US6919152B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
High resolution overlay alignment systems for imprint lithography
Assignee: The University of Texas System
•
Filing: 2003-05-27
•
Granted: 2005-07-19
•
Expires: 2023-05-27
Abstract
Abstract A system of determining and correcting alignment during imprint lithography process is described. During an imprint lithographic process the template may be aligned with the substrate by the use of alignment marks disposed on both the template and substrate. The alignment may be determined and corrected for before the layer is processed.
Inventors
- 👤 S. V. Sreenivasan
- 👤 Byung J. Choi
- 👤 Matthew Colburn
- 👤 Todd Bailey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 19:25
CPC Classifications
B; B29; B29C; B29C35/00; B29C35/02; B29C35/08; B29C35/0888; B29C37/00; B29C37/005; B29C37/0053; B29C43/00; B29C43/003; B29C43/02; B29C43/021; B82; B82Y; B82Y10/00; B82Y40/00; G; G03; G03F; G03F7/00; G03F7/0002; G03F9/00; B29C35/0805; B29C2035/0827; B29C2043/023; B29C2043/025; Y; Y10; Y10S; Y10S101/00; Y10S101/36; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
29 words
An imprint lithography system having a template, said system comprising: a mount to hold said template; and a device coupled to said mount to vary dimensions of said template.
Claim 2
Dependent Claim
29 words
An imprint lithography system having a template, said system comprising: a mount to hold said template; and a device coupled to said mount to vary dimensions of said template.
Claim 3
Dependent Claim
27 words
The system as recited in claim 1 , wherein said device includes a member to vary a temperature of said template to cause said dimensions to vary.
Claim 4
Dependent Claim
30 words
The system as recited in claim 1 , wherein said device further includes a plurality of piezo actuators attached to apply a force to said template and vary said dimensions.
Claim 5
Dependent Claim
52 words
The system as recited in claim 1 , wherein said template further includes two sides extending transversely to each other, and said device includes a plurality of piezo actuators, with more than ore of said plurality of piezo actuators being coupled to each of said two sides to apply a force thereto.
Claim 6
Dependent Claim
43 words
The system as recited in claim 1 , wherein said template further includes two sides extending transversely to each other, and said device further includes a plurality of piezo actuators attached to apply a force to said two sides and alter said dimensions.
Claim 7
Dependent Claim
52 words
The system as recited in claim 1 , wherein said template further includes two sides disposed opposite to each other, and said device includes a plurality of piezo actuators, with more than one of said plurality of piezo actuators being coupled to each of said two sides to apply a force thereto.
Claim 8
Dependent Claim
43 words
The system as recited in claim 1 , wherein said template further includes two sides disposed opposite to each other, and said device further includes a plurality of piezo actuators attached to apply a force to said two sides and alter said dimensions.
Claim 9
Dependent Claim
49 words
The system as recited in claim 1 , wherein said template further includes a plurality of sides, and said device includes a plurality of piezo actuators, with more than one of said plurality of piezo actuators coupled to each of said plurality of sides to apply a force thereto.
Claim 10
Dependent Claim
49 words
The system as recited in claim 1 , wherein said template further includes a plurality of sides, and said device further includes a plurality of piezo actuators, with one of said plurality of piezo actuators being coupled to each of said plurality of sides to apply a force thereto.
Claim 11
Dependent Claim
27 words
The system as recited in claim 1 , wherein said device includes a piezo actuator attached to apply a force to said template and vary said dimensions.
Claim 12
Dependent Claim
33 words
The system as recited in claim 10 , wherein said force of said actuator further comprises a compressive force, with said compressive force being applied to at least a portion of the template.
Claim 13
Dependent Claim
33 words
The system as recited in claim 10 , wherein said force of said actuator further comprises a stretching force, with said stretching force being applied to at least a portion of the template.
Claim 14
Dependent Claim
92 words
The system as recited in claim 10 , wherein said template further includes template alignment marks and further including a substrate disposed opposite to said template and having substrate alignment marks and first and second fluxes of light, each of said first and second fluxes light having differing characteristics associated therewith, defining first and second characteristics, with said substrate alignment marks and said template alignment marks being responsive to said first characteristics, and defining a first response, and responsive to said second characteristics, defining a second response differing from said first response.
Claim 15
Dependent Claim
103 words
An imprint lithography system having a template, said template having template alignment marks, said system comprising: a mount to hold said template; a stage disposed opposite to said template; a substrate disposed on said stage, with said substrate having substrate alignment marks; an illumination system to impinge light upon said substrate alignment marks and said template alignment marks; a detection system in optical communication with said substrate alignment marks and said template alignment marks; and a device coupled to said mount to vary dimensions of said template to place said template alignment marks and said substrate alignment marks in a desired spatial orientation.
Claim 16
Dependent Claim
103 words
An imprint lithography system having a template, said template having template alignment marks, said system comprising: a mount to hold said template; a stage disposed opposite to said template; a substrate disposed on said stage, with said substrate having substrate alignment marks; an illumination system to impinge light upon said substrate alignment marks and said template alignment marks; a detection system in optical communication with said substrate alignment marks and said template alignment marks; and a device coupled to said mount to vary dimensions of said template to place said template alignment marks and said substrate alignment marks in a desired spatial orientation.
Claim 17
Dependent Claim
28 words
The system as recited in claim 14 , wherein said device further includes a member to vary a temperature of said template to cause said dimensions to vary.
Claim 18
Dependent Claim
43 words
The system as recited in claim 14 , wherein said template further includes two sides extending transversely to each other, and said device further includes a plurality of piezo actuators attached to apply a force to said two sides and alter said dimensions.
