Patent US6506679B2 successfully refreshed from Google Patents.
US6506679B2
Expired / Lapsed
US
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Deadhesion method and mechanism for wafer processing
Assignee: Mosaid Technologies Inc
•
Filing: 2001-08-29
•
Granted: 2003-01-14
•
Expires: 2021-08-29
Abstract
Abstract A method of manufacturing semiconductor devices using an improved planarization process for the planarization of the surfaces of the wafer on which the semiconductor devices are formed. The improved planarization process includes the formation of a flat planar surface from a deformable coating on the surface of the wafer using a fixed flexible planar interface material contacting the deformable material.
Inventors
- 👤 Guy T. Blalock
- 👤 Hugh E. Stroupe
- 👤 Brian F. Gordon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 17:10
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/06; H10P95/062; B; B24; B24B; B24B37/00; B24B37/04; B24B37/042
Claims Analysis
Total Claims: 212
Claim 1
Independent Claim
51 words
A method for planarizing a non-planar film surface of a wafer comprising: providing an interface material; securing the interface material relative to the wafer; contacting the non-planar film surface of the wafer with the interface material; and forming a substantially flat planar surface on the non-planar film surface of the wafer.
Claim 2
Independent Claim
51 words
A method for planarizing a non-planar film surface of a wafer comprising: providing an interface material; securing the interface material relative to the wafer; contacting the non-planar film surface of the wafer with the interface material; and forming a substantially flat planar surface on the non-planar film surface of the wafer.
Claim 3
Dependent Claim
15 words
The method of claim 1 , further comprising: planarizing the wafer using a planarization process.
Claim 4
Dependent Claim
20 words
The method of claim 1 , further comprising: applying a fluid under pressure to one side of the interface material.
Claim 5
Dependent Claim
27 words
The method of claim 1 , wherein the forming the substantially flat planar surface includes: coating the non-planar film surface of the wafer with a deformable material.
Claim 6
Dependent Claim
16 words
The method of claim 4 , further comprising: contacting the deformable material with the interface material.
Claim 7
Dependent Claim
15 words
The method of claim 5 , further comprising: contacting the interface material with an object.
Claim 8
Dependent Claim
20 words
The method of claim 6 , further comprising: applying a fluid under pressure between the interface material and the object.
Claim 9
Dependent Claim
21 words
The method of claim 5 , further comprising: curing the deformable material while the interface material is contacting the deformable material.
Claim 10
Dependent Claim
21 words
The method of claim 5 , further comprising: hardening the deformable material while the interface material is contacting the deformable material.
Claim 11
Dependent Claim
21 words
The method of claim 5 , further comprising: solidifying the deformable material while the interface material is contacting the deformable material.
Claim 12
Dependent Claim
26 words
The method of claim 5 , further comprising: applying pressure to the interface material contacting the deformable material while the interface material contacts the deformable material.
Claim 13
Dependent Claim
33 words
The method of claim 5 , further comprising: applying pressure to the coating of the deformable material on the non-planar film surface of the wafer while the interface material contacts the deformable material.
Claim 14
Dependent Claim
21 words
The method of claim 5 , wherein the interface material includes a substantially flat planar surface thereon contacting the deformable material.
Claim 15
Dependent Claim
18 words
The method of claim 6 , wherein the object includes a shaped surface thereon contacting the deformable material.
Claim 16
Dependent Claim
15 words
The method of claim 14 , wherein the shaped surface includes a convex surface portion.
Claim 17
Dependent Claim
15 words
The method of claim 14 , wherein the shaped surface includes a concave surface portion.
Claim 18
Dependent Claim
20 words
The method of claim 14 , wherein the shaped surface includes a convex surface portion and a concave surface portion.
Claim 19
Dependent Claim
15 words
The method of claim 6 , wherein the object includes a flat optical glass object.
Claim 20
Dependent Claim
23 words
The method of claim 5 , further including: coating the interface material with a release agent prior to the contacting the deformable material.
Claim 21
Dependent Claim
22 words
The method of claim 6 , further including: coating the object with a release agent prior to the contacting the interface material.
Claim 22
Dependent Claim
19 words
The method of claim 6 , wherein the object includes a substantially inflexible object having a flat surface thereon.
Claim 23
Dependent Claim
15 words
The method of claim 4 , further comprising: contacting the interface material with a member.
Claim 24
Dependent Claim
21 words
The method of claim 22 , further comprising: applying a fluid under pressure to the interface material and to the member.
Claim 25
Dependent Claim
19 words
The method of claim 21 , wherein a back of the wafer is contacted with a flexible resilient member.
Claim 26
Dependent Claim
26 words
The method of claim 24 , further comprising: applying pressure to the flexible resilient member to form a substantially flat planar surface on the deformable material.
Claim 27
Dependent Claim
30 words
The method of claim 24 , further comprising: contacting the flexible resilient member with a substrate; and applying pressure to the substrate thereby applying pressure to the flexible resilient member.
Claim 28
Dependent Claim
35 words
The method of claim 24 , further comprising: applying pressure to the wafer through the flexible resilient member thereby applying pressure to the object thereby deforming the coating of the deformable material on the wafer.
Claim 29
Dependent Claim
23 words
The method of claim 1 , wherein the wafer includes a wafer having a plurality of electrical circuit components on a surface thereof.
Claim 30
Dependent Claim
34 words
The method of claim 1 , wherein the wafer includes a wafer having a plurality of electrical circuit components on a surface thereof and a coating substantially covering the plurality of electrical circuit components.
Claim 31
Dependent Claim
37 words
The method of claim 1 , wherein the wafer includes a wafer having a plurality of electrical circuit components on a surface thereof and a coating substantially covering the plurality of electrical circuit components and the wafer.
Claim 32
Dependent Claim
22 words
The method of claim 5 , further comprising: applying pressure to the interface material while the interface material contacts the deformable material.
Claim 33
Dependent Claim
26 words
The method of claim 6 , further comprising: applying a substantially uniform pressure to the object while the object is in contact with the interface material.
Claim 34
Dependent Claim
36 words
The method of claim 5 , further comprising: applying a substantially uniform pressure to the deformable material on the non-planar film surface of the wafer to form a substantially flat planar surface on the deformable material.
Claim 35
Dependent Claim
16 words
The method of claim 2 , wherein the planarization process includes a chemical mechanical planarization process.
Claim 36
Dependent Claim
15 words
The method of claim 2 , wherein the planarization process includes a chemical etching process.
Claim 37
Dependent Claim
15 words
The method of claim 3 , further comprising: applying a vacuum to the interface material.
Claim 38
Independent Claim
68 words
A method for planarizing a non-planar film surface of a wafer having at least one electrical circuit formed thereon comprising: providing an interface material; securing the interface material in a position relative to the non-planar film surface of the wafer; forming a substantially flat planar surface on the non-planar film surface of the wafer; and planarizing the substantially flat planar surface on the wafer using a planarization process.
Claim 39
Independent Claim
68 words
A method for planarizing a non-planar film surface of a wafer having at least one electrical circuit formed thereon comprising: providing an interface material; securing the interface material in a position relative to the non-planar film surface of the wafer; forming a substantially flat planar surface on the non-planar film surface of the wafer; and planarizing the substantially flat planar surface on the wafer using a planarization process.
Claim 40
Dependent Claim
17 words
The method of claim 37 , further comprising: applying a fluid under pressure to the interface material.
Claim 41
Dependent Claim
15 words
The method of claim 37 , further comprising: applying a vacuum to the interface material.
Claim 42
Dependent Claim
16 words
The method of claim 37 , wherein the planarization process includes a chemical mechanical planarization process.
Claim 43
Dependent Claim
14 words
The method of claim 37 , wherein the planarization process includes an etching process.
Claim 44
Dependent Claim
27 words
The method of claim 37 , wherein the forming the substantially flat planar surface includes: coating the non-planar film surface of the wafer with a deformable material.
