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US6696220B2
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US
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Template for room temperature, low pressure micro-and nano-imprint lithography
Assignee: The University of Texas System
•
Filing: 2001-10-12
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Granted: 2004-02-24
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Expires: 2021-10-12
Abstract
Abstract Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activating light. At least a portion of the plurality of recesses may define features having a feature size less than about 250 nm. A template may be formed by obtaining a material that is substantially transparent to activating light and forming a plurality or recesses on a surface of the template. In some embodiments, a template may further include at least one alignment mark. In some embodiments, a template may further include a gap sensing area. An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and at least one piezo actuator coupled to the body. The piezo actuator may be configured to alter a physical dimension of the template during use.
Inventors
- 👤 Todd Bailey
- 👤 Byung J. Choi
- 👤 Matthew Colburn
- 👤 S. V. Sreenivasan
- 👤 C. Grant Willson
- 👤 John Ekerdt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 09:25
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G11; G11B; G11B5/00; G11B5/84; G11B5/855; B; B29; B29C; B29C35/00; B29C35/02; B29C35/08; B29C35/0888; B29C37/00; B29C37/005; B29C37/0053; B29C43/00; B29C43/003; B82; B82B; B82B3/00; B82Y; B82Y10/00; B82Y40/00; G03F7/0002; G03F9/00; B29C35/0805; B29C2035/0827; B29C43/02; B29C43/021; B29C2043/023; B29C2043/025; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/887
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
99 words
An imprint lithography template comprising: a body having first and second opposed sides with a pattern region and a first surface disposed on said first side, said pattern region including a pattern surface and a recess extending from said pattern surface toward said second side, ending in a terminus, with said first surface being spaced-apart from said second side a first distance, said terminus being spaced apart from said second side a second distance and said pattern surface being spaced-apart from said second side a third distance, with said first distance differing from both said second and third distances.
Claim 2
Dependent Claim
99 words
An imprint lithography template comprising: a body having first and second opposed sides with a pattern region and a first surface disposed on said first side, said pattern region including a pattern surface and a recess extending from said pattern surface toward said second side, ending in a terminus, with said first surface being spaced-apart from said second side a first distance, said terminus being spaced apart from said second side a second distance and said pattern surface being spaced-apart from said second side a third distance, with said first distance differing from both said second and third distances.
Claim 3
Dependent Claim
15 words
The template as recited in claim 1 wherein said first surface surrounds said pattern region.
Claim 4
Dependent Claim
21 words
The template as recited in claim 1 wherein said first surface is positioned proximate to said periphery, defining a peripheral surface.
Claim 5
Dependent Claim
15 words
The template as recited in claim 1 wherein said first surface flanks said pattern region.
Claim 6
Dependent Claim
18 words
The template as recited in claim 1 wherein said first surface surrounds a sub-portion of said pattern region.
Claim 7
Dependent Claim
55 words
The template as recited in claim 1 wherein said first side has first and second groups of recesses formed, with the recesses associated with said first group being associated with said pattern region and the recess associated with said second group extending from said first side toward said second side, terminating in said first surface.
Claim 8
Dependent Claim
55 words
The template as recited in claim 1 wherein a portion of said body is formed from material selected from a group of material consisting of silicon, silicon dioxide, silicon germanium carbon, gallium nitride, silicon germanium, sapphire, gallium arsenide, epitaxial silicon, polysilicon, gate oxide, quartz, indium tin oxide and SiOx, wherein x is less than 2.
Claim 9
Dependent Claim
31 words
The template as recited in claim 1 wherein a step is defined between said first surface and said pattern portion and said first surface, said step defining a fluid confinement structure.
Claim 10
Dependent Claim
28 words
The template as recited in claim 1 wherein said first surface is formed to have a surface free energy measured at 25° C. of less than 40 dynes/cm.
Claim 11
Dependent Claim
38 words
The template as recited in claim 1 further including an alignment mark disposed on said body, with said alignment mark being substantially transparent to a first wavelength of light and substantially opaque to a second wavelength of light.
