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:49
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B82; B82Y; B82Y10/00; B82Y40/00
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
206 words
A method for expelling a gas positioned between a substrate and a mold assembly, substrate and mold assembly further having droplets of a liquid positioned therebetween, the method comprising the steps of: positioning the mold assembly and the substrate such that the mold assembly is proximate to a surface of the substrate, the surface of the substrate having droplets of liquid positioned thereon, the mold assembly having a first region, a second region, and a third region, the second region surrounding the first region and the third region surrounding the first and second regions; altering a shape of the mold assembly by bowing the first and third regions away from the substrate to bow the second region toward the substrate to decrease a gap defined between the second region of the mold assembly and the substrate; contacting a sub-portion of the droplets of liquid with the second region of the mold assembly prior to contacting remaining droplets of liquid with the second region, such that the gas expels from between the substrate and the mold assembly and the droplets of liquid fill a volume defined between the mold assembly and substrate; and, contacting the remaining droplets of liquid with the second region of the mold assembly.
Claim 2
Independent Claim
206 words
A method for expelling a gas positioned between a substrate and a mold assembly, substrate and mold assembly further having droplets of a liquid positioned therebetween, the method comprising the steps of: positioning the mold assembly and the substrate such that the mold assembly is proximate to a surface of the substrate, the surface of the substrate having droplets of liquid positioned thereon, the mold assembly having a first region, a second region, and a third region, the second region surrounding the first region and the third region surrounding the first and second regions; altering a shape of the mold assembly by bowing the first and third regions away from the substrate to bow the second region toward the substrate to decrease a gap defined between the second region of the mold assembly and the substrate; contacting a sub-portion of the droplets of liquid with the second region of the mold assembly prior to contacting remaining droplets of liquid with the second region, such that the gas expels from between the substrate and the mold assembly and the droplets of liquid fill a volume defined between the mold assembly and substrate; and, contacting the remaining droplets of liquid with the second region of the mold assembly.
Claim 3
Dependent Claim
101 words
The method as recited in claim 1 wherein the step of altering the shape further comprises a step of creating a first pressure differential between a first chamber defined between a portion of a chuck coupled to the mold assembly and the first region of the mold assembly and a second chamber defined between a portion of the chuck and the second region of the mold assembly and creating a second pressure differential between the second chamber and a third chamber defined between a portion of a chuck coupled to the mold assembly and the third region of the mold assembly.
Claim 4
Dependent Claim
70 words
The method as recited in claim 1 wherein the step of altering the shape further comprises a step of subjecting a first chamber defined between a portion of a chuck coupled to the mold assembly and the first region of the mold assembly and an additional chamber defined between a portion of the chuck coupled to the mold assembly and the third region of the mold assembly to a vacuum.
Claim 5
Dependent Claim
35 words
The method as recited in claim 1 wherein the step of contacting the sub-portion further comprises a step of contacting a region of the liquid in superimposition with the second region of the mold assembly.
Claim 6
Dependent Claim
40 words
The method as recited in claim 1 further including applying a pressure between the substrate and the mold assembly in superimposition with the first region of the mold assembly to separate the mold assembly from the liquid on the substrate.
Claim 7
Dependent Claim
22 words
The method as recited in claim 1 further comprising the step of impinging actinic energy upon the liquid to solidify the same.
Claim 8
Independent Claim
213 words
A method for expelling a gas positioned between a substrate and a mold assembly, the substrate and the mold assembly further having droplets of a liquid positioned therebetween, the method comprising the steps of: positioning the mold assembly and the substrate such that the mold assembly is proximate to the substrate, the mold assembly having a first region, a second region, and a third region, the second region surrounding the first region and the third region surrounding the first and second regions; altering a shape of the mold assembly by bowing the first and third regions away from the substrate to bow the second region toward the substrate to decrease a gap defined between the second region of the mold assembly and the substrate, with the first region being bowed by applying a force to a surface of the mold assembly facing the substrate; contacting a sub-portion of the droplets of liquid with the second region of the mold assembly prior to contacting the remaining droplets of liquid with the second region, such that the gas expels from between the substrate and the mold assembly and the liquid fills a volume defined between the mold assembly and substrate; and, contacting the remaining droplets of liquid with the second region of the mold assembly.