Claim 45
Dependent Claim
15 words
The method of claim 42 , further comprising: contacting the interface material with an object.
Claim 46
Dependent Claim
19 words
The method of claim 43 , further comprising: curing the deformable material while the object contacts the interface material.
Claim 47
Dependent Claim
19 words
The method of claim 43 , further comprising: hardening the deformable material while the object contacts the interface material.
Claim 48
Dependent Claim
19 words
The method of claim 43 , further comprising: solidifying the deformable material while the object contacts the interface material.
Claim 49
Dependent Claim
25 words
The method of claim 43 , further comprising: applying pressure to the object contacting the interface material while the interface material contacts the deformable material.
Claim 50
Dependent Claim
33 words
The method of claim 42 , further comprising: applying pressure to the coating of the deformable material on the non-planar film surface of the wafer while the interface material contacts the deformable material.
Claim 51
Dependent Claim
20 words
The method of claim 43 , wherein the object includes a substantially flat planar surface thereon contacting the interface material.
Claim 52
Dependent Claim
18 words
The method of claim 43 , wherein the object includes a shaped surface thereon contacting the interface material.
Claim 53
Dependent Claim
15 words
The method of claim 50 , wherein the shaped surface includes a convex surface portion.
Claim 54
Dependent Claim
15 words
The method of claim 50 , wherein the shaped surface includes a concave surface portion.
Claim 55
Dependent Claim
20 words
The method of claim 50 , wherein the shaped surface includes a convex surface portion and a concave surface portion.
Claim 56
Dependent Claim
15 words
The method of claim 50 , wherein the shaped surface includes a desired shaped surface.
Claim 57
Dependent Claim
15 words
The method of claim 43 , wherein the object includes a flat optical glass object.
Claim 58
Dependent Claim
22 words
The method of claim 43 , further including: coating the object with a release agent prior to the contacting the interface material.
Claim 59
Dependent Claim
14 words
The method of claim 43 , wherein the object includes a substantially inflexible object.
Claim 60
Dependent Claim
16 words
The method of claim 37 , further comprising: contacting the wafer with a flexible resilient member.
Claim 61
Dependent Claim
19 words
The method of claim 43 , wherein a back of the wafer is contacted with a flexible resilient member.
Claim 62
Dependent Claim
26 words
The method of claim 59 , further comprising: applying pressure to the flexible resilient member to form a substantially flat planar surface on the deformable material.
Claim 63
Dependent Claim
30 words
The method of claim 59 , further comprising: contacting the flexible resilient member with a substrate; and applying pressure to the substrate thereby applying pressure to the flexible resilient member.
Claim 64
Dependent Claim
27 words
The method of claim 59 , further comprising: applying pressure to the wafer by applying pressure to the flexible resilient member thereby applying pressure to the object.
Claim 65
Dependent Claim
23 words
The method of claim 37 , wherein the wafer includes a wafer having a plurality of electrical circuit components on a surface thereof.
Claim 66
Dependent Claim
34 words
The method of claim 37 , wherein the wafer includes a wafer having a plurality of electrical circuit components on a surface thereof and a coating substantially covering the plurality of electrical circuit components.
Claim 67
Dependent Claim
37 words
The method of claim 37 , wherein the wafer includes a wafer having a plurality of electrical circuit components on a surface thereof and a coating substantially covering the plurality of electrical circuit components and the wafer.
Claim 68
Dependent Claim
23 words
The method of claim 43 , further comprising: applying pressure to the object while the object is in contact with the interface material.
Claim 69
Dependent Claim
27 words
The method of claim 43 , further comprising: applying a substantially uniform pressure to the object while the interface material is in contact with the deformable material.
Claim 70
Dependent Claim
36 words
The method of claim 43 , further comprising: applying a substantially uniform pressure to the deformable material on the non-planar film surface of the wafer to form a substantially flat planar surface on the deformable material.
Claim 71
Independent Claim
81 words
A method for planarizing a non-planar film surface on a wafer comprising: providing an interface material; securing the interface material in a position relative to the non-planar film surface on the wafer; applying a deformable material to the non-planar film surface of the wafer; contacting the deformable material with the interface material; forming a substantially flat planar surface on the deformable material applied to the non-planar film surface of the wafer; and applying a fluid under pressure to the interface material.
Claim 72
Independent Claim
81 words
A method for planarizing a non-planar film surface on a wafer comprising: providing an interface material; securing the interface material in a position relative to the non-planar film surface on the wafer; applying a deformable material to the non-planar film surface of the wafer; contacting the deformable material with the interface material; forming a substantially flat planar surface on the deformable material applied to the non-planar film surface of the wafer; and applying a fluid under pressure to the interface material.
Claim 73
Dependent Claim
15 words
The method of claim 69 , further comprising: applying a vacuum to the interface material.
Claim 74
Dependent Claim
15 words
The method of claim 69 , further comprising: planarizing the wafer using a planarization process.
Claim 75
Dependent Claim
16 words
The method of claim 71 , wherein the planarization process includes a chemical mechanical planarization process.
Claim 76
Dependent Claim
14 words
The method of claim 71 , wherein the planarization process includes an etching process.
Claim 77
Independent Claim
95 words
A method for planarizing a non-planar film surface of a wafer comprising: providing an interface material secured in a position; providing an object having a substantially flat planar surface thereon; providing a wafer having a surface having a non-planar film thereon; applying a deformable material to the non-planar film surface of the wafer; contacting the interface material with the object; contacting the deformable material with the interface material; forming a substantially flat planar surface on the deformable material on the non-planar film surface of the wafer; and applying a pressurized fluid to the interface material.
Claim 78
Independent Claim
95 words
A method for planarizing a non-planar film surface of a wafer comprising: providing an interface material secured in a position; providing an object having a substantially flat planar surface thereon; providing a wafer having a surface having a non-planar film thereon; applying a deformable material to the non-planar film surface of the wafer; contacting the interface material with the object; contacting the deformable material with the interface material; forming a substantially flat planar surface on the deformable material on the non-planar film surface of the wafer; and applying a pressurized fluid to the interface material.
Claim 79
Dependent Claim
15 words
The method of claim 74 , further comprising: applying a vacuum to the interface material.
Claim 80
Dependent Claim
15 words
The method of claim 74 , further comprising: planarizing the wafer using a planarization process.
Claim 81
Independent Claim
95 words
A method for planarizing a non-planar film surface on a wafer comprising: providing an interface material secured in a position; providing a wafer having a non-planar film located on a surface thereof; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member at another surface of the wafer; applying a deformable material to the non-planar film surface of the wafer; contacting the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar film surface of the wafer; and contacting the interface material using pressurized fluid.
Claim 82
Independent Claim
95 words
A method for planarizing a non-planar film surface on a wafer comprising: providing an interface material secured in a position; providing a wafer having a non-planar film located on a surface thereof; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member at another surface of the wafer; applying a deformable material to the non-planar film surface of the wafer; contacting the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar film surface of the wafer; and contacting the interface material using pressurized fluid.
Claim 83
Dependent Claim
15 words
The method of claim 77 , further comprising: applying a vacuum to the interface material.
Claim 84
Dependent Claim
15 words
The method of claim 77 , further comprising: planarizing the wafer using a planarization process.
Claim 85
Dependent Claim
16 words
The method of claim 77 , wherein the deformable material is contacted by the interface material.
Claim 86
Independent Claim
105 words
A method for planarizing a non-planar film surface of a wafer comprising: providing a wafer having a non-planar film located on a surface thereof; providing an interface material secured in a position; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member; applying a deformable material to the non-planar film surface of the wafer; contacting another surface of the wafer with the flexible resilient member; applying pressure to the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar film surface of the wafer; contacting the interface material using pressurized fluid; and planarizing the wafer.