Claim 19
Dependent Claim
43 words
The system as recited in claim 14 , wherein said template further includes two sides positioned opposite to each other, and said device further includes a plurality of piezo actuators attached to apply a force to said two sides and alter said dimensions.
Claim 20
Dependent Claim
41 words
The system as recited in claim 14 , wherein said template further includes a plurality of sides, and said device further includes a plurality of piezo actuators attached to apply a force to said plurality of sides and alter said dimensions.
Claim 21
Dependent Claim
74 words
The system as recited in claim 14 , wherein said illumination system further includes first and second fluxes of light, each of said first and second fluxes light having differing characteristics associated therewith, defining first and second characteristics, with said substrate alignment marks and said template alignment marks being responsive to said first characteristics, and defining a first response, and responsive to said second characteristics, defining a second response differing from said first response.
Claim 22
Dependent Claim
27 words
The system as recited in claim 14 , wherein said device includes a piezo actuator attached to said mount to apply a force to vary said dimensions.
Claim 23
Dependent Claim
15 words
The system as recited in claim 20 , wherein said force comprises a compressive force.
Claim 24
Dependent Claim
15 words
The system as recited in claim 20 , wherein said force comprises a stretching force.
Claim 25
Dependent Claim
53 words
An imprint lithography system having a template, said system comprising: a mount to hold said template; and a device coupled to said mount to vary dimensions of said template by applying forces to said template, with said forces being selected from a set of forces comprising a compressive force and a stretching force.
Claim 26
Dependent Claim
53 words
An imprint lithography system having a template, said system comprising: a mount to hold said template; and a device coupled to said mount to vary dimensions of said template by applying forces to said template, with said forces being selected from a set of forces comprising a compressive force and a stretching force.
Claim 27
Dependent Claim
50 words
The imprint lithography system as recited in claim 23 , wherein said device includes a plurality of piezo actuators coupled to said template to apply said compressive force along a first axis and said stretching force along a second axis, with said second axis extending transversely to said first axis.
Claim 28
Dependent Claim
59 words
The imprint lithography system as recited in claim 23 , wherein said device includes a plurality of piezo actuators coupled to said template to apply said compressive force along a first axis and a heating device connected to said mount to create said stretching force along a second axis, with said second axis extending transversely to said first axis.
Claim 29
Dependent Claim
43 words
The imprint lithography system as recited in claim 23 , wherein said device includes a plurality of piezo actuators coupled to said template to apply said compressive force along first and second axes, with said first axis extending transversely to said second axis.
Claim 30
Dependent Claim
28 words
The imprint lithography system as recited in claim 23 further including a heating system in thermal communication with said template to expand said template along two transverse axes.
Claim 31
Dependent Claim
28 words
The imprint lithography system as recited in claim 23 further including a heating system in thermal communication with said template to constrict said template along two transverse axes.
References Cited (Backward Citations)
US3783520A
Cited
US4119688A
Cited
US4256829A
Cited
US4201800A
Cited
US4326805A
Cited
JPH0224848B2
Cited
US4426247A
Cited
US4507331A
Cited
US4552833A
Cited
US4657845A
Cited
US4692205A
Cited
US4724222A
Cited
US4737425A
Cited
US4826943A
Cited
US4857477A
Cited
US4707218A
Cited
US4931351A
Cited
US6391798B1
Cited
US5736424A
Cited
US4808511A
Cited
US4976818A
Cited
US4891303A
Cited
US5074667A
Cited
JPH0292603A
Cited
US5071694A
Cited
US4999280A
Cited
US5169494A
Cited
US5173393A
Cited
US5234793A
Cited
US5148036A
Cited
US5151754A
Cited
US5198326A
Cited
US5527662A
Cited
US5314772A
Cited
US5414514A
Cited
US6776094B1
Cited
US5700626A
Cited
US5737064A
Cited
US5948570A
Cited
US6088103A
Cited
US5808742A
Cited
US5654238A
Cited
US20030179354A1
Cited
US5802914A
Cited
US5895263A
Cited
US5926690A
Cited
US6033977A
Cited
US6646662B1
Cited
US6150231A
Cited
US5907782A
Cited
US6096655A
Cited
WO2000021689A1
Cited
US6713238B1
Cited
US6677252B2
Cited
US6274294B1
Cited
US6565928B2
Cited
US6719915B2
Cited
US6767983B1
Cited
US6387783B1
Cited
US6522411B1
Cited
US6514672B2
Cited
US6388253B1
Cited
US6383928B1
Cited
US6329256B1
Cited
US20040169441A1
Cited
US20040149687A1
Cited
US20040104641A1
Cited
US20040168588A1
Cited
US20040251775A1
Cited
US6703190B2
Cited
WO2001047003A3
Cited
US6245581B1
Cited
US20040163563A1
Cited
US20040189996A1
Cited
US20040141163A1
Cited
US6842229B2
Cited
US20040209177A1
Cited
US20040053146A1
Cited
US6730256B1
Cited
US6777170B1
Cited
US20020150398A1
Cited
US6455411B1
Cited
US20040168586A1
Cited
US20040170771A1
Cited
US6790763B2
Cited
US6489068B1
Cited
US20040169994A1
Cited
US6632742B2
Cited
US6635581B2
Cited
US6561706B2
Cited
US6716767B2
Cited
US20030129542A1
Cited
US20030113638A1
Cited
US6737202B2
Cited
US20040029041A1
Cited
US20040112881A1
Cited
US6743713B2
Cited
US20040200411A1
Cited
US20030215577A1
Cited
US20040007799A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2008-07-18 | 2009-01-17 | 2009-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-07-18 | 2013-01-17 | 2013-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2016-07-18 | 2017-01-17 | 2017-07-19 | $7700.00 | Window Closed / Lapsed |