US6677252B2
Expired / Lapsed
US
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Methods for planarization of non-planar surfaces in device fabrication
Assignee: Micron Technology Inc
•
Filing: 2002-06-06
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Granted: 2004-01-13
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Expires: 2022-06-06
Abstract
Abstract A method of planarizing a surface of a wafer includes providing a planarization material on the wafer surface and bringing a substantially flat surface into contact with the planarization material on the wafer. The planarization material is exposed to radiation at a first wavelength to cure the planarization material and is exposed to radiation at a second wavelength to cause changes to the planarization material that facilitate separation of the substantially flat surface from the planarization material.
Inventors
- 👤 Eugene P. Marsh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 19:12
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/06; H10P14/00; H10P14/60; H10P14/68; H10P14/683; H10P50/00; H10P50/60; H10P50/64; H10P50/642
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
177 words
A method for globally planarizing a surface of a wafer using a substantially flat surface, the surface of the wafer having a planarization material on at least a portion thereof, the planarization material including an agent sensitive to radiation having a wavelength for inhibiting curing of the planarization material when exposed to the radiation having a wavelength for inhibiting curing, comprising: contacting the planarization material on the surface of the wafer using the substantially flat surface; providing radiation having a first wavelength; exposing the planarization material on the surface of the wafer to the radiation having the first wavelength; curing the planarization material on the surface of the wafer using the radiation having the first wavelength; providing radiation having a second wavelength, the radiation having the second wavelength for inhibiting curing of the planarization material; and exposing the planarization material on the surface of the wafer to the radiation having the second wavelength, causing changes to the planarization material for facilitating separation of the substantially flat surface from the planarization material on the surface of the wafer.
Claim 2
Independent Claim
177 words
A method for globally planarizing a surface of a wafer using a substantially flat surface, the surface of the wafer having a planarization material on at least a portion thereof, the planarization material including an agent sensitive to radiation having a wavelength for inhibiting curing of the planarization material when exposed to the radiation having a wavelength for inhibiting curing, comprising: contacting the planarization material on the surface of the wafer using the substantially flat surface; providing radiation having a first wavelength; exposing the planarization material on the surface of the wafer to the radiation having the first wavelength; curing the planarization material on the surface of the wafer using the radiation having the first wavelength; providing radiation having a second wavelength, the radiation having the second wavelength for inhibiting curing of the planarization material; and exposing the planarization material on the surface of the wafer to the radiation having the second wavelength, causing changes to the planarization material for facilitating separation of the substantially flat surface from the planarization material on the surface of the wafer.
Claim 3
Dependent Claim
29 words
The method of claim 1 , wherein the planarization material includes a phenolic polymer and wherein the radiation having the second wavelength comprises radiation in a deep UV range.
Claim 4
Dependent Claim
47 words
The method of claim 1 , further comprising: absorbing the radiation having the second wavelength by the planarization material on the surface of the wafer within approximately 50 nanometers of an interface between the planarization material on the surface of the wafer and the substantially flat surface.
Claim 5
Dependent Claim
60 words
The method of claim 3 , wherein contacting the planarization material on the surface of the wafer using the substantially flat surface includes: providing an optical flat; and contacting the planarization material on the surface of the wafer using the optical flat, the radiation having the first wavelength and the radiation having the second wavelength passing through the optical flat.
Claim 6
Dependent Claim
39 words
The method of claim 1 , wherein the exposing of the planarization material on the surface of the wafer to the radiation having the first wavelength and the radiation having the second wavelength occurs substantially at the same time.
Claim 7
Dependent Claim
43 words
The method of claim 1 , wherein exposing the planarization material on the surface of the wafer to the radiation having the second wavelength occurs before exposing the planarization material on the surface of the wafer to the radiation having the first wavelength.
Claim 8
Dependent Claim
68 words
The method of claim 1 , wherein the planarization material includes a first agent sensitive to radiation having a first wavelength greater than about 400 nanometers and a second agent sensitive to radiation at a second wavelength in the range of about 190 to 280 nanometers for inhibiting curing of the planarization material on the surface of the wafer when exposed to the radiation having the second wavelength.
Claim 9
Dependent Claim
40 words
The method of claim 1 , wherein the planarization material on the surface of the wafer includes an acid-generating agent sensitive to the radiation having the first wavelength and a base-generating agent sensitive to the radiation having the second wavelength.
Claim 10
Dependent Claim
16 words
The method of claim 8 , wherein the first wavelength is longer than the second wavelength.