Claim 87
Independent Claim
105 words
A method for planarizing a non-planar film surface of a wafer comprising: providing a wafer having a non-planar film located on a surface thereof; providing an interface material secured in a position; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member; applying a deformable material to the non-planar film surface of the wafer; contacting another surface of the wafer with the flexible resilient member; applying pressure to the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar film surface of the wafer; contacting the interface material using pressurized fluid; and planarizing the wafer.
Claim 88
Dependent Claim
15 words
The method of claim 81 , further comprising: applying a vacuum to the interface material.
Claim 89
Independent Claim
53 words
A method for planarizing a non-planar surface of a wafer, the method comprising: providing a wafer having a non-planar surface thereon; providing an interface material secured in a position; forming a substantially flat planar surface on the non-planar surface of the wafer; contacting the interface material using pressurized fluid; and planarizing the wafer.
Claim 90
Independent Claim
53 words
A method for planarizing a non-planar surface of a wafer, the method comprising: providing a wafer having a non-planar surface thereon; providing an interface material secured in a position; forming a substantially flat planar surface on the non-planar surface of the wafer; contacting the interface material using pressurized fluid; and planarizing the wafer.
Claim 91
Dependent Claim
15 words
The method of claim 83 , further comprising: applying a vacuum to the interface material.
Claim 92
Independent Claim
62 words
A method for planarizing a non-planar surface of a wafer having at least one electrical circuit formed thereon comprising: providing a wafer having a non-planar surface thereon; providing a secured interface material; forming a substantially flat planar surface on the non-planar surface of the wafer; contacting the interface material using pressurized fluid; and planarizing the substantially flat planar surface on the wafer.
Claim 93
Independent Claim
62 words
A method for planarizing a non-planar surface of a wafer having at least one electrical circuit formed thereon comprising: providing a wafer having a non-planar surface thereon; providing a secured interface material; forming a substantially flat planar surface on the non-planar surface of the wafer; contacting the interface material using pressurized fluid; and planarizing the substantially flat planar surface on the wafer.
Claim 94
Dependent Claim
15 words
The method of claim 85 , further comprising: applying a vacuum to the interface material.
Claim 95
Independent Claim
56 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface thereon; providing a secured interface material; applying a deformable material to the non-planar surface of the wafer; forming a substantially flat planar surface on the deformable material; contacting the interface material using pressurized fluid; and planarizing the wafer.
Claim 96
Independent Claim
56 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface thereon; providing a secured interface material; applying a deformable material to the non-planar surface of the wafer; forming a substantially flat planar surface on the deformable material; contacting the interface material using pressurized fluid; and planarizing the wafer.
Claim 97
Dependent Claim
15 words
The method of claim 87 , further comprising: applying a vacuum to the interface material.
Claim 98
Independent Claim
71 words
A method for planarizing a non-planar surface of a wafer comprising: providing a secured interface material; providing an object having a flat planar surface thereon; providing a wafer having a non-planar surface; applying a deformable material to the non-planar surface of the wafer; contacting the deformable material using the interface material; forming a substantially flat planar surface on the deformable material; contacting the interface material using fluid; and planarizing the wafer.
Claim 99
Independent Claim
71 words
A method for planarizing a non-planar surface of a wafer comprising: providing a secured interface material; providing an object having a flat planar surface thereon; providing a wafer having a non-planar surface; applying a deformable material to the non-planar surface of the wafer; contacting the deformable material using the interface material; forming a substantially flat planar surface on the deformable material; contacting the interface material using fluid; and planarizing the wafer.
Claim 100
Dependent Claim
15 words
The method of claim 89 , further comprising: applying a vacuum to the interface material.
Claim 101
Independent Claim
89 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing a secured interface material; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member adjacent another surface of the wafer; applying a deformable material to the non-planar surface of the wafer; contacting the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar surface of the wafer; contacting the interface material by applying a fluid thereto; and planarizing the wafer.
Claim 102
Independent Claim
89 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing a secured interface material; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member adjacent another surface of the wafer; applying a deformable material to the non-planar surface of the wafer; contacting the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar surface of the wafer; contacting the interface material by applying a fluid thereto; and planarizing the wafer.
Claim 103
Dependent Claim
15 words
The method of claim 91 , further comprising: applying a vacuum to the interface material.
Claim 104
Dependent Claim
15 words
The method of claim 91 , wherein the interface material is contacted by an object.
Claim 105
Independent Claim
93 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing a secured interface material; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member; applying a deformable material to the non-planar surface of the wafer; contacting another surface of the wafer with the flexible resilient member; applying pressure to the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar surface of the wafer; contacting the interface material using fluid; and planarizing the wafer.
Claim 106
Independent Claim
93 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing a secured interface material; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member; applying a deformable material to the non-planar surface of the wafer; contacting another surface of the wafer with the flexible resilient member; applying pressure to the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar surface of the wafer; contacting the interface material using fluid; and planarizing the wafer.
Claim 107
Dependent Claim
15 words
The method of claim 94 , further comprising: applying a vacuum to the interface material.
Claim 108
Independent Claim
57 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing a secured interface material; forming a substantially flat planar surface on the non-planar surface of the wafer; removing the interface material from the wafer; and planarizing the substantially flat planar surface on the non-planar surface of the wafer.
Claim 109
Independent Claim
57 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing a secured interface material; forming a substantially flat planar surface on the non-planar surface of the wafer; removing the interface material from the wafer; and planarizing the substantially flat planar surface on the non-planar surface of the wafer.
Claim 110
Dependent Claim
15 words
The method of claim 96 , further comprising: applying a vacuum to the interface material.
Claim 111
Independent Claim
65 words
A method for planarizing a non-planar surface of a wafer having at least one electrical circuit formed thereon comprising: providing a wafer having a non-planar surface; providing a secured interface material; forming a substantially flat planar surface on the non-planar surface of the wafer; separating the interface material from the wafer; and planarizing the substantially flat planar surface on the non-planar surface of the wafer.
Claim 112
Independent Claim
65 words
A method for planarizing a non-planar surface of a wafer having at least one electrical circuit formed thereon comprising: providing a wafer having a non-planar surface; providing a secured interface material; forming a substantially flat planar surface on the non-planar surface of the wafer; separating the interface material from the wafer; and planarizing the substantially flat planar surface on the non-planar surface of the wafer.
Claim 113
Dependent Claim
15 words
The method of claim 98 , further comprising: applying a vacuum to the interface material.
Claim 114
Independent Claim
73 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing a secured interface material; applying a deformable material to the non-planar surface of the wafer; forming a substantially flat planar surface on the deformable material applied to the non-planar surface of the wafer; separating the interface material from the wafer; and planarizing the substantially flat planar surface on the non-planar surface of the wafer.
Claim 115
Independent Claim
73 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing a secured interface material; applying a deformable material to the non-planar surface of the wafer; forming a substantially flat planar surface on the deformable material applied to the non-planar surface of the wafer; separating the interface material from the wafer; and planarizing the substantially flat planar surface on the non-planar surface of the wafer.
Claim 116
Dependent Claim
15 words
The method of claim 100 , further comprising: applying a vacuum to the interface material.
Claim 117
Independent Claim
87 words
A method for planarizing a non-planar surface of a wafer comprising: providing a secured interface material; providing an object having a substantially flat planar surface thereon; providing a wafer having a non-planar surface; applying a deformable material to the non-planar surface of the wafer; contacting the interface material by the object; contacting the deformable material with the interface material; forming a substantially flat planar surface on the deformable material on the non-planar surface of the wafer; removing the interface material from the wafer; and planarizing the wafer.
Claim 118
Independent Claim
87 words
A method for planarizing a non-planar surface of a wafer comprising: providing a secured interface material; providing an object having a substantially flat planar surface thereon; providing a wafer having a non-planar surface; applying a deformable material to the non-planar surface of the wafer; contacting the interface material by the object; contacting the deformable material with the interface material; forming a substantially flat planar surface on the deformable material on the non-planar surface of the wafer; removing the interface material from the wafer; and planarizing the wafer.
