Patent US6990870B2 successfully refreshed from Google Patents.
US6990870B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
System for determining characteristics of substrates employing fluid geometries
Assignee: Canon Nanotechnologies Inc
•
Filing: 2004-08-20
•
Granted: 2006-01-31
•
Expires: 2024-08-20
Abstract
Abstract The present invention provides a technique for determining characteristics of substrates, such as the presence of contaminants, shape, as well as the spatial relationships between spaced-apart substrates. The spatial relationships include distance and angular orientation, between first and second spaced apart substrates. The technique includes forming a volume of fluid on the second substrate, with the volume of fluid having an area associated therewith. The volume of fluid is compressed between the first and second substrates to effectuate a change in properties of the area, defining changed properties. The changed properties are sensed, and the characteristics of the first and second substrates are determined as a function of the changed properties.
Inventors
- 👤 Byung J. Choi
- 👤 Sidlgata V. Sreenivasan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 13:37
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B82; B82Y; B82Y10/00; B82Y40/00; G03F7/70; G03F7/70483
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
137 words
A system to determine system conditions by measuring characteristics of a volume of fluid disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and produce information corresponding to said system conditions.
Claim 2
Independent Claim
137 words
A system to determine system conditions by measuring characteristics of a volume of fluid disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and produce information corresponding to said system conditions.
Claim 3
Dependent Claim
22 words
The system as recited in claim 1 wherein said processing conditions include a relative angular position between said first and second substrate.
Claim 4
Dependent Claim
22 words
The system as recited in claim 1 wherein said processing conditions including a relative parallel orientation of said first and second planes.
Claim 5
Dependent Claim
26 words
The system as recited in claim 1 wherein said processing conditions further includes a presence of a defect in one of said first and second substrates.
Claim 6
Dependent Claim
40 words
The system as recited in claim 1 wherein said processing conditions further includes a presence of a defect in one of said first and second substrates and distinguishing between said first and second substrates as a source of said defect.
Claim 7
Dependent Claim
27 words
The system as recited in claim 1 wherein said processing conditions further includes a presence of a particulate contaminant on one of said first and second substrates.
Claim 8
Dependent Claim
42 words
The system as recited in claim 1 wherein said processing conditions further includes a presence of a particulate contaminant on one of said first and second substrates and distinguishing between said first and second substrates as a source of said particulate contaminant.
Claim 9
Dependent Claim
21 words
The system as recited in claim 1 wherein said processing conditions further includes a distance between said first and second substrates.
Claim 10
Dependent Claim
27 words
The system as recited in claim 1 wherein said processor determines said processing conditions in response to said change in areas measured during a period of time.
Claim 11
Independent Claim
143 words
A system to determine processing conditions by measuring characteristics of a volume of imprinting material disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of a portion of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and determine one of said differing processing conditions associated therewith.
Claim 12
Independent Claim
143 words
A system to determine processing conditions by measuring characteristics of a volume of imprinting material disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of a portion of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and determine one of said differing processing conditions associated therewith.
Claim 13
Dependent Claim
23 words
The system as recited in claim 10 wherein said processing conditions situations include a relative angular position between said first and second substrate.
Claim 14
Dependent Claim
22 words
The system as recited in claim 10 wherein said processing conditions including a relative parallel orientation of said first and second planes.
Claim 15
Dependent Claim
27 words
The system as recited in claim 10 wherein said processing conditions further includes a presence of a particulate contaminant on one of said first and second substrates.
Claim 16
Dependent Claim
42 words
The system as recited in claim 10 wherein said processing conditions further includes a presence of a particulate contaminant on one of said first and second substrates and distinguishing between said first and second substrates as a source of said particulate contaminant.
Claim 17
Dependent Claim
21 words
The system as recited in claim 10 wherein said processing conditions further includes a distance between said first and second substrates.
Claim 18
Independent Claim
140 words
A system to determine processing conditions by measuring characteristics of a volume of imprinting material disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and determine one of said differing processing conditions associated therewith.
