US7259102B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Etching technique to planarize a multi-layer structure
Assignee: Canon Nanotechnologies Inc
•
Filing: 2005-09-30
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Granted: 2007-08-21
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Expires: 2025-09-30
Abstract
Abstract The present invention is directed to a method of etching a multi-layer structure formed from a layer of a first material and a layer of a second material differing from the first material to obtain a desired degree of planarization. To that end, the method includes creating a first set of process conditions to etch the first material, generating a second set of process conditions to etch the second material; and establishing an additional set of process conditions to concurrently etch the first and second materials at substantially the same etch rate.
Inventors
- 👤 David C. Wang
- 👤 Frank Y. Xu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 11:54
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/06; H10P95/062; H10P95/064; B; B82; B82Y; B82Y10/00; B82Y40/00; C; C09; C09D; C09D183/00; C09D183/04; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/094; G03F7/16; G03F7/162; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; G03F7/0002; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
76 words
A method of etching a multi-layer structure formed from a layer of a epoxy-containing material and a layer of a polysiloxane-containing material differing from said epoxy-containing material, said method comprising: creating a first set of process conditions to etch said epoxy-containing material; generating a second set of process conditions to etch said polysiloxane-containing material; and establishing an additional set of process conditions to concurrently etch said epoxy-containing and polysiloxane-containing material at substantially the same etch rate.
Claim 2
Independent Claim
76 words
A method of etching a multi-layer structure formed from a layer of a epoxy-containing material and a layer of a polysiloxane-containing material differing from said epoxy-containing material, said method comprising: creating a first set of process conditions to etch said epoxy-containing material; generating a second set of process conditions to etch said polysiloxane-containing material; and establishing an additional set of process conditions to concurrently etch said epoxy-containing and polysiloxane-containing material at substantially the same etch rate.
Claim 3
Dependent Claim
15 words
The method as recited in claim 1 wherein establishing occurs after creating and before generating.
Claim 4
Dependent Claim
29 words
The method as recited in claim 1 wherein creating further includes producing said first set of process conditions to achieve a maximum etch rate of a said epoxy-containing material.
Claim 5
Dependent Claim
28 words
The method as recited in claim 1 wherein generating further includes producing said second set of process conditions to achieve a maximum etch rate of said polysiloxane-containing material.
Claim 6
Dependent Claim
109 words
The method as recited in claim 1 wherein creating further includes producing said epoxy-containing set of process conditions to etch said epoxy-containing material and expose a multi-material surface containing both said epoxy-containing and polysiloxane-containing materials and establishing further includes producing said additional set of process conditions to concurrently etch said epoxy-containing and polysiloxane-containing material at substantially the same etch rate to remove substantially all of said epoxy-containing material to produce a semi-planar surface substantially all of which is formed from said polysiloxane-containing material, and generating a second set of process conditions further includes producing said second set of process conditions to form, from said semi-planar surface, a planarized surface.
Claim 7
Dependent Claim
43 words
The method as recited in claim 5 wherein said multi-layered structure includes a smoothing surface having a degree of planarization associated therewith, with establishing further including producing said additional set of process conditions to create a reveal layer with said degree of planarization.
Claim 8
Independent Claim
122 words
A method of etching a multi-layer structure formed from a layer of a first material and a layer of a second material differing from said first material, said method comprising: creating a first set of process conditions to achieve a maximum etch rate said first material to expose a multi-material surface containing both said first and second materials; exposing said multi-material surface to an additional set of process conditions to concurrently etch said first and second material at substantially the same etch rate to remove substantially all of said first material exposing a semi-planar surface substantially all of which comprises of said second material; and generating a second set of process conditions to etch said semi-planar surface to form a planarized surface.
Claim 9
Independent Claim
122 words
A method of etching a multi-layer structure formed from a layer of a first material and a layer of a second material differing from said first material, said method comprising: creating a first set of process conditions to achieve a maximum etch rate said first material to expose a multi-material surface containing both said first and second materials; exposing said multi-material surface to an additional set of process conditions to concurrently etch said first and second material at substantially the same etch rate to remove substantially all of said first material exposing a semi-planar surface substantially all of which comprises of said second material; and generating a second set of process conditions to etch said semi-planar surface to form a planarized surface.
Claim 10
Dependent Claim
23 words
The method as recited in claim 7 wherein said second material comprises a polysiloxane-containing material and said first material comprises an epoxy-containing material.
Claim 11
Dependent Claim
28 words
The method as recited in claim 7 wherein creating further includes producing said first set of process conditions to achieve a maximum etch rate of an epoxy-containing material.
Claim 12
Dependent Claim
28 words
The method as recited in claim 7 wherein generating further includes producing said second set of process conditions to achieve a maximum etch rate of a polysiloxane-containing material.
Claim 13
Dependent Claim
44 words
The method as recited in claim 7 wherein said multi-layer structure includes a smoothing layer having a degree of planarization associated therewith, with exposing further in including producing said additional set of process condition to provide said semi-planar surface with said degree of planarization.
Claim 14
Independent Claim
150 words
A method of etching a multi-layer structure formed from a layer of a epoxy-containing material and a layer of a polysiloxane-containing material differing from said epoxy-containing material, said method comprising: providing a surface of said multi-layer material with a degree of planarization; and establishing process conditions to concurrently etch said epoxy-containing and polysiloxane-containing material to remove said epoxy-containing material to generate a planarized surface of said polysiloxane-containing material having said degree of planarization, wherein establishing further includes creating a first set of process conditions to etch said epoxy containing material to expose a multi-material surface containing both said epoxy-containing and polysiloxane-containing materials, establishing an additional set of process conditions to currently etch said epoxy-containing and polysiloxane-containing material at substantially the same etch rate to remove substantially all of said epoxy containing material, and generating a second set of process conditions to etch said polysiloxane material to form said planarized surface.
Claim 15
Independent Claim
150 words
A method of etching a multi-layer structure formed from a layer of a epoxy-containing material and a layer of a polysiloxane-containing material differing from said epoxy-containing material, said method comprising: providing a surface of said multi-layer material with a degree of planarization; and establishing process conditions to concurrently etch said epoxy-containing and polysiloxane-containing material to remove said epoxy-containing material to generate a planarized surface of said polysiloxane-containing material having said degree of planarization, wherein establishing further includes creating a first set of process conditions to etch said epoxy containing material to expose a multi-material surface containing both said epoxy-containing and polysiloxane-containing materials, establishing an additional set of process conditions to currently etch said epoxy-containing and polysiloxane-containing material at substantially the same etch rate to remove substantially all of said epoxy containing material, and generating a second set of process conditions to etch said polysiloxane material to form said planarized surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-08-20 | 2011-02-19 | 2011-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-08-20 | 2015-02-19 | 2015-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-08-20 | 2019-02-19 | 2019-08-21 | $7700.00 | Window Closed / Lapsed |