US6916585B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of varying template dimensions to achieve alignment during imprint lithography
Assignee: The University of Texas System
•
Filing: 2003-05-27
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Granted: 2005-07-12
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Expires: 2023-05-27
Abstract
Abstract A method of determining and correcting alignment during imprint lithography process is described. During an imprint lithographic process the template may be aligned with the substrate by the use of alignment marks disposed on both the template and substrate. The alignment may be determined and corrected for before the layer is processed.
Inventors
- 👤 Sidlgata V. Sreenivasan
- 👤 Byung J. Choi
- 👤 Matthew Colburn
- 👤 Todd Bailey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 10:57
CPC Classifications
B; B29; B29C; B29C35/00; B29C35/02; B29C35/08; B29C35/0888; B29C37/00; B29C37/005; B29C37/0053; B29C43/00; B29C43/003; B29C43/02; B29C43/021; B82; B82Y; B82Y10/00; B82Y40/00; G; G03; G03F; G03F7/00; G03F7/0002; G03F9/00; B29C35/0805; B29C2035/0827; B29C2043/023; B29C2043/025; Y; Y10; Y10S; Y10S101/00; Y10S101/36; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
72 words
A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising: locating a liquid between said template and said substrate; placing said template and said substrate in superimposition; and varying dimensions of said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks concurrently with said template being in contact with a portion of said liquid.
Claim 2
Independent Claim
72 words
A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising: locating a liquid between said template and said substrate; placing said template and said substrate in superimposition; and varying dimensions of said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks concurrently with said template being in contact with a portion of said liquid.
Claim 3
Dependent Claim
21 words
The method as recited in claim 1 , wherein varying said dimensions further includes applying a compressive force to said template.
Claim 4
Dependent Claim
21 words
The method as recited in claim 1 , wherein varying said dimensions further includes applying a stretching force to said template.
Claim 5
Dependent Claim
60 words
The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially the same.
Claim 6
Dependent Claim
59 words
The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially different.
Claim 7
Dependent Claim
58 words
The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with each of said forces being substantially the same.
Claim 8
Dependent Claim
59 words
The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first, second, and third forces being substantially different.
Claim 9
Dependent Claim
72 words
The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first force and said second force being substantially the same, and said first force and said third force being substantially different.
Claim 10
Dependent Claim
60 words
The method as recited in claim 1 , wherein said template further includes a first side and a second side extended transversely to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially the same.
Claim 11
Dependent Claim
59 words
The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned transversely to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially different.
Claim 12
Dependent Claim
58 words
The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned transversely to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with each of said forces being substantially the same.
Claim 13
Dependent Claim
60 words
The method as recited in claim 1 , wherein said template further includes a first side and a second side extending transversely to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first, second, and third forces being substantially different forces.
Claim 14
Dependent Claim
72 words
The method as recited in claim 1 , wherein said template further includes a first side and a second side extending transversely to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first force and said second force being substantially the same, and said first force and said third force being substantially different.
Claim 15
Dependent Claim
53 words
The method as recited in claim 1 , wherein said template further includes a plurality of sides, and varying said dimensions further includes applying a plurality of forces to each of said plurality of sides, with each of said forces being substantially the same as the remaining forces of said plurality of forces.
Claim 16
Dependent Claim
52 words
The method as recited in claim 1 , wherein said template further includes a plurality of sides, and varying said dimensions further includes applying a plurality of forces to each of said plurality of sides, with one of said plurality of forces differing from the remaining forces of said plurality of forces.
Claim 17
Dependent Claim
72 words
The method as recited in claim 1 , wherein said template further includes a plurality of sides, and varying said dimensions further includes applying a plurality of forces to each side, with a first group of forces being applied to one side of said plurality of sides, wherein said first group of forces include a first force and a second force, with said first force and said second force being substantially different.
Claim 18
Dependent Claim
19 words
The method as recited in claim 1 further including impinging actinic radiation upon said liquid to solidify said liquid.
Claim 19
Dependent Claim
28 words
The method as recited in claim 1 further including impinging actinic radiation upon said liquid to form a solidified layer, and separating said template from said solidified layer.
Claim 20
Independent Claim
91 words
A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising: locating a liquid between said template and said substrate; placing said template and said substrate in superimposition; varying dimensions of said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks by applying a plurality of forces to said template, concurrently with said template being in contact with a portion of said liquid; and impinging actinic radiation upon said liquid to solidify said liquid.
Claim 21
Independent Claim
91 words
A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising: locating a liquid between said template and said substrate; placing said template and said substrate in superimposition; varying dimensions of said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks by applying a plurality of forces to said template, concurrently with said template being in contact with a portion of said liquid; and impinging actinic radiation upon said liquid to solidify said liquid.
Claim 22
Dependent Claim
21 words
The method as recited in claim 19 , wherein varying said dimensions further includes applying a compressive force to said template.
Claim 23
Dependent Claim
21 words
The method as recited in claim 19 , wherein varying said dimensions further includes applying a stretching force to said template.
Claim 24
Dependent Claim
42 words
The method as recited in claim 19 wherein varying said dimensions further includes applying a plurality of forces to a first side of said template, with a set of said plurality of forces differing from remaining forces of said plurality of forces.
Claim 25
Dependent Claim
32 words
The method as recited in claim 19 wherein impinging actinic radiation further includes forming a solidified layer from said liquid, with said method further including separating said template from said solidified layer.
Claim 26
Independent Claim
54 words
A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising: placing said template and said substrate in superimposition; and controlling thermal properties of said substrate and said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks.
Claim 27
Independent Claim
54 words
A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising: placing said template and said substrate in superimposition; and controlling thermal properties of said substrate and said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks.
Claim 28
Dependent Claim
20 words
The method as recited in claim 24 wherein controlling said thermal properties further includes altering a temperature of said template.
Claim 29
Dependent Claim
16 words
The method as recited in claim 25 wherein altering said temperature further includes enlarging said template.
Claim 30
Dependent Claim
16 words
The method as recited in claim 25 wherein altering said temperature further includes contracting said template.
Claim 31
Dependent Claim
44 words
The method as recited in claim 24 further including locating a liquid between said template and said substrate, and wherein controlling said thermal properties further includes varying dimensions of said template concurrently with said template being in contact with a portion of said liquid.
Claim 32
Dependent Claim
20 words
The method as recited in claim 28 further including impinging actinic radiation upon said liquid to form a solidified layer.
Claim 33
Dependent Claim
16 words
The method as recited in claim 29 further including separating said template from said solidified layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2008-07-11 | 2009-01-10 | 2009-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-07-11 | 2013-01-10 | 2013-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2016-07-11 | 2017-01-10 | 2017-07-12 | $7700.00 | Window Closed / Lapsed |