Claim 9
Independent Claim
213 words
A method for expelling a gas positioned between a substrate and a mold assembly, the substrate and the mold assembly further having droplets of a liquid positioned therebetween, the method comprising the steps of: positioning the mold assembly and the substrate such that the mold assembly is proximate to the substrate, the mold assembly having a first region, a second region, and a third region, the second region surrounding the first region and the third region surrounding the first and second regions; altering a shape of the mold assembly by bowing the first and third regions away from the substrate to bow the second region toward the substrate to decrease a gap defined between the second region of the mold assembly and the substrate, with the first region being bowed by applying a force to a surface of the mold assembly facing the substrate; contacting a sub-portion of the droplets of liquid with the second region of the mold assembly prior to contacting the remaining droplets of liquid with the second region, such that the gas expels from between the substrate and the mold assembly and the liquid fills a volume defined between the mold assembly and substrate; and, contacting the remaining droplets of liquid with the second region of the mold assembly.
Claim 10
Dependent Claim
101 words
The method as recited in claim 7 wherein the step of altering the shape further comprises a step of creating a first pressure differential between a first chamber defined between a portion of a chuck coupled to the mold assembly and the first region of the mold assembly and a second chamber defined between a portion of the chuck and the second region of the mold assembly and creating a second pressure differential between the second chamber and a third chamber defined between a portion of a chuck coupled to the mold assembly and the third region of the mold assembly.
Claim 11
Dependent Claim
70 words
The method as recited in claim 7 wherein the step of altering the shape further comprises a step of subjecting a first chamber defined between a portion of a chuck coupled to the mold assembly and the first region of the mold assembly and an additional chamber defined between a portion of the chuck coupled to the mold assembly and the third region of the mold assembly to a vacuum.
Claim 12
Dependent Claim
35 words
The method as recited in claim 7 wherein the step of contacting the sub-portion further comprises a step of contacting a region of the liquid in superimposition with the second region of the mold assembly.
Claim 13
Dependent Claim
40 words
The method as recited in claim 7 further including applying a pressure between the substrate and the mold assembly in superimposition with the first region of the mold assembly to separate the mold assembly from the liquid on the substrate.
Claim 14
Dependent Claim
22 words
The method as recited in claim 7 further comprising the step of impinging actinic energy upon the liquid to solidify the same.
Claim 15
Independent Claim
215 words
A method for expelling a gas positioned between a substrate and a mold assembly, the substrate and the mold assembly further having a liquid positioned therebetween, the method comprising the steps of: positioning the mold assembly and the substrate such that the mold assembly is proximate to the substrate, the mold assembly having a first region, a second region, and a third region, the second region surrounding the first region and the third region surrounding the first and second regions; altering a shape of the substrate such that an area of the substrate in superimposition with the second region of the mold assembly bows towards the mold assembly; altering a shape of the mold assembly by bowing the first and third regions away from the substrate to bow the second region toward the substrate to decrease a gap defined between the second region of the mold assembly and the area of the substrate in superimposition therewith; contacting a sub-portion of the liquid with the second region of the mold assembly prior to contacting the remaining liquid such that the gas expels from between the substrate and the mold assembly and the liquid fills a volume defined between the mold assembly and substrate; and, contacting the remaining liquid with the second region of the mold assembly.
Claim 16
Independent Claim
215 words
A method for expelling a gas positioned between a substrate and a mold assembly, the substrate and the mold assembly further having a liquid positioned therebetween, the method comprising the steps of: positioning the mold assembly and the substrate such that the mold assembly is proximate to the substrate, the mold assembly having a first region, a second region, and a third region, the second region surrounding the first region and the third region surrounding the first and second regions; altering a shape of the substrate such that an area of the substrate in superimposition with the second region of the mold assembly bows towards the mold assembly; altering a shape of the mold assembly by bowing the first and third regions away from the substrate to bow the second region toward the substrate to decrease a gap defined between the second region of the mold assembly and the area of the substrate in superimposition therewith; contacting a sub-portion of the liquid with the second region of the mold assembly prior to contacting the remaining liquid such that the gas expels from between the substrate and the mold assembly and the liquid fills a volume defined between the mold assembly and substrate; and, contacting the remaining liquid with the second region of the mold assembly.
Claim 17
Dependent Claim
47 words
The method as recited in claim 13 wherein the step of altering a shape of the substrate further comprises a step of creating a pressure in a first volume defined between a portion of a substrate chuck coupled to the substrate and the area of the substrate.
Claim 18
Dependent Claim
77 words
The method as recited in claim 13 wherein the step of altering a shape of the substrate further comprises a step of creating a pressure differential in a first volume defined between a portion of a substrate chuck coupled to the substrate and the area of the substrate and a second volume defined between a portion of the substrate chuck coupled to the substrate and an additional area of the substrate, the additional area surrounding the area.