Claim 19
Independent Claim
140 words
A system to determine processing conditions by measuring characteristics of a volume of imprinting material disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising: a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of said first and second substrates in superimposition with said volume; a detector system to sense said change in area and produce signals carrying information concerning said change in area; a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions; and a processing system, in data communication with said memory, to receive said signals and compare said information with said data and determine one of said differing processing conditions associated therewith.
Claim 20
Dependent Claim
68 words
The system as recited in claim 16 wherein said processing condition is one of a set of conditions selected from a set consisting essentially of a relative angular position between said first and second substrates, a relative parallel orientation of said first and second planes, a presence of a particulate contaminant on one of said first and second substrates, and a distance between said first and second substrates.
Claim 21
Dependent Claim
31 words
The system as recited in claim 16 wherein said processing conditions further includes a presence of a defect in one of said displacement mechanism, said first substrate and said second substrate.
Claim 22
Dependent Claim
50 words
The system as recited in claim 16 wherein said processing conditions further includes a presence of a defect in one of said displacement mechanism, said first substrate and said second substrate and distinguishing between said displacement mechanism, said first substrate and said second substrates as a source of said defect.
References Cited (Backward Citations)
US3527062A
Cited
US3807027A
Cited
US3807029A
Cited
US3811665A
Cited
US4062600A
Cited
US4098001A
Cited
DE2800476A1
Cited
US4155169A
Cited
US4267212A
Cited
US4202107A
Cited
US4326805A
Cited
US4337579A
Cited
US4355469A
Cited
US4414750A
Cited
JPS58129074U
Cited
US4552832A
Cited
US4440804A
Cited
US4544572A
Cited
US4544572B1
Cited
US4610442A
Cited
US4451507A
Cited
JPH0224848Y2
Cited
US4512848A
Cited
US4694703A
Cited
US5785918A
Cited
US4722878A
Cited
JPH0470379B2
Cited
WO1987002935A1
Cited
EP0244884B1
Cited
US4724222A
Cited
US4929083A
Cited
US4959252A
Cited
US4909151A
Cited
US4763886A
Cited
US4731155A
Cited
US4772878A
Cited
US5028366A
Cited
JPH01196749A
Cited
US4848179A
Cited
US5063321A
Cited
US4846931A
Cited
US4883561A
Cited
US4887283A
Cited
JPH0292603A
Cited
US5876550A
Cited
US5171490A
Cited
US5110514A
Cited
US4964145A
Cited
US5507411A
Cited
US5073230A
Cited
US5240550A
Cited
US5126006A
Cited
US5072126A
Cited
US5218193A
Cited
WO1992017883A1
Cited
US5155749A
Cited
US5206983A
Cited
US5952127A
Cited
US5563702A
Cited
US5270984A
Cited
US5357122A
Cited
US5392123A
Cited
US5259926A
Cited
US5277749A
Cited
US5508527A
Cited
US5204739A
Cited
US5545367A
Cited
US5452090A
Cited
US5731981A
Cited
US5601641A
Cited
US5355219A
Cited
US5726548A
Cited
US5425848A
Cited
US5348616A
Cited
US5884292A
Cited
US5414514A
Cited
US5480047A
Cited
US5900160A
Cited
US5512131A
Cited
US6180239B1
Cited
US6776094B1
Cited
US5753014A
Cited
US5942871A
Cited
US5523878A
Cited
US5425964A
Cited
US5515167A
Cited
US5504793A
Cited
EP0733455A2
Cited
US5849209A
Cited
US6088103A
Cited
US5808742A
Cited
US5625193A
Cited
US5724145A
Cited
US6518168B1
Cited
US5566584A
Cited
US5849222A
Cited
US5825482A
Cited
US5633505A
Cited
US6125183A
Cited
US6828244B2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2009-01-30 | 2009-08-01 | 2010-01-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2013-01-30 | 2013-08-01 | 2014-01-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2017-01-30 | 2017-08-01 | 2018-01-31 | $7700.00 | Window Closed / Lapsed |