Claim 119
Dependent Claim
15 words
The method of claim 102 , further comprising: applying a vacuum to the interface material.
Claim 120
Independent Claim
105 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing an interface material substantially retained in a position; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member at another surface of the wafer; applying a deformable material to the non-planar surface of the wafer; contacting the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar surface of the wafer; removing the interface material from the wafer; and planarizing the substantially flat planar surface on the deformable material on the non-planar surface of the wafer.
Claim 121
Independent Claim
105 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing an interface material substantially retained in a position; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member at another surface of the wafer; applying a deformable material to the non-planar surface of the wafer; contacting the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar surface of the wafer; removing the interface material from the wafer; and planarizing the substantially flat planar surface on the deformable material on the non-planar surface of the wafer.
Claim 122
Dependent Claim
15 words
The method of claim 104 , further comprising: applying a vacuum to the interface material.
Claim 123
Dependent Claim
15 words
The method of claim 104 , wherein the interface material is contacted by the object.
Claim 124
Independent Claim
111 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing a secured interface material; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member; applying a deformable material to the non-planar surface of the wafer; contacting another surface of the wafer using the flexible resilient member; applying pressure to the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar surface of the wafer; removing the interface material from the wafer using a fluid; and planarizing the substantially flat planar surface on the deformable material on the non-planar surface of the wafer.
Claim 125
Independent Claim
111 words
A method for planarizing a non-planar surface of a wafer comprising: providing a wafer having a non-planar surface; providing a secured interface material; providing an object having a substantially flat planar surface thereon; providing a flexible resilient member; applying a deformable material to the non-planar surface of the wafer; contacting another surface of the wafer using the flexible resilient member; applying pressure to the deformable material; forming a substantially flat planar surface on the deformable material on the non-planar surface of the wafer; removing the interface material from the wafer using a fluid; and planarizing the substantially flat planar surface on the deformable material on the non-planar surface of the wafer.
Claim 126
Dependent Claim
15 words
The method of claim 107 , further comprising: applying a vacuum to the interface material.
Claim 127
Independent Claim
47 words
An apparatus for planarization of a surface on a wafer comprising: an object having an upper surface, a lower surface, and an outer diameter, the object located above the wafer; and an interface material located below the lower surface of the object substantially secured in a position.
Claim 128
Independent Claim
47 words
An apparatus for planarization of a surface on a wafer comprising: an object having an upper surface, a lower surface, and an outer diameter, the object located above the wafer; and an interface material located below the lower surface of the object substantially secured in a position.
Claim 129
Dependent Claim
18 words
The apparatus of claim 109 , further comprising: a lid assembly, the lid assembly including the object therein.
Claim 130
Dependent Claim
60 words
The apparatus of claim 109 , further comprising: the lid assembly including: an upper lid; a middle lid having an upper surface, a lower surface, an inner surface, and an outer surface, the middle lid located between the upper lid and a lower lid; and the lower lid having a portion thereof located below the lower surface of the object.
Claim 131
Dependent Claim
26 words
The apparatus of claim 111 , further comprising: an interface clamp retaining a portion of the interface material between the lower lid and the interface clamp.
Claim 132
Dependent Claim
25 words
The apparatus of claim 112 , further comprising: an annular seal sealingly engaging a portion of the object and a portion of the lid assembly.
Claim 133
Dependent Claim
16 words
The apparatus of claim 111 , wherein the lower lid includes a plurality of apertures therein.
Claim 134
Dependent Claim
15 words
The apparatus of claim 111 , further comprising: a chamber located below the lower lid.
Claim 135
Dependent Claim
20 words
The apparatus of claim 111 , further comprising: a plurality of fasteners retaining the upper lid to the middle lid.
Claim 136
Dependent Claim
19 words
The apparatus of claim 115 , further comprising: a plurality of fasteners retaining the lower lid to the chamber.
Claim 137
Dependent Claim
20 words
The apparatus of claim 112 , further comprising: a plurality of fasteners retaining the interface clamp to the middle lid.
Claim 138
Dependent Claim
45 words
The apparatus of claim 111 , wherein the upper lid comprises a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface.
Claim 139
Dependent Claim
54 words
The apparatus of claim 111 , wherein the lower lid comprises a generally cylindrical annular member having an upper surface, a first vertical inner cylindrical surface, an inner annular surface, a second vertical inner cylindrical surface, a bottom surface, an outer cylindrical surface, and a plurality of apertures for receiving portions of fasteners therein.
Claim 140
Dependent Claim
86 words
The apparatus of claim 111 , wherein the middle lid comprises a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first cylindrical annular surface, a first vertical outer diameter surface, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture for supplying a gas therethrough, and at least one annular seal for sealingly engaging a portion of the object, the middle lid located between the upper lid and the lower lid.
Claim 141
Dependent Claim
31 words
The apparatus of claim 111 , further comprising: an interface clamp connected to the middle lid retaining a portion of the interface material between the lower lid and the interface clamp.
Claim 142
Dependent Claim
86 words
The apparatus of claim 111 , wherein the middle lid comprises a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first cylindrical annular surface, a first vertical outer diameter surface, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture for supplying a gas therethrough, and at least one annular seal for sealingly engaging a portion of the object, the middle lid located between the upper lid and the lower lid.
Claim 143
Dependent Claim
31 words
The apparatus of claim 123 , further comprising: an interface clamp connected to the middle lid retaining a portion of the interface material between the lower lid and the interface clamp.
Claim 144
Dependent Claim
28 words
The apparatus of claim 124 , wherein the inner cylindrical surface of the middle lid includes an annular cylindrical lip having a plurality of radially extending grooves therein.
Claim 145
Dependent Claim
87 words
The apparatus of claim 111 , wherein the middle lid comprises a generally cylindrical annular member having a first upper surface, a vertical cylindrical surface, a second upper surface, a first inner diameter vertical surface, an annular cylindrical surface, a second inner diameter vertical surface, a lower surface, an outer diameter surface, at least one aperture for supplying a gas therethrough, and at least one annular seal for sealingly engaging a portion of the object, the middle lid located between the upper lid and the lower lid.
Claim 146
Dependent Claim
31 words
The apparatus of claim 126 , further comprising: an interface clamp connected to the middle lid retaining a portion of the interface material between the lower lid and the interface clamp.
Claim 147
Dependent Claim
20 words
The apparatus of claim 111 , further comprising: a lid clamp located between the upper lid and the middle lid.
Claim 148
Dependent Claim
42 words
The apparatus of claim 111 , further comprising: an object clamp located between the upper lid and the middle lid; and the lid clamp located between the upper lid and the middle lid, the lid clamp further located outside the object clamp.
Claim 149
Independent Claim
63 words
An apparatus for planarization of a surface on a wafer comprising: an upper lid; a middle lid; an object having an upper surface, lower surface, and outer diameter, the object located below the upper lid; a secured interface material located below the lower surface of the object; and a lower lid having a portion thereof located below the lower surface of the object.
Claim 150
Independent Claim
63 words
An apparatus for planarization of a surface on a wafer comprising: an upper lid; a middle lid; an object having an upper surface, lower surface, and outer diameter, the object located below the upper lid; a secured interface material located below the lower surface of the object; and a lower lid having a portion thereof located below the lower surface of the object.
Claim 151
Dependent Claim
26 words
The apparatus of claim 130 , further comprising: an interface clamp retaining a portion of the interface material between the middle lid and the interface clamp.
Claim 152
Dependent Claim
23 words
The apparatus of claim 130 , further comprising: an annular seal located on the middle lid sealingly engaging a portion of the object.
Claim 153
Dependent Claim
16 words
The apparatus of claim 130 , wherein the lower lid includes a plurality of apertures therein.
Claim 154
Dependent Claim
21 words
The apparatus of claim 130 , wherein the middle lid includes an annular seal sealingly engaging a portion of the object.
