US6990870B2
Expired / Lapsed
US
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System for determining characteristics of substrates employing fluid geometries
Assignee: Canon Nanotechnologies Inc
•
Filing: 2004-08-20
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Granted: 2006-01-31
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Expires: 2024-08-20
Abstract
Abstract The present invention provides a technique for determining characteristics of substrates, such as the presence of contaminants, shape, as well as the spatial relationships between spaced-apart substrates. The spatial relationships include distance and angular orientation, between first and second spaced apart substrates. The technique includes forming a volume of fluid on the second substrate, with the volume of fluid having an area associated therewith. The volume of fluid is compressed between the first and second substrates to effectuate a change in properties of the area, defining changed properties. The changed properties are sensed, and the characteristics of the first and second substrates are determined as a function of the changed properties.
Inventors
- 👤 Byung J. Choi
- 👤 Sidlgata V. Sreenivasan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 05:47
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B82; B82Y; B82Y10/00; B82Y40/00; G03F7/70; G03F7/70483
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
137 words
A system to determine system conditions by measuring characteristics of a volume of fluid disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and produce information corresponding to said system conditions.
Claim 2
Independent Claim
137 words
A system to determine system conditions by measuring characteristics of a volume of fluid disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and produce information corresponding to said system conditions.
Claim 3
Dependent Claim
22 words
The system as recited in claim 1 wherein said processing conditions include a relative angular position between said first and second substrate.
Claim 4
Dependent Claim
22 words
The system as recited in claim 1 wherein said processing conditions including a relative parallel orientation of said first and second planes.
Claim 5
Dependent Claim
26 words
The system as recited in claim 1 wherein said processing conditions further includes a presence of a defect in one of said first and second substrates.
Claim 6
Dependent Claim
40 words
The system as recited in claim 1 wherein said processing conditions further includes a presence of a defect in one of said first and second substrates and distinguishing between said first and second substrates as a source of said defect.
Claim 7
Dependent Claim
27 words
The system as recited in claim 1 wherein said processing conditions further includes a presence of a particulate contaminant on one of said first and second substrates.
Claim 8
Dependent Claim
42 words
The system as recited in claim 1 wherein said processing conditions further includes a presence of a particulate contaminant on one of said first and second substrates and distinguishing between said first and second substrates as a source of said particulate contaminant.
Claim 9
Dependent Claim
21 words
The system as recited in claim 1 wherein said processing conditions further includes a distance between said first and second substrates.
Claim 10
Dependent Claim
27 words
The system as recited in claim 1 wherein said processor determines said processing conditions in response to said change in areas measured during a period of time.
Claim 11
Independent Claim
143 words
A system to determine processing conditions by measuring characteristics of a volume of imprinting material disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of a portion of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and determine one of said differing processing conditions associated therewith.
Claim 12
Independent Claim
143 words
A system to determine processing conditions by measuring characteristics of a volume of imprinting material disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of a portion of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and determine one of said differing processing conditions associated therewith.
Claim 13
Dependent Claim
23 words
The system as recited in claim 10 wherein said processing conditions situations include a relative angular position between said first and second substrate.
Claim 14
Dependent Claim
22 words
The system as recited in claim 10 wherein said processing conditions including a relative parallel orientation of said first and second planes.
Claim 15
Dependent Claim
27 words
The system as recited in claim 10 wherein said processing conditions further includes a presence of a particulate contaminant on one of said first and second substrates.
Claim 16
Dependent Claim
42 words
The system as recited in claim 10 wherein said processing conditions further includes a presence of a particulate contaminant on one of said first and second substrates and distinguishing between said first and second substrates as a source of said particulate contaminant.
Claim 17
Dependent Claim
21 words
The system as recited in claim 10 wherein said processing conditions further includes a distance between said first and second substrates.
Claim 18
Independent Claim
140 words
A system to determine processing conditions by measuring characteristics of a volume of imprinting material disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and determine one of said differing processing conditions associated therewith.
Claim 19
Independent Claim
140 words
A system to determine processing conditions by measuring characteristics of a volume of imprinting material disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and determine one of said differing processing conditions associated therewith.
Claim 20
Dependent Claim
68 words
The system as recited in claim 16 wherein said processing condition is one of a set of conditions selected from a set consisting essentially of a relative angular position between said first and second substrates, a relative parallel orientation of said first and second planes, a presence of a particulate contaminant on one of said first and second substrates, and a distance between said first and second substrates.
Claim 21
Dependent Claim
31 words
The system as recited in claim 16 wherein said processing conditions further includes a presence of a defect in one of said displacement mechanism, said first substrate and said second substrate.
Claim 22
Dependent Claim
50 words
The system as recited in claim 16 wherein said processing conditions further includes a presence of a defect in one of said displacement mechanism, said first substrate and said second substrate and distinguishing between said displacement mechanism, said first substrate and said second substrates as a source of said defect.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2009-01-30 | 2009-08-01 | 2010-01-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2013-01-30 | 2013-08-01 | 2014-01-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2017-01-30 | 2017-08-01 | 2018-01-31 | $7700.00 | Window Closed / Lapsed |