Claim 11
Dependent Claim
87 words
The method of claim 1 , including: providing an optical flat having a substantially flat surface, the optical flat transparent to the radiation having the first wavelength and the radiation having the second wavelength; and contacting the planarization material on the surface of the wafer using the optical flat; wherein, exposing the planarization material to the radiation having the first wavelength and the radiation having the second wavelength includes passing the radiation having the first wavelength and the radiation having the second wavelength through the optical flat.
Claim 12
Dependent Claim
49 words
The method of claim 1 , wherein the planarization material on the surface of the wafer includes an agent sensitive to the radiation at the second wavelength for causing the planarization material on the surface of the wafer to decompose when exposed to the radiation having the second wavelength.
Claim 13
Dependent Claim
25 words
The method of claim 11 , wherein the planarization material on the surface of the wafer includes a polymer having a doubly substituted carbon backbone.
Claim 14
Dependent Claim
31 words
The method of claim 11 , wherein exposing the planarization material to the radiation having the first wavelength and the radiation having the second wavelength occurs at substantially the same time.
Claim 15
Dependent Claim
44 words
The method of claim 11 , wherein exposing the planarization material on the surface of the wafer to the radiation having the first wavelength occurs prior to exposing the planarization material on the surface of the wafer to the radiation having the second wavelength.
Claim 16
Dependent Claim
20 words
The method of claim 14 , wherein the radiation having the second wavelength comprises radiation in a deep UV range.
Claim 17
Dependent Claim
29 words
The method of claim 1 , wherein the planarization material on the surface of the wafer produces a gaseous by-product when exposed to the radiation having the second wavelength.
Claim 18
Dependent Claim
33 words
The method of claim 16 , wherein the planarization material on the surface of the wafer includes a carbonate which produces the gaseous by-product when exposed to the radiation having the second wavelength.
Claim 19
Dependent Claim
55 words
The method of claim 16 , wherein the gaseous by-product is selected from a group consisting of hydrogen (H 2 ), nitrogen (N 2 ), nitrous oxide (N 2 O), sulfur tri-oxide (SO 3 ), acetylene (C 2 H 2 ), carbon dioxide (CO 2 ), ammonia (NH 3 ) and methane (CH 4 ).
Claim 20
Dependent Claim
32 words
The method of claim 16 , wherein the gaseous by-product produces localized gas pressure at an interface between the planarization material on the surface of the wafer and the substantially flat surface.
Claim 21
Dependent Claim
23 words
The method of claim 1 , further including: separating the substantially flat surface from the planarization material on the surface of the wafer.
Claim 22
Independent Claim
134 words
A method for planarizing a surface of a wafer using a substantially flat surface, the wafer having a planarization material on at least a portion thereof, the planarization material having a first acid-generating agent sensitive to radiation having a first wavelength and a second base-generating agent sensitive to radiation having a second wavelength, the planarization material cured in the presence of an acid, the method comprising: bringing the substantially flat surface into contact with the planarization material on the surface of the wafer; exposing the planarization material to the radiation having the second wavelength to produce a base near an interface between the planarization material and the substantially flat surface; and exposing the planarization material to the radiation having the first wavelength to produce acid using the first acid-generating agent in the planarization material.
Claim 23
Independent Claim
134 words
A method for planarizing a surface of a wafer using a substantially flat surface, the wafer having a planarization material on at least a portion thereof, the planarization material having a first acid-generating agent sensitive to radiation having a first wavelength and a second base-generating agent sensitive to radiation having a second wavelength, the planarization material cured in the presence of an acid, the method comprising: bringing the substantially flat surface into contact with the planarization material on the surface of the wafer; exposing the planarization material to the radiation having the second wavelength to produce a base near an interface between the planarization material and the substantially flat surface; and exposing the planarization material to the radiation having the first wavelength to produce acid using the first acid-generating agent in the planarization material.
Claim 24
Dependent Claim
47 words
The method of claim 21 , further comprising: absorbing the radiation having the second wavelength by the planarization material on the surface of the wafer within approximately 50 nanometers of an interface between the planarization material on the surface of the wafer and the substantially flat surface.
Claim 25
Dependent Claim
33 words
The method of claim 22 , further comprising: neutralizing the acid using base neutralizers for inhibiting curing of the planarization material near the interface between the planarization material and the substantially flat surface.
Claim 26
Dependent Claim
17 words
The method of claim 21 , further including: separating the substantially flat surface from the planarization material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-01-12 | 2007-07-14 | 2008-01-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-01-12 | 2011-07-14 | 2012-01-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-01-12 | 2015-07-14 | 2016-01-13 | $7700.00 | Window Closed / Lapsed |