Claim 155
Dependent Claim
15 words
The apparatus of claim 130 , further comprising: a chamber located below the lower lid.
Claim 156
Dependent Claim
20 words
The apparatus of claim 130 , further comprising: a plurality of fasteners retaining the upper lid to the middle lid.
Claim 157
Dependent Claim
19 words
The apparatus of claim 135 , further comprising: a plurality of fasteners retaining the lower lid to the chamber.
Claim 158
Dependent Claim
20 words
The apparatus of claim 131 , further comprising: a plurality of fasteners retaining the interface clamp to the middle lid.
Claim 159
Dependent Claim
33 words
The apparatus of claim 130 , further comprising: an object clamp located between the upper lid and the middle lid; and a lid clamp located between the upper lid and the middle lid.
Claim 160
Dependent Claim
45 words
The apparatus of claim 130 , wherein the upper lid comprises a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface.
Claim 161
Dependent Claim
54 words
The apparatus of claim 130 , wherein the lower lid comprises a generally cylindrical annular member having an upper surface, a first vertical inner cylindrical surface, an inner annular surface, a second vertical inner cylindrical surface, a bottom surface, an outer cylindrical surface, and a plurality of apertures for receiving portions of fasteners therein.
Claim 162
Dependent Claim
86 words
The apparatus of claim 130 , wherein the middle lid comprises a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first cylindrical annular surface, a first vertical outer diameter surface, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture for supplying a gas therethrough, and at least one annular seal for sealingly engaging a portion of the object, the middle lid located between the upper lid and the lower lid.
Claim 163
Dependent Claim
31 words
The apparatus of claim 142 , further comprising: an interface clamp connected to the middle lid retaining a portion of the interface material between the lower lid and the interface clamp.
Claim 164
Dependent Claim
86 words
The apparatus of claim 130 , wherein the middle lid comprises a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first cylindrical annular surface, a first vertical outer diameter surface, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture for supplying a gas therethrough, and at least one annular seal for sealingly engaging a portion of the object, the middle lid located between the upper lid and the lower lid.
Claim 165
Dependent Claim
31 words
The apparatus of claim 130 , further comprising: an interface clamp connected to the middle lid retaining a portion of the interface material between the lower lid and the interface clamp.
Claim 166
Dependent Claim
29 words
The apparatus of claim 144 , wherein the inner cylindrical surface of the middle lid further comprises an annular cylindrical lip having a plurality of radially extending grooves therein.
Claim 167
Dependent Claim
87 words
The apparatus of claim 130 , wherein the middle lid comprises a generally cylindrical annular member having a first upper surface, a vertical cylindrical surface, a second upper surface, a first inner diameter vertical surface, an annular cylindrical surface, a second inner diameter vertical surface, a lower surface, an outer diameter surface, at least one aperture for supplying a gas therethrough, and at least one annular seal for sealingly engaging a portion of the object, the middle lid located between the upper lid and the lower lid.
Claim 168
Independent Claim
80 words
An apparatus for planarization of a surface on a wafer comprising: a lid assembly comprising: an upper lid; a middle lid; an object having an upper surface, lower surface, and outer diameter, the object having a portion thereof located below the upper lid; a secured interface material located below the lower surface of the object; a lower lid located below the middle lid; and a chamber located below the lid assembly, the chamber comprising: a platform located in the chamber.
Claim 169
Independent Claim
80 words
An apparatus for planarization of a surface on a wafer comprising: a lid assembly comprising: an upper lid; a middle lid; an object having an upper surface, lower surface, and outer diameter, the object having a portion thereof located below the upper lid; a secured interface material located below the lower surface of the object; a lower lid located below the middle lid; and a chamber located below the lid assembly, the chamber comprising: a platform located in the chamber.
Claim 170
Dependent Claim
18 words
The apparatus of claim 148 , further comprising: a resilient member located on the platform in the chamber.
Claim 171
Dependent Claim
26 words
The apparatus of claim 148 , further comprising: an interface clamp retaining a portion of the interface material between the middle lid and the interface clamp.
Claim 172
Dependent Claim
26 words
The apparatus of claim 148 , further comprising: an annular seal located on a portion of the middle lid sealingly engaging the portion of the object.
Claim 173
Dependent Claim
17 words
The apparatus of claim 148 , wherein the lower lid further comprises a plurality of apertures therein.
Claim 174
Dependent Claim
20 words
The apparatus of claim 148 , further comprising: a plurality of fasteners retaining the upper lid to the middle lid.
Claim 175
Dependent Claim
19 words
The apparatus of claim 148 , further comprising: a plurality of fasteners retaining the lower lid to the chamber.
Claim 176
Dependent Claim
20 words
The apparatus of claim 150 , further comprising: a plurality of fasteners retaining the interface clamp to the lower lid.
Claim 177
Dependent Claim
45 words
The apparatus of claim 148 , wherein the upper lid comprises a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface.
Claim 178
Dependent Claim
54 words
The apparatus of claim 148 , wherein the lower lid comprises a generally cylindrical annular member having an upper surface, a first vertical inner cylindrical surface, an inner annular surface, a second vertical inner cylindrical surface, a bottom surface, an outer cylindrical surface, and a plurality of apertures for receiving portions of fasteners therein.
Claim 179
Dependent Claim
86 words
The apparatus of claim 148 , wherein the middle lid comprises a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first cylindrical annular surface, a first vertical outer diameter surface, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture for supplying a gas therethrough, and at least one annular seal for sealingly engaging the portion of the object, the middle lid located between the upper lid and the lower lid.
Claim 180
Dependent Claim
31 words
The apparatus of claim 158 , further comprising: an interface clamp connected to the middle lid retaining a portion of the interface material between the lower lid and the interface clamp.
Claim 181
Dependent Claim
86 words
The apparatus of claim 148 , wherein the middle lid comprises a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first cylindrical annular surface, a first vertical outer diameter surface, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture for supplying a gas therethrough, and at least one annular seal for sealingly engaging the portion of the object, the middle lid located between the upper lid and the lower lid.
Claim 182
Dependent Claim
31 words
The apparatus of claim 160 , further comprising: an interface clamp connected to the middle lid retaining a portion of the interface material between the lower lid and the interface clamp.
Claim 183
Dependent Claim
29 words
The apparatus of claim 160 , wherein the inner cylindrical surface of the middle lid further comprises an annular cylindrical lip having a plurality of radially extending grooves therein.
Claim 184
Dependent Claim
87 words
The apparatus of claim 148 , wherein the middle lid comprises a generally cylindrical annular member having a first upper surface, a vertical cylindrical surface, a second upper surface, a first inner diameter vertical surface, an annular cylindrical surface, a second inner diameter vertical surface, a lower surface, an outer diameter surface, at least one aperture for supplying a gas therethrough, and at least one annular seal for sealingly engaging the portion of the object, the middle lid located between the upper lid and the lower lid.
Claim 185
Dependent Claim
31 words
The apparatus of claim 163 , further comprising: an interface clamp connected to the middle lid retaining a portion of the interface material between the lower lid and the interface clamp.
Claim 186
Dependent Claim
20 words
The apparatus of claim 148 , further comprising: an object clamp located between the upper lid and the middle lid.
Claim 187
Dependent Claim
20 words
The apparatus of claim 148 , further comprising: a lid clamp located between the upper lid and the middle lid.
Claim 188
Dependent Claim
42 words
The apparatus of claim 148 , further comprising: an object clamp located between the upper lid and the middle lid; and the lid clamp located between the upper lid and the middle lid, the lid clamp further located outside the object clamp.