Claim 19
Dependent Claim
101 words
The method as recited in claim 13 wherein the step of altering the shape further comprises a step of creating a first pressure differential between a first chamber defined between a portion of a chuck coupled to the mold assembly and the first region of the mold assembly and a second chamber defined between a portion of the chuck and the second region of the mold assembly and creating a second pressure differential between the second chamber and a third chamber defined between a portion of a chuck coupled to the mold assembly and the third region of the mold assembly.
Claim 20
Dependent Claim
70 words
The method as recited in claim 13 wherein the step of altering the shape further comprises a step of subjecting a first chamber defined between a portion of a chuck coupled to the mold assembly and the first region of the mold assembly and an additional chamber defined between a portion of the chuck coupled to the mold assembly and the third region of the mold assembly to a vacuum.
Claim 21
Dependent Claim
39 words
The method as recited in claim 13 wherein the step of contacting the sub-portion further comprises a step of contacting the liquid positioned in superimposition with the area of the substrate with the second region of the mold assembly.
Claim 22
Dependent Claim
40 words
The method as recited in claim 13 further including applying a pressure between the substrate and the mold assembly in superimposition with the first region of the mold assembly to separate the mold assembly from the liquid on the substrate.
Claim 23
Dependent Claim
22 words
The method as recited in claim 1 further comprising the step of impinging actinic energy upon the liquid to solidify the same.
References Cited (Backward Citations)
US3637381A
Cited
US3997447A
Cited
US4119688A
Cited
US4312823A
Cited
US4223261A
Cited
JPS5732629Y2
Cited
US4395211A
Cited
US4279628A
Cited
US4521175A
Cited
JPS57153434U
Cited
US4475223A
Cited
JPH0224848B2
Cited
US4551192A
Cited
US4506184A
Cited
JPS60127935U
Cited
US4512848A
Cited
US4559717A
Cited
US4767584A
Cited
US4689004A
Cited
WO1987002935A1
Cited
US4724222A
Cited
US4887282A
Cited
US4731155A
Cited
US5427599A
Cited
US5213600A
Cited
US5028361A
Cited
US5028366A
Cited
JPH01196749A
Cited
US5821175A
Cited
JPH0292603A
Cited
JPH02192045A
Cited
US5527662A
Cited
US5331371A
Cited
US5324012A
Cited
US5259926A
Cited
US5364222A
Cited
US5545367A
Cited
US5338177A
Cited
US5601641A
Cited
US5534073A
Cited
US5425848A
Cited
US5550654A
Cited
US5776748A
Cited
US6776094B1
Cited
US5512131A
Cited
US5515167A
Cited
US5804089A
Cited
US5563684A
Cited
US5849209A
Cited
US5956216A
Cited
US5820769A
Cited
US6159400A
Cited
US5849222A
Cited
US6809356B2
Cited
US6828244B2
Cited
US6518189B1
Cited
US5772905A
Cited
US20040137734A1
Cited
US6309580B1
Cited
US5900062A
Cited
US5923408A
Cited
US5669303A
Cited
US6355198B1
Cited
US20030179354A1
Cited
US6032506A
Cited
US6257866B1
Cited
US6137562A
Cited
US5948470A
Cited
US6182510B1
Cited
WO1999005724A1
Cited
JP4148549B2
Cited
US6383890B2
Cited
US6019166A
Cited
US6030275A
Cited
US6304424B1
Cited
US6416311B1
Cited
US5997963A
Cited
US6646662B1
Cited
US20020167117A1
Cited
US20030034329A1
Cited
US6099771A
Cited
US5947027A
Cited
US6965506B2
Cited
WO2000021689A1
Cited
US20040118809A1
Cited
US20020042027A1
Cited
US6713238B1
Cited
US6726195B1
Cited
US6218316B1
Cited
US6247579B1
Cited
US6334960B1
Cited
US6160430A
Cited
US6305677B1
Cited
US6461524B1
Cited
US6220561B1
Cited
US6809802B1
Cited
US20040036850A1
Cited
US6407006B1
Cited
US6512401B2
Cited
US6517995B1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2013-01-04 | 2013-07-06 | 2014-01-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2017-01-04 | 2017-07-06 | 2018-01-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2021-01-04 | 2021-07-06 | 2022-01-05 | $7700.00 | Window Closed / Lapsed |