US7298456B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
System for varying dimensions of a substrate during nanoscale manufacturing
Assignee: Canon Nanotechnologies Inc
•
Filing: 2005-06-01
•
Granted: 2007-11-20
•
Expires: 2025-06-01
Abstract
Abstract The present invention is directed toward a system to vary dimensions of a substrate, such as a template having a patterned mold. To that end, the system includes a substrate chuck adapted to position the substrate in a region; a pliant member; and an actuator sub-assembly elastically coupled to the substrate chuck through the pliant member. The actuator assembly includes a plurality of lever sub-assemblies, one of which includes a body lying in the region and spaced-apart from an opposing body associated with one of the remaining lever sub-assemblies of the plurality of lever sub-assemblies. One of the plurality of lever assemblies is adapted to vary a distance between the body and the opposing body. In this manner, compressive forces may be applied to the template to remove unwanted magnification or other distortions in the pattern on the mold. The pliant member is configured to attenuate a magnitude of resulting Forces sensed by the substrate chuck generated in response to the compressive forces.
Inventors
- 👤 Anshuman Cherala
- 👤 Byung-Jin Choi
- 👤 Pawan K. Nimmakayala
- 👤 Mario J. Meissl
- 👤 Sidlgata V. Sreenivasan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 22:34
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B82; B82Y; B82Y10/00; B82Y40/00; G03B; G03B27/00; G03B27/32; G03B27/52; G03B27/58; G03F7/70; G03F7/70691; G03F7/707
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
134 words
A system operable to vary dimensions of a substrate, said system comprising: a frame; a chuck body, coupled to said frame; a linkage, coupled to a first side of said frame; an actuation system, coupled to a second side of said frame, disposed opposite to said first side; a lever arm, extending between said linkage and said actuation system, having first and second opposed termini; a first body having a first end; and a second body, coupled to said linkage, having a contact surface spaced-apart from said first end a distance, wherein said linkage translates angular motion of said lever arm about an axis into movement of said body in a direction to vary said distance, while allowing angular movement between said body and said lever arm, with said actuation system imparting-said angular movement.
Claim 2
Independent Claim
134 words
A system operable to vary dimensions of a substrate, said system comprising: a frame; a chuck body, coupled to said frame; a linkage, coupled to a first side of said frame; an actuation system, coupled to a second side of said frame, disposed opposite to said first side; a lever arm, extending between said linkage and said actuation system, having first and second opposed termini; a first body having a first end; and a second body, coupled to said linkage, having a contact surface spaced-apart from said first end a distance, wherein said linkage translates angular motion of said lever arm about an axis into movement of said body in a direction to vary said distance, while allowing angular movement between said body and said lever arm, with said actuation system imparting-said angular movement.
Claim 3
Dependent Claim
47 words
The system as recited in claim 1 wherein said linkage further includes a linkage system coupled between said lever arm and said second body to facilitate angular movement of said lever arm with respect to said second body about an additional axis extending parallel to said axis.
Claim 4
Dependent Claim
47 words
The system as recited in claim 1 wherein said linkage further includes a linkage system coupled between said lever arm and said second body to facilitate angular movement of said lever arm with respect to said second body about an additional axis extending orthogonally to said axis.
Claim 5
Dependent Claim
64 words
The system as recited in claim 1 wherein said linkage further includes a linkage system coupled between said lever arm and said second body to facilitate angular movement of said lever arm with respect to said second body about two additional axes one of which extends orthogonally to said axis, with the remaining axis of said two additional axes extending parallel to said axis.
Claim 6
Dependent Claim
17 words
The system as recited in claim 1 wherein said contact surface is formed from a compliant material.
Claim 7
Dependent Claim
66 words
The system as recited in claim 1 further including an amplifier coupled to said second body, with said actuation system imparting a first force upon an additional contact surface of said second body, with said amplifier imparting a second force upon said contact surface in response to said first force with a magnitude of said second force being greater than a magnitude of said first force.
Claim 8
Dependent Claim
61 words
The system as recited in claim 1 further including an amplifier coupled to said second body, with said actuation system imparting a first force upon an additional contact surface of said second body, with said amplifier imparting a second force upon said first terminus, with a magnitude of said second force being a multiple of a magnitude of said first force.
Claim 9
Dependent Claim
94 words
The system as recited in claim 1 further including an amplifier coupled to said second body, with said actuation system imparting a first force upon an additional contact surface of said second body, with said amplifier imparting a second force upon said first terminus in response to said first force, with said amplifier including a pivot disposed from said first end a first length and disposed from said second end a second length with said magnitude of said second force being a function of a ratio of said first length and said second length.
Claim 10
Dependent Claim
15 words
The system as recited in claim 1 wherein said actuation system comprises a pneumatic actuator.