Claim 189
Independent Claim
569 words
An apparatus for planarization of a surface on a wafer comprising: an upper lid including an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface, the lid clamp located below the upper lid; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first vertical outer diameter surface, a first cylindrical annular surface having a plurality of threaded blind apertures therein, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture for supplying a gas therethrough, a plurality of threaded apertures, and at least one annular seal for sealingly engaging a portion of an object, the middle lid located between the upper lid and a lower lid; the object including a generally cylindrical annular member having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the at least one annular seal in the first vertical outer diameter surface of the middle lid and the at least one annular seal in the annular inner surface of the middle lid, the object located below the upper lid and in the middle lid; an object clamp including a generally cylindrical annular member having an upper surface, an inner diameter vertical surface, a frusto-conical annular surface, a lower surface and an outer diameter surface; an annular seal having a portion thereof abutting the object clamp and the middle lid; a secured interface material located below the lower surface of the object; the lower lid having a portion thereof located below the lower surface of the object, the lower lid including an upper surface having an annular seal groove therein having an annular seal therein sealingly engaging the second cylindrical annular surface of the middle lid, a first vertical inner diameter surface, a first vertical inner cylindrical surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter surface, an outer diameter cylindrical surface, and a plurality of apertures extending from the upper surface to the bottom surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of threaded apertures extending from the upper surface to the lower surface; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the upper lid, extending through the lid clamp, and engaging a portion of a threaded aperture of the plurality of threaded apertures of the middle lid thereinto; and a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the interface clamp and engaging a portion of a threaded blind aperture of the plurality of threaded blind apertures extending from the first cylindrical annular surface of the middle lid thereinto.
Claim 190
Independent Claim
569 words
An apparatus for planarization of a surface on a wafer comprising: an upper lid including an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface, the lid clamp located below the upper lid; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first vertical outer diameter surface, a first cylindrical annular surface having a plurality of threaded blind apertures therein, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture for supplying a gas therethrough, a plurality of threaded apertures, and at least one annular seal for sealingly engaging a portion of an object, the middle lid located between the upper lid and a lower lid; the object including a generally cylindrical annular member having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the at least one annular seal in the first vertical outer diameter surface of the middle lid and the at least one annular seal in the annular inner surface of the middle lid, the object located below the upper lid and in the middle lid; an object clamp including a generally cylindrical annular member having an upper surface, an inner diameter vertical surface, a frusto-conical annular surface, a lower surface and an outer diameter surface; an annular seal having a portion thereof abutting the object clamp and the middle lid; a secured interface material located below the lower surface of the object; the lower lid having a portion thereof located below the lower surface of the object, the lower lid including an upper surface having an annular seal groove therein having an annular seal therein sealingly engaging the second cylindrical annular surface of the middle lid, a first vertical inner diameter surface, a first vertical inner cylindrical surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter surface, an outer diameter cylindrical surface, and a plurality of apertures extending from the upper surface to the bottom surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of threaded apertures extending from the upper surface to the lower surface; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the upper lid, extending through the lid clamp, and engaging a portion of a threaded aperture of the plurality of threaded apertures of the middle lid thereinto; and a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the interface clamp and engaging a portion of a threaded blind aperture of the plurality of threaded blind apertures extending from the first cylindrical annular surface of the middle lid thereinto.
Claim 191
Independent Claim
519 words
An apparatus for planarization of a surface on a wafer comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending therethrough; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, an annular cylindrical lip having a plurality of radially extending grooves therein, a first cylindrical annular surface having a plurality of threaded blind apertures therein, a first vertical outer diameter surface, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture extending from the second vertical outer diameter surface to the inner cylindrical surface for the flow of fluid therethrough, and a plurality of threaded apertures; a lower lid including a generally cylindrical annular member having a portion thereof located below a lower surface of an object, the lower lid including an upper surface having an annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, and a plurality of apertures extending therethrough from the upper surface to the bottom surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer diameter surface, and a plurality of apertures extending therethrough; the object having an upper surface, the lower surface, and an outer diameter having portions thereof sealingly engaging the annular seal located in the lower lid, the object located below the upper lid and in the middle lid; an interface material located below the lower surface of the object; an object clamp including a generally cylindrical annular member having an upper surface, a first vertical inner diameter surface, a second vertical inner diameter surface, a frusto-conical annular surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener extending through the upper lid and engaging a portion of an aperture of the plurality of threaded apertures extending from the upper surface of the middle lid to the second cylindrical annular surface thereof; and a plurality of threaded fasteners, each threaded fastener extending through an aperture of the plurality of apertures in the interface clamp and engaging a portion of a blind threaded aperture of the plurality of blind threaded apertures extending from the first cylindrical annular surface of the middle lid thereinto.
Claim 192
Independent Claim
519 words
An apparatus for planarization of a surface on a wafer comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending therethrough; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, an annular cylindrical lip having a plurality of radially extending grooves therein, a first cylindrical annular surface having a plurality of threaded blind apertures therein, a first vertical outer diameter surface, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture extending from the second vertical outer diameter surface to the inner cylindrical surface for the flow of fluid therethrough, and a plurality of threaded apertures; a lower lid including a generally cylindrical annular member having a portion thereof located below a lower surface of an object, the lower lid including an upper surface having an annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, and a plurality of apertures extending therethrough from the upper surface to the bottom surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer diameter surface, and a plurality of apertures extending therethrough; the object having an upper surface, the lower surface, and an outer diameter having portions thereof sealingly engaging the annular seal located in the lower lid, the object located below the upper lid and in the middle lid; an interface material located below the lower surface of the object; an object clamp including a generally cylindrical annular member having an upper surface, a first vertical inner diameter surface, a second vertical inner diameter surface, a frusto-conical annular surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener extending through the upper lid and engaging a portion of an aperture of the plurality of threaded apertures extending from the upper surface of the middle lid to the second cylindrical annular surface thereof; and a plurality of threaded fasteners, each threaded fastener extending through an aperture of the plurality of apertures in the interface clamp and engaging a portion of a blind threaded aperture of the plurality of blind threaded apertures extending from the first cylindrical annular surface of the middle lid thereinto.
Claim 193
Independent Claim
482 words
An apparatus for planarization of a surface on a wafer comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending from the upper surface to the lower surface, the lid clamp located below the upper lid; a middle lid including a generally cylindrical annular member having a first upper surface, a vertical cylindrical surface, a second upper surface, a first inner diameter vertical surface having annular groove therein having an annular seal therein, an annular cylindrical surface having an annular groove therein having an annular seal therein, a second inner diameter vertical surface, a lower surface, an outer diameter surface, at least one aperture extending from the outer diameter surface to the second inner diameter vertical surface for the supply of fluid therethrough, a plurality of threaded apertures extending from the lower surface, and a plurality of threaded apertures extending from the first upper surface; a lower lid including a generally cylindrical annular member having an upper surface having an annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a lower surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, a plurality of apertures extending from the upper surface to the lower surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner diameter, a lower surface, an inner annular extending lip, and a plurality of apertures; an object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the annular seal in the middle lid, the object located below the upper lid and in the middle lid; an interface material located below the lower surface of the object; an annular seal located between the upper lid and the lid clamp and the middle lid; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the upper lid, extending through the lid clamp, and engaging a portion of a threaded aperture of the another plurality of threaded apertures extending from the first upper surface of the middle lid thereinto; and a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the interface clamp and engaging a portion of a threaded aperture of the plurality of threaded apertures extending from the lower surface of the middle lid thereinto.
Claim 194
Independent Claim
482 words
An apparatus for planarization of a surface on a wafer comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending from the upper surface to the lower surface, the lid clamp located below the upper lid; a middle lid including a generally cylindrical annular member having a first upper surface, a vertical cylindrical surface, a second upper surface, a first inner diameter vertical surface having annular groove therein having an annular seal therein, an annular cylindrical surface having an annular groove therein having an annular seal therein, a second inner diameter vertical surface, a lower surface, an outer diameter surface, at least one aperture extending from the outer diameter surface to the second inner diameter vertical surface for the supply of fluid therethrough, a plurality of threaded apertures extending from the lower surface, and a plurality of threaded apertures extending from the first upper surface; a lower lid including a generally cylindrical annular member having an upper surface having an annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a lower surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, a plurality of apertures extending from the upper surface to the lower surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner diameter, a lower surface, an inner annular extending lip, and a plurality of apertures; an object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the annular seal in the middle lid, the object located below the upper lid and in the middle lid; an interface material located below the lower surface of the object; an annular seal located between the upper lid and the lid clamp and the middle lid; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the upper lid, extending through the lid clamp, and engaging a portion of a threaded aperture of the another plurality of threaded apertures extending from the first upper surface of the middle lid thereinto; and a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the interface clamp and engaging a portion of a threaded aperture of the plurality of threaded apertures extending from the lower surface of the middle lid thereinto.