Claim 12
Dependent Claim
22 words
The template as recited in claim 10 wherein said alignment mark is formed from SiOx material, where x is less than 2.
Claim 13
Dependent Claim
46 words
The template as recited in claim 1 wherein said first surface has a surface treatment layer disposed thereon, with said surface treatment layer comprising a reaction product of water and a chemical from a group of chemicals consisting essentially of alkysilane, fluoroalkylsilane, fluoroalkyltrichlorosilane, and tridecafluoro-1,1,2,2-tetrahydrooctyl trichlorosilane.
Claim 14
Dependent Claim
16 words
The template as recited in claim 1 further including a conductive coating disposed on said body.
Claim 15
Dependent Claim
16 words
The template as recited in claim 1 further including a reflective coating disposed on said body.
Claim 16
Dependent Claim
15 words
The template as recited in claim 1 further including a mirror coupled to said body.
Claim 17
Dependent Claim
21 words
The template as recited in claim 1 wherein said pattern portion and said first surface are integrally formed into said body.
Claim 18
Dependent Claim
43 words
The template as recited in claim 1 wherein said body includes first and second components, with said first component containing said patterned portion and said second component containing said first surface, said first component being attached to said second component with an adhesive.
Claim 19
Dependent Claim
20 words
The template as recited in claim 1 wherein said first distance is greater than either said second and third distances.
Claim 20
Dependent Claim
20 words
The template as recited in claim 1 wherein said first distance is less than either said second and third distances.
Claim 21
Dependent Claim
54 words
The template as recited in claim 1 wherein said first distance is of greater distance than said second distance and said third distance, with said third distance being of greater distance than said second distance, with said first group of recesses on said first side having equal depth with said second group of recesses.
Claim 22
Dependent Claim
35 words
An imprint lithography template comprising: a body having a first surface with a pattern region and a peripheral region, with said peripheral region being spaced-apart from said pattern region defining a step in said surface.
Claim 23
Dependent Claim
35 words
An imprint lithography template comprising: a body having a first surface with a pattern region and a peripheral region, with said peripheral region being spaced-apart from said pattern region defining a step in said surface.
Claim 24
Dependent Claim
55 words
The template as recited in claim 21 wherein a portion of said body is formed from material selected from a group of material consisting of silicon, silicon dioxide, silicon germanium carbon, gallium nitride, silicon germanium, sapphire, gallium arsenide, epitaxial silicon, polysilicon, gate oxide, quartz, indium tin oxide and SiOx, wherein x is less than 2.
Claim 25
Dependent Claim
43 words
The template as recited in claim 21 wherein said first surface has first and second groups of recesses formed, with the recesses associated with said first group having a depth that differs from a depth of the recesses associated with said second group.
Claim 26
Dependent Claim
15 words
The template as recited in claim 21 wherein said step defines a fluid confinement structure.
Claim 27
Dependent Claim
28 words
The template as recited in claim 21 wherein said first surface is formed to have a surface free energy measured at 25° C. of less that 40 dynes/cm.
Claim 28
Dependent Claim
46 words
The template as recited in claim 21 further including an alignment mark disposed on said body, with said alignment mark being substantially transparent to activating light and substantially opaque to analyzing, with said alignment mark being formed from SiOx material, where x is less than 2.
Claim 29
Dependent Claim
46 words
The template as recited in claim 21 wherein said first surface has a surface treatment layer disposed thereon, with said surface treatment layer comprising a reaction product of water and a chemical from a group of chemicals consisting essentially of alkysilane, fluoroalkylsilane, fluoroalkyltrichlorosilane, and tridecafluoro-1,1,2,2-tetrahydrooctyl trichlorosilane.
Claim 30
Dependent Claim
16 words
The template as recited in claim 21 further including a conductive coating disposed on said body.
Claim 31
Dependent Claim
16 words
The template as recited in claim 21 further including a reflective coating disposed on said body.