Claim 11
Independent Claim
100 words
A system operable to vary dimensions of a substrate, said system comprising: a plurality of bodies disposed about a perimeter defining an area, with a subset of said plurality of bodies being coupled to a lever arm through a linkage to translate angular motion of said lever arm about an axis to vary said area by imparting motion onto one of said plurality of bodies along a direction extending transversely to said axis, with said direction being substantially constant over a range of motion of said lever arm about said axis; and an actuation system to impart said angular movement.
Claim 12
Independent Claim
100 words
A system operable to vary dimensions of a substrate, said system comprising: a plurality of bodies disposed about a perimeter defining an area, with a subset of said plurality of bodies being coupled to a lever arm through a linkage to translate angular motion of said lever arm about an axis to vary said area by imparting motion onto one of said plurality of bodies along a direction extending transversely to said axis, with said direction being substantially constant over a range of motion of said lever arm about said axis; and an actuation system to impart said angular movement.
Claim 13
Dependent Claim
49 words
The system as recited in claim 10 wherein said linkage further includes a linkage system coupled between one of said plurality of bodies and said lever arm to facilitate angular movement of said body with respect to said lever arm about an additional axis extending parallel to said axis.
Claim 14
Dependent Claim
49 words
The system as recited in claim 10 wherein said linkage further includes a linkage system coupled between one of said plurality of bodies and said lever arm to facilitate angular movement of said body with respect to said lever arm about an additional axis extending orthogonally to said axis.
Claim 15
Dependent Claim
66 words
The system as recited in claim 10 wherein said linkage further includes a linkage system coupled between one of said plurality of bodies and said lever arm to facilitate angular movement of said body with respect to said lever arm about two additional axes one of which extends orthogonally to said axis, with the remaining axis of said two additional axes extending parallel to said axis.
Claim 16
Dependent Claim
19 words
The system as recited in claim 10 wherein one end of said body is formed from a compliant material.
Claim 17
Dependent Claim
67 words
The system as recited in claim 10 further including an amplifier coupled to said lever arm, with said actuation system imparting a first force upon a said lever arm, with said amplifier imparting a second force upon said one of the bodies of said subset in response to said first force, with a magnitude of said second force being greater than a magnitude of said first force.
Claim 18
Dependent Claim
55 words
The system as recited in claim 10 further including an amplifier coupled to said second body, with said actuation system imparting a first force upon said lever arm, with said amplifier imparting a second force upon said body, with a magnitude of said second force being a multiple of a magnitude of said first force.
Claim 19
Dependent Claim
107 words
The system as recited in claim 10 further including an amplifier coupled to said second body, with said actuation system imparting a first force upon said lever arm, with said amplifier imparting a second force upon said body in response to said first force, with said amplifier including a pivot positioned between opposed ends of said lever arm, with said pivot being positioned, with respect to one of said opposed ends, a first length and positioned from the remaining of said opposed ends, a second length with a magnitude of said second force being a function of a ratio of said first length and said second length.
Claim 20
Dependent Claim
15 words
The system as recited in claim 10 wherein said actuation system comprises a pneumatic actuator.
References Cited (Backward Citations)
US3783520A
Cited
US4256829A
Cited
US4326805A
Cited
US4492554A
Cited
US4600309A
Cited
US4724222A
Cited
US4848911A
Cited
US4929083A
Cited
US5074667A
Cited
US5148037A
Cited
US4887283A
Cited
US5148036A
Cited
US4964145A
Cited
US5184176A
Cited
US5072126A
Cited
US5155749A
Cited
US5204739A
Cited
US5452090A
Cited
US5355219A
Cited
US5414514A
Cited
US5737064A
Cited
US5563684A
Cited
US5504793A
Cited
US5808742A
Cited
US6088103A
Cited
US5633505A
Cited
US5820894A
Cited
US5854819A
Cited
US5877036A
Cited
US20030179354A1
Cited
US5802914A
Cited
US6137562A
Cited
US6049373A
Cited
US6285439B1
Cited
US6295120B1
Cited
US5999245A
Cited
US5877861A
Cited
US6019166A
Cited
US6420892B1
Cited
US6150231A
Cited
US6636311B1
Cited
US6388755B1
Cited
US6796784B1
Cited
US6522411B1
Cited
US20020018190A1
Cited
US6919152B2
Cited
US6916585B2
Cited
US20020150398A1
Cited
US6630410B2
Cited
US20030092261A1
Cited
US6489068B1
Cited
US6791669B2
Cited
US6383888B1
Cited
US6847433B2
Cited
US20030081193A1
Cited
US20040033515A1
Cited
US6665119B1
Cited
US6929762B2
Cited
US6982783B2
Cited
US6980282B2
Cited
US20040146792A1
Cited
US6770852B1
Cited
US20050006343A1
Cited
US20060001857A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-11-19 | 2011-05-21 | 2011-11-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-11-19 | 2015-05-21 | 2015-11-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-11-19 | 2019-05-21 | 2019-11-20 | $7700.00 | Window Closed / Lapsed |