Claim 195
Independent Claim
356 words
An apparatus for planarization of a surface on a wafer comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending therethrough; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first lower surface, a first vertical outer diameter, a second lower surface, a second vertical outer diameter, and a plurality of apertures extending from the upper surface to the second lower surface; a lower lid including a generally cylindrical annular member having an upper surface having an A annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, and a plurality of apertures extending from the upper surface to the bottom surface; an object clamp including a generally cylindrical annular member having an upper surface, an inner diameter vertical surface, a frusto-conical annular surface, a lower surface, and an outer diameter surface; an object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the annular seals in the lower lid, the object located below the upper lid and in the middle lid; an interface material located below the object and below the bottom surface of the lower lid; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; and a plurality of threaded fasteners, each threaded fastener extending through the upper lid and engaging a portion of an aperture of the plurality of apertures extending from the upper surface of the middle lid thereinto.
Claim 196
Independent Claim
356 words
An apparatus for planarization of a surface on a wafer comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending therethrough; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first lower surface, a first vertical outer diameter, a second lower surface, a second vertical outer diameter, and a plurality of apertures extending from the upper surface to the second lower surface; a lower lid including a generally cylindrical annular member having an upper surface having an A annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, and a plurality of apertures extending from the upper surface to the bottom surface; an object clamp including a generally cylindrical annular member having an upper surface, an inner diameter vertical surface, a frusto-conical annular surface, a lower surface, and an outer diameter surface; an object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the annular seals in the lower lid, the object located below the upper lid and in the middle lid; an interface material located below the object and below the bottom surface of the lower lid; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; and a plurality of threaded fasteners, each threaded fastener extending through the upper lid and engaging a portion of an aperture of the plurality of apertures extending from the upper surface of the middle lid thereinto.
Claim 197
Independent Claim
597 words
An apparatus for planarization of a surface on a wafer comprising: a lid assembly comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface, the lid clamp located below the upper lid; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first vertical outer diameter surface, a first cylindrical annular surface having a plurality of threaded blind apertures therein, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture for supplying a gas therethrough, a plurality of threaded apertures, and at least one annular seal for sealingly engaging a portion of an object, the middle lid located between the upper lid and a lower lid; the object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the at least one annular seal in the first vertical outer diameter surface of the middle lid and the at least one annular seal in the annular inner surface of the middle lid, the object located below the upper lid and in the middle lid; an object clamp including a generally cylindrical annular member having an upper surface, an inner diameter vertical surface, a frusto-conical annular surface, a lower surface and an outer diameter surface; an annular seal having a portion thereof abutting the object clamp and the middle lid; an interface material located below the object; the lower lid having a portion thereof located below the lower surface of the object, the lower lid including a generally cylindrical annular member having an upper surface having an annular seal groove therein having an annular seal therein sealingly engaging the second cylindrical annular surface of the middle lid, a first vertical inner diameter surface, a first vertical inner cylindrical inner surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter surface, an outer diameter cylindrical surface, and a plurality of apertures extending from the upper surface to the bottom surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of threaded apertures extending from the upper surface to the lower surface; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the upper lid, extending through the lid clamp, and engaging a portion of a threaded aperture of the plurality of threaded apertures of the middle lid thereinto; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the interface clamp and engaging a portion of a threaded blind aperture of the plurality of threaded blind apertures extending from the first cylindrical annular surface of the middle lid thereinto; and a chamber located below the lid assembly, the chamber including: a platform located in the chamber.
Claim 198
Independent Claim
597 words
An apparatus for planarization of a surface on a wafer comprising: a lid assembly comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface, the lid clamp located below the upper lid; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first vertical outer diameter surface, a first cylindrical annular surface having a plurality of threaded blind apertures therein, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture for supplying a gas therethrough, a plurality of threaded apertures, and at least one annular seal for sealingly engaging a portion of an object, the middle lid located between the upper lid and a lower lid; the object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the at least one annular seal in the first vertical outer diameter surface of the middle lid and the at least one annular seal in the annular inner surface of the middle lid, the object located below the upper lid and in the middle lid; an object clamp including a generally cylindrical annular member having an upper surface, an inner diameter vertical surface, a frusto-conical annular surface, a lower surface and an outer diameter surface; an annular seal having a portion thereof abutting the object clamp and the middle lid; an interface material located below the object; the lower lid having a portion thereof located below the lower surface of the object, the lower lid including a generally cylindrical annular member having an upper surface having an annular seal groove therein having an annular seal therein sealingly engaging the second cylindrical annular surface of the middle lid, a first vertical inner diameter surface, a first vertical inner cylindrical inner surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter surface, an outer diameter cylindrical surface, and a plurality of apertures extending from the upper surface to the bottom surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of threaded apertures extending from the upper surface to the lower surface; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the upper lid, extending through the lid clamp, and engaging a portion of a threaded aperture of the plurality of threaded apertures of the middle lid thereinto; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the interface clamp and engaging a portion of a threaded blind aperture of the plurality of threaded blind apertures extending from the first cylindrical annular surface of the middle lid thereinto; and a chamber located below the lid assembly, the chamber including: a platform located in the chamber.
Claim 199
Dependent Claim
15 words
The apparatus of claim 172 , further comprising: a resilient member located on the platform.
Claim 200
Dependent Claim
17 words
The apparatus of claim 172 , further comprising: a thermocouple for measuring a temperature in the chamber.
Claim 201
Independent Claim
536 words
An apparatus for planarization of a surface on a wafer comprising: a lid assembly comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending therethrough; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, an annular cylindrical lip having a plurality of radially extending grooves therein, a first cylindrical annular surface having a plurality of threaded blind apertures therein, a first vertical outer diameter surface, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture extending from the second vertical outer diameter surface to the inner cylindrical surface for the flow of fluid therethrough, and a plurality of threaded apertures; a lower lid including a generally cylindrical annular member having an upper surface having an annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, and a plurality of apertures extending therethrough from the upper surface to the bottom surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer diameter surface, and a plurality of apertures extending therethrough; an object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the annular seal located in the lower lid, the object located below the upper lid and in the middle lid; an interface material located and retained below the object; an object clamp including a generally cylindrical annular member having an upper surface, a first vertical inner diameter surface, a second vertical inner diameter surface, a frusto-conical annular surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the upper lid and engaging a portion of a threaded aperture of the plurality of threaded apertures extending from the upper surface of the middle lid to the second cylindrical annular surface thereof; and a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through an aperture of the plurality of apertures in the interface clamp and engaging a portion of a blind threaded aperture of the plurality of blind threaded apertures extending from the first cylindrical annular surface of the middle lid thereinto; and a chamber located below the lid assembly, the chamber including: a platform located in the chamber.