Claim 32
Dependent Claim
21 words
The template as recited in claim 21 wherein said pattern region and said peripheral region are integrally formed into said body.
Claim 33
Dependent Claim
43 words
The template as recited in claim 21 wherein said body includes first and second components, with said first component containing said pattern region and said second component containing said peripheral region, said first component being attached to said second component with an adhesive.
Claim 34
Dependent Claim
144 words
An imprint lithography template comprising: a body having first and second opposed sides with a pattern region and a first surface disposed on said first side, said first side including first and second groups of recesses, with the recesses associated with said first group defining a pattern region having a pattern surface and the recesses associated with said second group extending from said first side toward said second side, terminating in a first surface, the recesses associated with said first group extending from said pattern surface toward said second side, ending in a terminus, with said first surface being spaced-apart from said second side a first distance, said terminus being spaced apart from said second side a second distance and said pattern surface being spaced-apart from said second side a third distance, with said first distance differing from both said second and third distances.
Claim 35
Dependent Claim
144 words
An imprint lithography template comprising: a body having first and second opposed sides with a pattern region and a first surface disposed on said first side, said first side including first and second groups of recesses, with the recesses associated with said first group defining a pattern region having a pattern surface and the recesses associated with said second group extending from said first side toward said second side, terminating in a first surface, the recesses associated with said first group extending from said pattern surface toward said second side, ending in a terminus, with said first surface being spaced-apart from said second side a first distance, said terminus being spaced apart from said second side a second distance and said pattern surface being spaced-apart from said second side a third distance, with said first distance differing from both said second and third distances.
Claim 36
Dependent Claim
15 words
The template as recited in claim 32 wherein said first surface surrounds said pattern region.
Claim 37
Dependent Claim
21 words
The template as recited in claim 32 wherein said first surface is positioned proximate to said periphery, defining a peripheral surface.
Claim 38
Dependent Claim
15 words
The template as recited in claim 32 wherein said first surface flanks said pattern region.
Claim 39
Dependent Claim
18 words
The template as recited in claim 32 wherein said first surface surrounds a sub-portion of said pattern region.
Claim 40
Independent Claim
46 words
A device for holding an imprint lithography template, comprising: a body comprising an opening, wherein said opening is configured to receive said imprint lithography template; a supporting plate coupled to said body; and a piezo system coupled to said body to vary dimensions of said template.
Claim 41
Independent Claim
46 words
A device for holding an imprint lithography template, comprising: a body comprising an opening, wherein said opening is configured to receive said imprint lithography template; a supporting plate coupled to said body; and a piezo system coupled to said body to vary dimensions of said template.
Claim 42
Dependent Claim
28 words
The device as recited in claim 37 wherein said supporting plate is formed from material selected from a set of materials consisting of quartz, SiO 2 and sapphire.
Claim 43
Dependent Claim
21 words
The device as recited in claim 37 wherein said piezo system includes a piezo actuator coupled to selectively compress said template.
Claim 44
Dependent Claim
24 words
The device as recited in claim 37 wherein said piezo system includes a piezo actuator coupled to apply a tensile force to said template.
Claim 45
Dependent Claim
26 words
The device as recited in claim 37 further including a vacuum system in fluid communication with said supporting plate to apply a vacuum to said template.
Claim 46
Dependent Claim
30 words
The device as recited in claim 37 further including a vacuum system in fluid communication with said supporting plate to apply said vacuum between said supporting plate and said body.
Claim 47
Dependent Claim
28 words
The device as recited in claim 37 wherein said supporting plate is configured to reduce deformation of said template due to forces present during an imprint lithography process.
Claim 48
Dependent Claim
23 words
The device as recited in claim 37 further including a reflective element connected to a portion of said body located within said opening.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-02-23 | 2007-08-25 | 2008-02-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-02-23 | 2011-08-25 | 2012-02-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-02-23 | 2015-08-25 | 2016-02-24 | $7700.00 | Window Closed / Lapsed |