Claim 202
Independent Claim
536 words
An apparatus for planarization of a surface on a wafer comprising: a lid assembly comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending therethrough; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, an annular cylindrical lip having a plurality of radially extending grooves therein, a first cylindrical annular surface having a plurality of threaded blind apertures therein, a first vertical outer diameter surface, a second cylindrical annular surface, a second vertical outer diameter surface, at least one aperture extending from the second vertical outer diameter surface to the inner cylindrical surface for the flow of fluid therethrough, and a plurality of threaded apertures; a lower lid including a generally cylindrical annular member having an upper surface having an annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, and a plurality of apertures extending therethrough from the upper surface to the bottom surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer diameter surface, and a plurality of apertures extending therethrough; an object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the annular seal located in the lower lid, the object located below the upper lid and in the middle lid; an interface material located and retained below the object; an object clamp including a generally cylindrical annular member having an upper surface, a first vertical inner diameter surface, a second vertical inner diameter surface, a frusto-conical annular surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the upper lid and engaging a portion of a threaded aperture of the plurality of threaded apertures extending from the upper surface of the middle lid to the second cylindrical annular surface thereof; and a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through an aperture of the plurality of apertures in the interface clamp and engaging a portion of a blind threaded aperture of the plurality of blind threaded apertures extending from the first cylindrical annular surface of the middle lid thereinto; and a chamber located below the lid assembly, the chamber including: a platform located in the chamber.
Claim 203
Dependent Claim
15 words
The apparatus of claim 175 , further comprising: a resilient member located on the platform.
Claim 204
Dependent Claim
17 words
The apparatus of claim 175 , further comprising: a thermocouple for measuring a temperature in the chamber.
Claim 205
Independent Claim
500 words
An apparatus for planarization of a surface on a wafer comprising: a lid assembly comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending from the upper surface to the lower surface, the lid clamp located below the upper lid; a middle lid including a generally cylindrical annular member having a first upper surface, a vertical cylindrical surface, a second upper surface, a first inner diameter vertical surface having an annular groove therein having an annular seal therein, an annular cylindrical surface having an annular groove therein having an annular seal therein, a second inner diameter vertical surface, a lower surface, an outer diameter surface, at least one aperture extending from the outer diameter surface to the second inner diameter vertical surface for the supply of fluid therethrough, and a plurality of threaded apertures extending from the lower surface, and a plurality of threaded apertures extending from the first upper surface; a lower lid including a generally cylindrical annular member having an upper surface having an annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a lower surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, a plurality of apertures extending from the upper surface to the lower surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner diameter, a lower surface, an inner annular extending lip, and a plurality of apertures; an object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the annular seal in the middle lid, the object located below the upper lid and in the middle lid; an interface material located below the object; an annular seal located between the upper lid and the lid clamp and the middle lid; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the upper lid, extending through the lid clamp, and engaging a portion of a threaded aperture of the plurality of threaded apertures extending from the first upper surface of the middle lid thereinto; and a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the interface clamp and engaging a portion of a threaded aperture of the plurality of threaded apertures extending from the lower surface of the middle lid thereinto; and a chamber located below the lid assembly, the chamber including: a platform located in the chamber.
Claim 206
Independent Claim
500 words
An apparatus for planarization of a surface on a wafer comprising: a lid assembly comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending from the upper surface to the lower surface, the lid clamp located below the upper lid; a middle lid including a generally cylindrical annular member having a first upper surface, a vertical cylindrical surface, a second upper surface, a first inner diameter vertical surface having an annular groove therein having an annular seal therein, an annular cylindrical surface having an annular groove therein having an annular seal therein, a second inner diameter vertical surface, a lower surface, an outer diameter surface, at least one aperture extending from the outer diameter surface to the second inner diameter vertical surface for the supply of fluid therethrough, and a plurality of threaded apertures extending from the lower surface, and a plurality of threaded apertures extending from the first upper surface; a lower lid including a generally cylindrical annular member having an upper surface having an annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface having a plurality of blind apertures therein, a second vertical inner cylindrical surface, a lower surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, a plurality of apertures extending from the upper surface to the lower surface; an interface clamp including a generally cylindrical annular member having an upper surface, an inner diameter, a lower surface, an inner annular extending lip, and a plurality of apertures; an object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the annular seal in the middle lid, the object located below the upper lid and in the middle lid; an interface material located below the object; an annular seal located between the upper lid and the lid clamp and the middle lid; an annular seal located between the lid clamp and the middle lid; a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the upper lid, extending through the lid clamp, and engaging a portion of a threaded aperture of the plurality of threaded apertures extending from the first upper surface of the middle lid thereinto; and a plurality of threaded fasteners, each threaded fastener of the plurality of threaded fasteners extending through the interface clamp and engaging a portion of a threaded aperture of the plurality of threaded apertures extending from the lower surface of the middle lid thereinto; and a chamber located below the lid assembly, the chamber including: a platform located in the chamber.
Claim 207
Dependent Claim
15 words
The apparatus of claim 178 , further comprising: a resilient member located on the platform.
Claim 208
Dependent Claim
17 words
The apparatus of claim 178 , further comprising: a thermocouple for measuring a temperature in the chamber.
Claim 209
Independent Claim
376 words
An apparatus for planarization of a surface on a wafer comprising: a lid assembly comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending therethrough; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first lower surface, a first vertical outer diameter, a second lower surface, a second vertical outer diameter, and a plurality of apertures extending from the upper surface to the second lower surface; a lower lid including a generally cylindrical annular member having an upper surface having an annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, and a plurality of apertures extending from the upper surface to the bottom surface; an object clamp including a generally cylindrical annular member having an upper surface, an inner diameter vertical surface, a frusto-conical annular surface, a lower surface, and an outer diameter surface; an object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the annular seals in the lower lid, the object located below the upper lid and in the middle lid; an interface material located below the object and below the bottom surface of the lower lid; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; and a plurality of threaded fasteners, each threaded fastener extending through the upper lid and engaging a portion of an aperture of the plurality of apertures extending from the upper surface of the middle lid thereinto; and a chamber located below the lid assembly, the chamber including: a platform located in the chamber.
Claim 210
Independent Claim
376 words
An apparatus for planarization of a surface on a wafer comprising: a lid assembly comprising: an upper lid including a generally cylindrical annular member having an upper surface, an inner diameter surface, a lower surface, an outer diameter surface, and a plurality of apertures extending from the upper surface to the lower surface; a lid clamp including a generally cylindrical annular member having an upper surface, an inner cylindrical surface, a lower surface, an outer cylindrical surface, and a plurality of apertures extending therethrough; a middle lid including a generally cylindrical annular member having an upper surface, a frusto-conical annular inner surface, an inner cylindrical surface, a first lower surface, a first vertical outer diameter, a second lower surface, a second vertical outer diameter, and a plurality of apertures extending from the upper surface to the second lower surface; a lower lid including a generally cylindrical annular member having an upper surface having an annular seal groove therein having an annular seal therein, a first vertical inner cylindrical surface, an inner annular surface, a second vertical inner cylindrical surface, a bottom surface having an annular seal groove therein having an annular seal therein, an outer diameter cylindrical surface, and a plurality of apertures extending from the upper surface to the bottom surface; an object clamp including a generally cylindrical annular member having an upper surface, an inner diameter vertical surface, a frusto-conical annular surface, a lower surface, and an outer diameter surface; an object having an upper surface, a lower surface, and an outer diameter having portions thereof sealingly engaging the annular seals in the lower lid, the object located below the upper lid and in the middle lid; an interface material located below the object and below the bottom surface of the lower lid; an annular seal located between the upper lid and the lid clamp and the object clamp; an annular seal located between the lid clamp and the middle lid; and a plurality of threaded fasteners, each threaded fastener extending through the upper lid and engaging a portion of an aperture of the plurality of apertures extending from the upper surface of the middle lid thereinto; and a chamber located below the lid assembly, the chamber including: a platform located in the chamber.
Claim 211
Dependent Claim
15 words
The apparatus of claim 181 , further comprising: a resilient member located on the platform.
Claim 212
Dependent Claim
17 words
The apparatus of claim 181 , further comprising: a thermocouple for measuring a temperature in the chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-01-13 | 2006-07-15 | 2007-01-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-01-13 | 2010-07-15 | 2011-01-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-01-13 | 2014-07-15 | 2015-01-14 | $7700.00 | Window Closed / Lapsed |